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US4955035A
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Microwave-pumped, high-pressure, gas-discharge laser
Assignee: Deutsches Zentrum für Luft- und Raumfahrt eV
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Filing: 1988-03-11
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Granted: 1990-09-04
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Expires: 2008-03-11
Abstract
Abstract In order to so improve a microwave-pumped, high-pressure, gas-discharge laser, in particular, excimer laser, with an optical resonator, with a resonator gas volume arranged therein and extending along an optical axis thereof, with a microwave coupling structure enclosing the resonator gas volume within it and with a microwave generator connected to the microwave coupling structure, that a wall breakdown is substantially suppressed, it is proposed that a central area with an electric field intensity lying above a threshold value for a high-pressure gas discharge be disposed within the resonator gas volume in a transverse direction to the optical axis and be adjoined on both sides thereof by outer areas with a field intensity lying below the threshold value for the high-pressure gas discharge.
Inventors
- 👤 Frank Gekat
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 15:22
CPC Classifications
H; H01; H01S; H01S3/00; H01S3/09; H01S3/097; H01S3/0975
Claims Analysis
Total Claims: 35
Claim 1
Independent Claim
115 words
Microwave-pumped, high-pressure, gas-discharge laser, in particular, excimer laser, with an optical resonator, with a resonator gas volume arranged therein and extending along an optical axis thereof, with a microwave coupling structure enclosing the resonator gas volume within it and with a microwave generator connected to the microwave coupling structure, characterized in that a central area (62, 102) with an electric field intensity being above a threshold value for a high-pressure gas discharge is disposed within the resonator gas volume (52) in a transverse direction to the optical axis (30) and is adjoined on both sides thereof by outer areas (64, 104) with a field intensity being below the threshold value for the high-pressure gas discharge.
Claim 2
Dependent Claim
115 words
Microwave-pumped, high-pressure, gas-discharge laser, in particular, excimer laser, with an optical resonator, with a resonator gas volume arranged therein and extending along an optical axis thereof, with a microwave coupling structure enclosing the resonator gas volume within it and with a microwave generator connected to the microwave coupling structure, characterized in that a central area (62, 102) with an electric field intensity being above a threshold value for a high-pressure gas discharge is disposed within the resonator gas volume (52) in a transverse direction to the optical axis (30) and is adjoined on both sides thereof by outer areas (64, 104) with a field intensity being below the threshold value for the high-pressure gas discharge.
Claim 3
Dependent Claim
31 words
High-pressure, gas-discharge laser as defined in claim 1, characterized in that the field intensity changes abruptly at the transition from the central area (62, 102) to the outer areas (64, 104).
Claim 4
Dependent Claim
26 words
High-pressure, gas-discharge laser as defined in claim 1, characterized in that the resonator gas volume (52) is enclosed by a gas tube (70, 92, 140, 162).
Claim 5
Dependent Claim
23 words
High-pressure, gas-discharge laser as defined in claim 3, characterized in that the gas tube (70, 92, 140, 162) is made of dielectric material.
Claim 6
Dependent Claim
28 words
High-pressure, gas-discharge laser as defined in claim 1, characterized in that the resonator gas volume (52) is enclosed by the microwave coupling structure (16, 80, 110, 130, 154).
Claim 7
Dependent Claim
39 words
High-pressure, gas-discharge laser as defined in claim 1, characterized in that the resonator gas volume (52) extends in the transverse direction to the optical axis (30) beyond the areas (62, 64, 102, 104) penetrated by the electric field intensity.
Claim 8
Dependent Claim
28 words
High-pressure, gas-discharge laser as defined in claim 1, characterized in that the field intensity within the central area (62, 102) transversely to the optical axis (30) is constant.
Claim 9
Dependent Claim
34 words
High-pressure, gas-discharge laser as defined in claim 1, characterized in that the direction of propagation of the microwaves in the microwave coupling structure (16, 80, 110, 130) extends parallel to the optical axis (30).
Claim 10
Dependent Claim
32 words
High-pressure, gas-discharge laser as defined in claim 8, characterized in that the electric field intensity in the central area (62, 102) along the direction of propagation of the microwaves is substantially constant.
Claim 11
Dependent Claim
31 words
High-pressure, gas-discharge laser as defined in claim 1, characterized in that the direction of propagation of the microwaves in the microwave coupling structure (154) extends transversely to the optical axis (30).
Claim 12
Dependent Claim
23 words
High-pressure, gas-discharge laser as defined in claim 1, characterized in that the microwave coupling structure (16, 80, 130, 154) is a travelling-wave structure.
Claim 13
Dependent Claim
21 words
High-pressure, gas-discharge laser as defined in claim 1, characterized in that the microwave coupling structure (110, 154) is a resonant structure.
Claim 14
Dependent Claim
44 words
High-pressure, gas-discharge laser as defined in claim 1, characterized in that the microwave coupling structure (16, 80, 110, 130, 154) has arranged above and below the resonator gas volume (52) one conductor (ridge 42, 44, 88, 90, 156, 158; coupling conductor 136, 138) respectively.
Claim 15
Dependent Claim
26 words
High-pressure, gas-discharge laser as defined in claim 13, characterized in that a dielectric (42", 44") is arranged between the conductor and the resonator gas volume (52).
Claim 16
Dependent Claim
44 words
High-pressure, gas-discharge laser as defined in claim 13, characterized in that at least one of the conductors (42, 44, 88, 90, 136, 138, 156, 158) extends with a constant width in the direction of the optical axis (30) of the resonator gas volume (52).
Claim 17
Dependent Claim
29 words
High-pressure, gas-discharge laser as defined in claim 13, characterized in that at least one of the conductors (42, 44, 88, 90, 136, 156, 158) has an approximately rectangular cross-section.
Claim 18
Dependent Claim
28 words
High-pressure, gas-discharge laser as defined in claim 13, characterized in that the conductors (42', 44', 136, 138) have profiled cross-sections similar to a Stappaerts, Chang or Rogowski profile.
Claim 19
Dependent Claim
27 words
High-pressure, gas-discharge laser as defined in claim 1, characterized in that the microwave coupling structure (110) is coupled to a microwave waveguide by a directional coupler structure.
Claim 20
Dependent Claim
40 words
High-pressure, gas-discharge laser as defined in claim 18, characterized in that the directional coupler structure is designed such that a substantially uniform field intensity distribution occurs in the direction of the optical axis (30) in the microwave coupling structure (110).
Claim 21
Dependent Claim
22 words
High-pressure, gas-discharge laser as defined in claim 1, characterized in that the microwave coupling structure (16, 80, 110) is a waveguide structure.
Claim 22
Dependent Claim
24 words
High-pressure, gas-discharge laser as defined in claim 20, characterized in that the waveguide structure comprises an inwardly protruding ridge (42, 44, 88, 90, 156).
Claim 23
Dependent Claim
24 words
High-pressure, gas-discharge laser as defined in claim 20, characterized in that the waveguide structure comprises two opposed ridges (42, 44, 88, 90, 156, 158).
Claim 24
Dependent Claim
23 words
High-pressure, gas-discharge laser as defined in claim 22 characterized in that the ridges (42, 44, 88, 90, 156, 158) are of dielectric material.
Claim 25
Dependent Claim
18 words
High-pressure, gas-discharge laser as defined in claim 21 characterized in that the ridge is at least one conductor.
Claim 26
Dependent Claim
15 words
High-pressure, gas-discharge laser as defined in claim 22 characterized in that both ridges are conductors.
Claim 27
Dependent Claim
42 words
High-pressure, gas-discharge laser as defined in claim 21, characterized in that at least one of the ridges (42, 44, 88, 90, 156, 158) has a front surface (48) extending in the longitudinal direction of the optical axis (30) at an incline thereto.
Claim 28
Dependent Claim
30 words
High-pressure, gas-discharge laser as defined in claim 1, characterized in that the microwave coupling structure (130) is in the form of a TEM waveguide structure comprising coupling conductors (136, 138).
Claim 29
Dependent Claim
32 words
High-pressure, gas-discharge laser as defined in claim 27, characterized in that at least one coupling conductor (136, 138) extends in the longitudinal direction of the optical axis (30) at an incline thereto.
Claim 30
Dependent Claim
20 words
High-pressure, gas-discharge laser as defined in claim 1, characterized in that the resonator gas volume (52) is a closed volume.
Claim 31
Dependent Claim
19 words
High-pressure, gas-discharge laser as defined in claim 1, characterized in that gas flows through the resonator gas volume (52).
Claim 32
Dependent Claim
28 words
High-pressure, gas-discharge laser as defined in claim 1, characterized in that surfaces facing the central area (62, 102) of the resonator gas volume (52) are of non-reflecting design.
Claim 33
Dependent Claim
39 words
High-pressure, gas-discharge laser as defined in claim 31, characterized in that the surfaces facing the central area (62, 102) of the resonator gas volume (52) are on conductors (42, 44, 88, 90, 136, 138, 156, 158) of non-reflecting design.
Claim 34
Dependent Claim
34 words
High-pressure, gas-discharge laser as defined in claim 31, characterized in that the surfaces facing the central area (62, 102) of the resonator gas volume (52) are on a gas tube (70, 92, 140, 162).
Claim 35
Dependent Claim
24 words
High-pressure, gas-discharge laser as defined in claim 1, characterized in that the microwave coupling structure (80) is helically twisted around the optical axis (30).
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-09-03 | 1994-03-05 | 1994-09-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-09-03 | 1998-03-05 | 1998-09-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-09-03 | 2002-03-05 | 2002-09-04 | $7700.00 | Window Closed / Lapsed |