Patent US4954704A successfully refreshed from Google Patents.
US4954704A
Expired / Lapsed
US
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Method to increase the speed of a scanning probe microscope
Assignee: Bruker Nano Inc
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Filing: 1989-12-04
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Granted: 1990-09-04
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Expires: 2009-12-04
Abstract
Abstract In a scanning probe microscope having a probe moved by a piezoelectric 3-dimensional positioner in perpendicular X and Y directions over the surface of a sample to create a raster scan thereof and feedback controlled and sensed in a Z direction vertical to the surface to gather data about the topography of the surface, this is a method of operating the piezoelectric 3-dimensional positioner to increase the speed of gathering data about a scanning area of the surface being scanned. The method comprises the steps of, causing the positioner to traverse the surface from a first edge of the scanning area with the probe in a +X direction at a first rate of speed while feedback controlling and sensing the Z direction; causing the positioner to lift the probe above the surface a clearance distance at a second edge of the scanning area opposite the first edge in the +X direction; and, causing the positioner to return the probe to the first edge in a -X direction without feedback control thereof at a second rate of speed which is faster than the first rate of speed.
Inventors
- 👤 Virgil B. Elings
- 👤 Peter Maivald
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 12:34
CPC Classifications
G; G01; G01Q; G01Q10/00; G01Q10/04; G01Q10/06; B; B82; B82Y; B82Y35/00; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/85; Y10S977/851
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
159 words
In a scanning probe microscope having a probe moved in perpendicular X and y directions over the surface of a sample to create a raster scan thereof and controlled and sensed in a Z direction vertical to the surface to gather data about the topography of the surface, the method of operation for increasing the speed of gathering data about the surface being scanned comprising the steps of: (a) traversing the surface from a first edge of a scanning area with the probe in a +X direction at a first rate of speed while feedback controlling and sensing the Z direction; (b) lifting the probe above the surface a clearance distance at a second edge of the scanning area opposite the first edge in the +X direction; and, (c) returning the probe to the first edge in a -X direction without feedback control thereof at a second rate of speed which is faster than the first rate of speed.
Claim 2
Dependent Claim
159 words
In a scanning probe microscope having a probe moved in perpendicular X and y directions over the surface of a sample to create a raster scan thereof and controlled and sensed in a Z direction vertical to the surface to gather data about the topography of the surface, the method of operation for increasing the speed of gathering data about the surface being scanned comprising the steps of: (a) traversing the surface from a first edge of a scanning area with the probe in a +X direction at a first rate of speed while feedback controlling and sensing the Z direction; (b) lifting the probe above the surface a clearance distance at a second edge of the scanning area opposite the first edge in the +X direction; and, (c) returning the probe to the first edge in a -X direction without feedback control thereof at a second rate of speed which is faster than the first rate of speed.
Claim 3
Dependent Claim
37 words
The method of claim 1 wherein: said step of returning the probe to the first edge in a -X direction comprises moving the probe in the -X direction while maintaining the probe at substantially a constant height.
Claim 4
Dependent Claim
76 words
The method of claim 1 wherein: (a) said step of lifting the probe above the surface a clearance distance comprises lifting the probe to a point which is a pre-established distance Δ above the highest point in the previous +X scan; and, (b) said step of returning the probe to the first edge in a -X direction comprises moving the probe in the -X direction while maintaining the probe at the level set in step (a).
Claim 5
Dependent Claim
35 words
The method of claim 3 wherein: the probe is moved in a Y direction only upon reaching the first edge after said step of returning the probe to the first edge in a -X direction.
Claim 6
Dependent Claim
90 words
The method of claim 3 and additionally comprising the steps of: (a) while returning the probe to the first edge in a -X direction, sensing if the probe strikes the surface; and, (b) if the probe strikes the surface while returning the probe to the first edge in a -X direction, increasing Δ as employed in said step of lifting the probe above the surface a clearance distance comprises lifting the probe to a point which is a pre-established distance Δ above the highest point in the previous scan line.
Claim 7
Dependent Claim
56 words
The method of claim 3 and additionally comprising the step of: upon reaching the first edge after said step of returning the probe to the first edge in a -X direction, pausing for a sufficient time to allow any piezoelectric material used to position the probe to settle whereby hysteresis effects of the scanner are reduced.
Claim 8
Dependent Claim
33 words
The method of claim 6 wherein: the time of the pause is substantially the same as the time for said step of returning the probe to the first edge in a -X direction.
Claim 9
Dependent Claim
19 words
The method of claim 6 wherein: the pause occurs as the probe is being moved in the +Y direction.
Claim 10
Dependent Claim
65 words
The method of claim 1 and additionally comprising the steps of: (a) saving the height data associated with scanning the probe in the +X direction; and, (b) during said step of returning the probe to the first edge in a -X direction, using the saved height data to maintain the probe at a distance Δ above the surface where it will not strike the surface.
Claim 11
Dependent Claim
35 words
The method of claim 9 wherein: the probe is moved in a Y direction only upon reaching the first edge after said step of returning the probe to the first edge in a -X direction.
Claim 12
Dependent Claim
75 words
The method of claim 10 and additionally comprising the steps of: (a) while returning the probe to the first edge in a -X direction, sensing if the probe strikes the surface; and, (b) if the probe strikes the surface while returning the probe to the first edge in a -X direction, increasing Δ as employed in said step of using the saved height data to maintain the probe at a distance Δ above the surface.
Claim 13
Dependent Claim
56 words
The method of claim 9 and additionally comprising the step of: upon reaching the first edge after said step of returning the probe to the first edge in a -X direction, pausing for a sufficient time to allow any piezoelectric material used to position the probe to settle whereby hysteresis effects on the probe are reduced.
Claim 14
Dependent Claim
33 words
The method of claim 12 wherein: the time of the pause is substantially the same as the time for said step of returning the probe to the first edge in a -X direction.
Claim 15
Dependent Claim
19 words
The method of claim 12 wherein: the pause occurs as the probe is being moved in the +Y direction.
Claim 16
Dependent Claim
185 words
In a scanning probe microscope having a probe moved by a piezoelectric 3-dimensional positioner in perpindicular X and Y directions over the surface of a sample to create a raster scan thereof and feedback controlled and sensed in a Z direction vertical to the surface to gather data about the topography of the surface, the method of operating the pieoelectric 3-dimensional positioner to increase the speed of gathering data about a scanning area of the surface being scanned comprising the steps of: (a) causing the positioner to traverse the surface from a first edge of the scanning area with the probe in a +X direction at a first rate of speed while feedback controlling and sensing the Z direction; (b) causing the positioner to lift the probe above the surface a clearance distance at a second edge of the scanning area opposite the first edge in the +X direction; and, (c) causing the positioner to return the probe to the first edge in a -X direction without feedback control thereof at a second rate of speed which is faster than the first rate of speed.
Claim 17
Dependent Claim
185 words
In a scanning probe microscope having a probe moved by a piezoelectric 3-dimensional positioner in perpindicular X and Y directions over the surface of a sample to create a raster scan thereof and feedback controlled and sensed in a Z direction vertical to the surface to gather data about the topography of the surface, the method of operating the pieoelectric 3-dimensional positioner to increase the speed of gathering data about a scanning area of the surface being scanned comprising the steps of: (a) causing the positioner to traverse the surface from a first edge of the scanning area with the probe in a +X direction at a first rate of speed while feedback controlling and sensing the Z direction; (b) causing the positioner to lift the probe above the surface a clearance distance at a second edge of the scanning area opposite the first edge in the +X direction; and, (c) causing the positioner to return the probe to the first edge in a -X direction without feedback control thereof at a second rate of speed which is faster than the first rate of speed.
Claim 18
Dependent Claim
49 words
The method of claim 15 wherein: said step of causing the positioner to return the probe to the first edge in a -X direction comprises causing the positioner to move the probe in the -X direction while maintaining the probe at substantially the constant clearance distance above the surface.
Claim 19
Dependent Claim
92 words
The method of claim 15 wherein: (a) said step of causing the positioner to lift the probe above the surface a clearance distance comprises causing the positioner to lift the probe to a point which is a pre-established distance Δ above the highest point in the previous scan line; and, (b) said step of causing the positioner to return the probe to the first edge in a -X direction comprises causing the positioner to move the probe in the -X direction while maintaining the probe at the level set in step (a).
Claim 20
Dependent Claim
47 words
The method of claim 17 and additionally comprising the step of: causing the positioner to move the probe in a Y direction only upon reaching the first edge after said step of causing the positioner to return the probe to the first edge in a -X direction.
Claim 21
Dependent Claim
101 words
The method of claim 17 and additionally comprising the steps of: (a) while the positioner is returning the probe to the first edge in a -X direction, sensing if the probe strikes the surface; and, (b) if the probe strikes the surface while returning the probe to the first edge in a -X direction, increasing Δ as employed in said step of causing the positioner to lift the probe above the surface a clearance distance comprises causing the positioner to lift the probe to a point which is a pre-established distance Δ above the highest point in the previous scan line.
Claim 22
Dependent Claim
60 words
The method of claim 17 and additionally comprising the step of: upon reaching the first edge after said step of causing the positioner to return the probe to the first edge in a -X direction, causing the positioner to pause for a sufficient time to allow the piezoelectric material thereof to settle whereby hysteresis effects on the probe are reduced.
Claim 23
Dependent Claim
37 words
The method of claim 20 wherein: the time of the pause is substantially the same as the time for said step of causing the positioner to return the probe to the first edge in a -X direction.
Claim 24
Dependent Claim
24 words
The method of claim 20 wherein: the pause occurs after the tip is brought back down near the surface in preparation for another scan.
Claim 25
Dependent Claim
77 words
The method of claim 15 and additionally comprising the steps of: (a) saving the height data associated with scanning the probe in the +X direction; and, (b) during said step of causing the positioner to return the probe to the first edge in a -X direction, causing the positioner to use the saved height data to cause the positioner to maintain the probe at a distance Δ above the surface where it will not strike the surface.
Claim 26
Dependent Claim
47 words
The method of claim 23 and additionally comprising the step of: causing the positioner to move the probe in a Y direction only upon reaching the first edge after said step of causing the positioner to return the probe to the first edge in a -X direction.
Claim 27
Dependent Claim
89 words
The method of claim 24 and additionally comprising the steps of: (a) while the positioner is returning the probe to the first edge in a -X direction, sensing if the probe strikes the surface; and, (b) if the probe strikes the surface while the positioner is returning the probe to the first edge in a -X direction, causing the positioner to increase Δ as employed in said step of causing the positioner to use the saved height data to maintain the probe at a distance Δ above the surface.
Claim 28
Dependent Claim
60 words
The method of claim 23 and additionally comprising the step of: upon reaching the first edge after said step of causing the positioner to return the probe to the first edge in a -X direction, causing the positioner to pause for a sufficient time to allow the piezoelectric material thereof to settle whereby hysteresis effects on the probe are reduced.
Claim 29
Dependent Claim
37 words
The method of claim 26 wherein: the time of the pause is substantially the same as the time for said step of causing the positioner to return the probe to the first edge in a -X direction.
Claim 30
Dependent Claim
24 words
The method of claim 26 wherein: the pause occurs after the tip is brought back down near the surface in preparation for another scan.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-09-03 | 1994-03-05 | 1994-09-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-09-03 | 1998-03-05 | 1998-09-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-09-03 | 2002-03-05 | 2002-09-04 | $7700.00 | Window Closed / Lapsed |