Abstract An apparatus for detecting the focus-adjusted state of an objective lens comprises a plurality of juxtaposed units each having a lens assembly for receiving light fluxes passed through different areas of the pupil of the objective lens and forming light intensity distributions whose relative position varies in conformity with the focus-adjusted state of the objective lens, and a plurality of photoelectric sensor arrays arranged in a direction orthogonal to the direction in which the areas are arranged for receiving the light intensity distributions and forming a signal indicative of the focus-adjusted state of the objective lens on the basis of the relative position of the light intensity distributions.
An apparatus for detecting a focus-adjusted state of an objective lens, comprising a plurality of juxtaposed units, each unit having: a lens assembly for receiving light fluxes passed through different areas of a pupil of the objective lens and forming light intensity distributions whose relative position varies in conformity with the focus-adjusted state of the objective lens; and a plurality of photoelectric sensor arrays disposed in a direction orthogonal to a direction in which said areas are arranged, for receiving the light intensity distributions and forming a signal indicative of the focus-adjusted state of the objective lens on the basis of the relative position of the light intensity distributions, said juxtaposed units being disposed in the same optical path.
Claim 2
Independent Claim
119 words
An apparatus for detecting a focus-adjusted state of an objective lens, comprising a plurality of juxtaposed units, each unit having: a lens assembly for receiving light fluxes passed through different areas of a pupil of the objective lens and forming light intensity distributions whose relative position varies in conformity with the focus-adjusted state of the objective lens; and a plurality of photoelectric sensor arrays disposed in a direction orthogonal to a direction in which said areas are arranged, for receiving the light intensity distributions and forming a signal indicative of the focus-adjusted state of the objective lens on the basis of the relative position of the light intensity distributions, said juxtaposed units being disposed in the same optical path.
Claim 3
Dependent Claim
38 words
An apparatus according to claim 1, wherein each of said units has a mask disposed near a predetermined imaging plane of said objective lens and provided with a plurality of apertures provided correspondingly to said photoelectric sensor arrays.
Claim 4
Dependent Claim
19 words
An apparatus according to claim 2, wherein each of said units has a field lens proximate to said mask.
Claim 5
Dependent Claim
26 words
An apparatus according to claim 1, wherein said units are disposed so that the photoelectric sensor arrays of all said units are parallel to one another.
Claim 6
Dependent Claim
31 words
An apparatus according to claim 1, wherein some of said units are disposed so that the photoelectric sensor arrays thereof are orthogonal to the photoelectric sensor arrays of the other unit.
Claim 7
Dependent Claim
15 words
An apparatus according to claim 1, wherein said photoelectric sensor arrays each comprise two sub-arrays.