Patent US2017931A successfully refreshed from Google Patents.
Patent US4954079A successfully refreshed from Google Patents.
US4954079A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Heat-treating apparatus and a method for the same
Assignee: Tokyo Electron Ltd
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Filing: 1989-02-03
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Granted: 1990-09-04
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Expires: 2009-02-03
Abstract
Abstract According to this invention, a boat carried by an elevator is put on a boat supporting unit installed at a boat delivery position and capable of moving up and down and then, the boat is delivered from the boat supporting unit to transfer means for a heat-treating furnace. Therefore, boats can be transferred by the common elevator to the boat delivery positions at heat-treating furnace arranged in multiple stages. Even when heat-treating furnaces of different types are installed in multiple stages, boats can be transferred to those furnaces by using the common elevator. As a result, when boats to be sent to different types of furnaces arrive at the work position, for example, boats can be delivered to the furnaces with extremely high efficiency and by simple devices.
Inventors
- 👤 Kenichi Yamaga
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 20:07
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/32; H10P72/3218; C; C30; C30B; C30B35/00; C30B35/005; C30B31/00; C30B31/06; C30B31/10; C30B31/103; H10P72/04; H10P72/0431; H10P72/10; H10P72/13; H10P72/34; H10P72/3402; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/14
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
128 words
A heat-treating apparatus, comprising: a plurality of heat-treating furnaces arranged in multiple stages and boat supporting units installed near the entrances of the heat-treating furnaces; a work position, provided adjacent to the heat-treating furnaces, for receiving a boat carrying objects to be heat-treated; an elevator for transferring said boats between said work position and a predetermined said boat supporting unit; and transfer means having a substantially cylindrical body to accomodate a boat carrying objects to be treated and a long slot, formed in the bottom part of said substantially cylindrical body, through which said boat supporting unit comes in and goes out for bringing said boats from said boat supporting units into specified ones of said heat-treating furnaces and bringing said boats back to said boat supporting units.
Claim 2
Dependent Claim
128 words
A heat-treating apparatus, comprising: a plurality of heat-treating furnaces arranged in multiple stages and boat supporting units installed near the entrances of the heat-treating furnaces; a work position, provided adjacent to the heat-treating furnaces, for receiving a boat carrying objects to be heat-treated; an elevator for transferring said boats between said work position and a predetermined said boat supporting unit; and transfer means having a substantially cylindrical body to accomodate a boat carrying objects to be treated and a long slot, formed in the bottom part of said substantially cylindrical body, through which said boat supporting unit comes in and goes out for bringing said boats from said boat supporting units into specified ones of said heat-treating furnaces and bringing said boats back to said boat supporting units.
Claim 3
Dependent Claim
31 words
A heat-treating apparatus according to claim 1, wherein said boat supporting units have lifting mechanism to adjust the height thereof to suit the positions of the entrances of said heat-treating furnaces.
Claim 4
Dependent Claim
32 words
A heat-treating apparatus according to claim 2, wherein said lifting mechanisms each have mounted on the bed plate an air cylinder to move up and down a cradle plate for a boat.
Claim 5
Dependent Claim
25 words
A heat-treating apparatus according to claim 1, wherein said different types of heat-treating furnaces are a diffusion furnace, a CVD furnace and an oxidation furnace.
Claim 6
Dependent Claim
97 words
A heat-treating apparatus according to claim 1, wherein said elevator comprises a sliding body provided in front of said heat-treating furnaces and said work position and capable of moving vertically along an array of heat-treating furnaces, a fixed arm protruding from said sliding body, a support arm mounted on said fixed arm and capable of swinging in a plane parallel with the boat mounting place on said work position, and a couple of chucks mounted, at the ends of said support arm, changeably in the distance therebetween and used to hold said boat by the ends thereof.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-09-03 | 1994-03-05 | 1994-09-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-09-03 | 1998-03-05 | 1998-09-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-09-03 | 2002-03-05 | 2002-09-04 | $7700.00 | Window Closed / Lapsed |