US4953834A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Pendulum with bending spring joint
Assignee: Northrop Grumman Litef GmbH
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Filing: 1988-01-20
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Granted: 1990-09-04
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Expires: 2008-01-20
Abstract
Abstract A micromechanical bending spring joint is formed of selectively etched wafer material. The joint includes a pair of leaf springs arranged alongside each other. Each spring is inclined at an oblique angle to the opposed surfaces of the wafer and such springs cross to define a point of intersection. The joint, selectively etched from a single wafer, is characterized by high precision of fulcrum position, bending spring constant and transverse axis rigidity.
Inventors
- 👤 Wolfram Ebert
- 👤 Eberhard Handrich
- 👤 Martin Hafen
- 👤 Bruno Ryrko
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 21:17
CPC Classifications
F; F16; F16F; F16F1/00; F16F1/02; F16F1/18; F16C; F16C11/00; F16C11/04; F16C11/12
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
83 words
A pendulum device comprising in combination: (a) a generally T-shaped pendulum; (b) a pendulum fastening device; (c) said pendulum and said pendulum fastening device being formed from a wafer; (d) said pendulum being joined to said pendulum fastening device by means of two homologous micromechanical bending spring joints comprising a pair of leaf springs arranged alongside each other and at oblique angles with respect to the major surfaces of said wafer; and (e) said pendulum device being selectively etched from a single wafer.
Claim 2
Dependent Claim
83 words
A pendulum device comprising in combination: (a) a generally T-shaped pendulum; (b) a pendulum fastening device; (c) said pendulum and said pendulum fastening device being formed from a wafer; (d) said pendulum being joined to said pendulum fastening device by means of two homologous micromechanical bending spring joints comprising a pair of leaf springs arranged alongside each other and at oblique angles with respect to the major surfaces of said wafer; and (e) said pendulum device being selectively etched from a single wafer.
Claim 3
Dependent Claim
17 words
A pendulum device as defined in claim 1 further characterized in that said wafer is of silicon.
Claim 4
Dependent Claim
98 words
A pendulum device comprising, in combination: (a) a generally T-shaped pendulum; (b) a pendulum fastening device; (c) said pendulum and said pendulum fastening device being formed from a generally-planar wafer; (d) said pendulum being joined at said pendulum fastening device by means of two homologous micromechanical bending spring joints comprising a pair of leaf springs so arranged alongside each other and at oblique angles with respect to the major surfaces of said wafer as to cross in a plane perpendicular to the plane of said wafer; and (e) said pendulum device being selectively etched from a single wafer.
Claim 5
Dependent Claim
98 words
A pendulum device comprising, in combination: (a) a generally T-shaped pendulum; (b) a pendulum fastening device; (c) said pendulum and said pendulum fastening device being formed from a generally-planar wafer; (d) said pendulum being joined at said pendulum fastening device by means of two homologous micromechanical bending spring joints comprising a pair of leaf springs so arranged alongside each other and at oblique angles with respect to the major surfaces of said wafer as to cross in a plane perpendicular to the plane of said wafer; and (e) said pendulum device being selectively etched from a single wafer.
Claim 6
Dependent Claim
17 words
A pendulum device as defined in claim 3 further characterized in that said wafer is of silicon.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-09-03 | 1994-03-05 | 1994-09-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-09-03 | 1998-03-05 | 1998-09-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-09-03 | 2002-03-05 | 2002-09-04 | $7700.00 | Window Closed / Lapsed |