Patent US4952026A successfully refreshed from Google Patents.
US4952026A
Expired / Lapsed
US
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Integral optical element and method
Assignee: Corning Inc
•
Filing: 1989-05-22
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Granted: 1990-08-28
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Expires: 2009-05-22
Abstract
Abstract There is disclosed an optical element having a pattern of raised optical elements integral with a surface thereof, and a metal coating selectively covering the surface intermediate the optical elements to form a mask optically isolating the elements. Several methods of producing such metal coating are disclosed that employ conventional photoresist materials and means of applying and removing such materials. Also, a modified element, that is adapted to use in a liquid crystal display device, and methods of producing such modified element are disclosed.
Inventors
- 👤 Robert H. Bellman
- 👤 Nicholas F. Borrelli
- 👤 Bruce H. Raeder
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 09:43
CPC Classifications
G; G02; G02B; G02B3/00; G02B3/0006; G02B3/0037; G02B3/0056; B; B29; B29D; B29D11/00; B29D11/00009; B29D11/00278; B29D11/00365; G02B3/0012; G02B3/0062; G02B3/0068; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/1333; G02F1/1335; G02F1/133526; G03; G03F; G03F7/00; G03F7/0005; G03F7/001; G03F7/70; G03F7/70383; H; H10; H10F; H10F77/00; H10F77/40; H10F77/413; G02F1/133509; G02F1/133512; G02F1/1343; G02F1/13439; Y; Y10; Y10S; Y10S359/00; Y10S359/90
Claims Analysis
Total Claims: 42
Claim 1
Independent Claim
88 words
In an optical element having opposed surfaces, an array of raised, transparent, optical lenses integral with a first surface, transparent channels extending between the raised optical lenses and the opposed second surface, and an opaque matrix surrounding the transparent channels, the improvement comprising a self-aligned metal mask extending over the matrix portion of the first surface, but not over the raised optical lenses, to form a precisely self-aligned boundary between the raised lenses and the mask, thereby optically isolating each lens and adapting it to selectively transmit light.
Claim 2
Dependent Claim
88 words
In an optical element having opposed surfaces, an array of raised, transparent, optical lenses integral with a first surface, transparent channels extending between the raised optical lenses and the opposed second surface, and an opaque matrix surrounding the transparent channels, the improvement comprising a self-aligned metal mask extending over the matrix portion of the first surface, but not over the raised optical lenses, to form a precisely self-aligned boundary between the raised lenses and the mask, thereby optically isolating each lens and adapting it to selectively transmit light.
Claim 3
Dependent Claim
24 words
An optical element in accordance with claim 1 wherein the element comprises a photosensitive glass body and the matrix portion has a photonucleated opacity.
Claim 4
Dependent Claim
36 words
An optical element in accordance with claim 1 wherein both opposed surfaces have a pattern of raised, light-focusing, transparent, optical lenses integral therewith and each transparent channel extends between an opposed pair of said optical lenses.
Claim 5
Dependent Claim
16 words
An optical element in accordance with claim 1 wherein the raised optical lenses are spherical microlenses.
Claim 6
Dependent Claim
34 words
An optical element in accordance with claim 1 wherein the thickness of the metal mask is such that the mask is adapted to transmit in the range of 1-10% of visible light impinging thereon.
Claim 7
Dependent Claim
14 words
An optical element in accordance with claim 1 wherein the mask metal is chromium.
Claim 8
Dependent Claim
22 words
An optical element in accordance with claim 6 wherein the mask metal thickness is in the range of 40 to 70 nanometers.
Claim 9
Dependent Claim
23 words
An optical element in accordance with claim 1 wherein an anti-reflecting coating is applied over at least the lenses on the first surface.
Claim 10
Dependent Claim
20 words
An optical element in accordance with claim 8 wherein the anti-reflecting coating is a quarter wavelength layer of chromium oxide.
Claim 11
Dependent Claim
60 words
An optical element in accordance with claim 1 wherein the opposed second surface is a plano surface having a self-aligned metal mask covering the matrix portion of that surface, an insulating film covering the metal mask and the clear portions of the surface, and electrically conductive, light transmitting pads covering the insulating film over the surfaces of the clear channels.
Claim 12
Dependent Claim
14 words
An optical element in accordance with claim 10 wherein the insulating film is silica.
Claim 13
Dependent Claim
22 words
An optical element in accordance with claim 10 wherein the electrically conductive pads are composed of indium oxide doped with tin oxide.
Claim 14
Dependent Claim
24 words
An optical element in accordance with claim 10 wherein an electrically conductive lead extends from each conductive pad to an edge of the element.
Claim 15
Dependent Claim
20 words
An optical element in accordance with claim 13 wherein a second insulating film covers the electrically conductive pads and leads.
Claim 16
Dependent Claim
42 words
An optical element in accordance with claim 10 assembled in spaced relation with a second optical element having electrically conductive pads, the pads on the two elements facing each other in an aligned pattern and being separated by a liquid crystal medium.
Claim 17
Independent Claim
133 words
A method of producing an optical element having opposed surfaces, an array of raised, transparent optical lenses integral with a first opposed surface, transparent channels extending between the raised optical lenses and a second opposed surface, an opaque matrix surrounding the transparent channels, and a self-aligned metal mask covering the matrix, but not the lenses, to optically isolate each lens and adapt it to selectively transmit light, the method comprising a. separately applying a metal film and a photoresist film over the entire first surface, b. selectively exposing the photoresist covering the lenses, c. removing a portion of the photoresist, d. removing that portion of the metal film covering the lenses, and e. removing the remainder of the photoresist, to leave a metal mask covering only the matrix portion of the first surface
Claim 18
Independent Claim
133 words
A method of producing an optical element having opposed surfaces, an array of raised, transparent optical lenses integral with a first opposed surface, transparent channels extending between the raised optical lenses and a second opposed surface, an opaque matrix surrounding the transparent channels, and a self-aligned metal mask covering the matrix, but not the lenses, to optically isolate each lens and adapt it to selectively transmit light, the method comprising a. separately applying a metal film and a photoresist film over the entire first surface, b. selectively exposing the photoresist covering the lenses, c. removing a portion of the photoresist, d. removing that portion of the metal film covering the lenses, and e. removing the remainder of the photoresist, to leave a metal mask covering only the matrix portion of the first surface
Claim 19
Dependent Claim
13 words
A method in accordance with claim 16 wherein the metal applied is chromium.
Claim 20
Dependent Claim
23 words
A method in accordance with claim 17 wherein the thickness of the chromium film is in the range of 40 to 70 nanometers.
Claim 21
Dependent Claim
28 words
A method in accordance with claim 16 wherein the thickness of the metal film is such as to provide in the range of 1 to 10% light transmission.
Claim 22
Dependent Claim
80 words
A method in accordance with claim 6 wherein a metal film is applied over the said entire first surface initially, a positive photoresist film is applied over the metal film, the positive photoresist is selectively exposed through the second surface of the optical element, the exposed portion of the resist is removed to expose the underlying metal, the said exposed metal is removed and the unexposed photoresist is then removed to uncover the metal mask formed about the optical lenses.
Claim 23
Dependent Claim
34 words
A method in accordance with claim 20 wherein the thickness of the metal film is such as to provide in the range of 1 to 10% transmission of the activating light for the photoresist.
Claim 24
Dependent Claim
84 words
A method in accordance with claim 16 wherein a negative photoresist is applied over the said entire first surface initially, the negative photoresist is selectively exposed through the second surface of the optical element, the unexposed resist is removed leaving the optical lenses covered with exposed photoresist, a metal film is then deposited over the entire surface and the exposed resist and metal overlying said exposed resist are simultaneously removed to bare the optical lenses and leave a metal mask formed about the lenses.
Claim 25
Dependent Claim
16 words
A method in accordance with claim 22 wherein the metal film is applied by vacuum deposition.
Claim 26
Dependent Claim
19 words
A method in accordance with claim 22 wherein the exposed resist and overlying metal are removed by ultrasonic treatment.
Claim 27
Dependent Claim
22 words
A method in accordance with claim 22 wherein the exposed resist and overlying metal are removed with a solvent for the resist.
Claim 28
Dependent Claim
16 words
A method in accordance with claim 22 wherein the metal film is applied by electroless metallization.
Claim 29
Dependent Claim
25 words
A method in accordance with claim 16 comprising the further step of applying an anti-reflecting coating over at least the lenses on the first surface.
Claim 30
Dependent Claim
19 words
A method in accordance with claim 27 wherein the anti-reflecting coating is a quarter wavelength layer of chromium oxide.
Claim 31
Dependent Claim
95 words
A method in accordance with claim 16 comprising the further steps of a. separately applying a metal film and a photoresist film over the opposed second surface of the optical device, b. selectively exposing the photoresist through the unmasked lenses on the first surface, c. removing a portion of the photoresist, d. removing the metal from the clear portions of the second surface, and e. removing the remainder of the photoresist to provide a metal mask covering only the matrix portion of the second surface and self aligned with the mask on the first surface.
Claim 32
Dependent Claim
81 words
A method in accordance with claim 29 wherein a metal film is initially applied over the opposed second surface, a positive photoresist film is applied over the metal film, the positive photoresist is selectively exposed through the unmasked lenses of the first surface, the exposed portion of the resist is removed to expose the underlying metal, the exposed metal is removed and the unexposed resist is then removed to provide a metal mask covering only the matrix portion of the surface.
Claim 33
Dependent Claim
16 words
A method in accordance with claim 30 wherein the underlying metal is removed by chemical etching.
Claim 34
Dependent Claim
72 words
A method in accordance with claim 29 wherein a negative photoresist is initially applied over the opposed second surface, the negative photoresist is selectively exposed through the unmasked lenses of the first surface, the unexposed resist is removed, a metal film is deposited over the entire second surface and the exposed resist and overlying metal are simultaneously removed to provide a metal mask covering only the matrix portion of the second surface.
Claim 35
Dependent Claim
19 words
A method in accordance with claim 32 wherein the exposed resist and overlying metal are removed by ultrasonic treatment.
Claim 36
Dependent Claim
27 words
A method in accordance with claim 29 wherein an electrically insulating, light transmitting layer is applied over the metal mask and exposed surface of the second surface.
Claim 37
Dependent Claim
15 words
A method in accordance with claim 34 wherein the insulating layer is a silica film.
Claim 38
Dependent Claim
61 words
A method in accordance with claim 34 wherein a layer of electrically conductive, light transmitting material is applied over the insulating film, a layer of photoresist is applied over the conductive film, the photoresist is exposed through the lenses on the first surface, the unexposed resist is removed, and the conductive material thus exposed is removed to form electrically conductive pads.
Claim 39
Dependent Claim
19 words
A method in accordance with claim 36 wherein the electrically conductive material is indium oxide doped with tin oxide.
Claim 40
Dependent Claim
43 words
A method in accordance with claim 36 wherein, before the unexposed photoresist is removed, it is exposed through a further mask to produce exposed channels between the first exposed areas and the edge of the surface, thereby providing conductive paths to the surface.
Claim 41
Dependent Claim
27 words
A method in accordance with claim 38 wherein an insulating film is applied over the electrically conductive material and the exposed portions of the first insulating film.
Claim 42
Dependent Claim
34 words
A method in accordance with claim 36 wherein a second optical device is prepared in the same manner and assembled with the conductive pads in spaced facing relationship with a liquid crystal layer therebetween.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-08-27 | 1994-02-26 | 1994-08-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-08-27 | 1998-02-26 | 1998-08-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-08-27 | 2002-02-26 | 2002-08-28 | $7700.00 | Window Closed / Lapsed |