Patent US4951370A successfully refreshed from Google Patents.
US4951370A
Expired / Lapsed
US
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Method of making an intelligent multiprobe tip
Assignee: Texas Instruments Inc
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Filing: 1989-09-01
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Granted: 1990-08-28
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Expires: 2009-09-01
Abstract
Abstract An intelligent multiprobe tip comprising a mounting member comprised essentially of piezoelectric material wherein, through appropriately locating metalized areas, the characteristics of the piezoelectric material are employed to insulate selected regions from each other while providing an appropriate force-induced output signal responsive to the contact of an attached tip with a movable work piece.
Inventors
- 👤 Lee R. Reid
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:47
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/073; G01R1/07307; G01R1/07342; G01B; G01B3/00; G01B3/002; G01B3/008; G01R1/06705; Y; Y10; Y10T; Y10T29/00; Y10T29/42
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
229 words
A method of making a probe assembly comprising the steps of: (a) forming a generally L-shaped mounting support member comprised substantially and integrally of piezoelectric material; (b) depositing on the bottom surface of the downwardly extending portion of said mounting support member a thin layer of first metallization; (c) depositing on the bottom surface of the longitudinal portion of said mounting support member a thin layer of second metallization; (d) electrically coupling said first and second metallizations by depositing a thin layer of third metallization on an adjacent vertical surface of the downwardly extending portion of said mounting support member; (e) conductively mounting and affixing to said first metallization, on the lower surface of the downwardly extending portion of said mounting support member, a needle-shaped probe tip comprised substantially of resilient conductive material; (f) depositing generally along an upper quarter of one vertical surface of the longitudinal portion of said mounting support member a thin layer of fourth metallization, said fourth metallization formed so as to be electrically insulated from all other metallizations by said piezoelectric mounting support member material; (g) depositing generally along an upper quarter of the opposite vertical surface of the longitudinal portion of said mounting support member a thin layer of fifth metallization, said fifth metallization formed so as to also be electrically insulated from all other metallizations by said piezoelectric mounting support member material.
Claim 2
Independent Claim
229 words
A method of making a probe assembly comprising the steps of: (a) forming a generally L-shaped mounting support member comprised substantially and integrally of piezoelectric material; (b) depositing on the bottom surface of the downwardly extending portion of said mounting support member a thin layer of first metallization; (c) depositing on the bottom surface of the longitudinal portion of said mounting support member a thin layer of second metallization; (d) electrically coupling said first and second metallizations by depositing a thin layer of third metallization on an adjacent vertical surface of the downwardly extending portion of said mounting support member; (e) conductively mounting and affixing to said first metallization, on the lower surface of the downwardly extending portion of said mounting support member, a needle-shaped probe tip comprised substantially of resilient conductive material; (f) depositing generally along an upper quarter of one vertical surface of the longitudinal portion of said mounting support member a thin layer of fourth metallization, said fourth metallization formed so as to be electrically insulated from all other metallizations by said piezoelectric mounting support member material; (g) depositing generally along an upper quarter of the opposite vertical surface of the longitudinal portion of said mounting support member a thin layer of fifth metallization, said fifth metallization formed so as to also be electrically insulated from all other metallizations by said piezoelectric mounting support member material.
Claim 3
Dependent Claim
59 words
A method as set forth in claim 1 further comprising the step of depositing generally along a second quarter of one vertical surface of the longitudinal portion of said mounting support member a thin layer of sixth metallization, said sixth metallization formed so as to be electrically insulated from all theretofore metallizations by said piezoelectric mounting support member material.
Claim 4
Dependent Claim
68 words
A method as set forth in claim 2 further comprising the step of depositing generally along a second quarter of the opposite vertical surface of the longitudinal portion of said mounting support member a thin layer of seventh metallization, said seventh metallization formed so as to be electrically coupled to said sixth metallization and electrically insulated from all other heretofore metallizations by said piezoelectric mounting support member material.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-08-27 | 1994-02-26 | 1994-08-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-08-27 | 1998-02-26 | 1998-08-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-08-27 | 2002-02-26 | 2002-08-28 | $7700.00 | Window Closed / Lapsed |