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US4950977A
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Method of measuring mobile ion concentration in semiconductor devices
Assignee: Nokia Bell Labs
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Filing: 1988-12-21
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Granted: 1990-08-21
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Expires: 2008-12-21
Abstract
Abstract Mobile ion concentrations are measured in thick and disordered oxides by heating to a temperature greater than about 250° C.; using a triangular voltage sweep-like method with applied voltages substantially greater than normally used heretofore; and observing peak displacement currents at voltages, e.g., greater than 60 volts, substantially greater than zero volts.
Inventors
- 👤 Agustin M. Garcia
- 👤 Cris W. Lawrence
- 👤 Morgan J. Thoma
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 09:01
CPC Classifications
G; G01; G01R; G01R29/00; G01R29/24; G01R31/00; G01R31/26; G01R31/2607; G01R31/2637; H; H10; H10P; H10P95/00
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
72 words
A method including the steps of fabricating a semiconductor device with a dielectric layer and identifying mobile ion contamination in said dielectric layer which is a part of the body of said device, characterized in the steps of: heating said device; applying across said dielectric a sweep voltage of maximum magnitude greater than 5 volts; and observing to detect a peak current at a voltage having a magnitude greater than 5 volts.
Claim 2
Independent Claim
72 words
A method including the steps of fabricating a semiconductor device with a dielectric layer and identifying mobile ion contamination in said dielectric layer which is a part of the body of said device, characterized in the steps of: heating said device; applying across said dielectric a sweep voltage of maximum magnitude greater than 5 volts; and observing to detect a peak current at a voltage having a magnitude greater than 5 volts.
Claim 3
Dependent Claim
21 words
A method as recited in claim 1 wherein the maximum magnitude of the sweep voltage is greater than about 60 volts.
Claim 4
Dependent Claim
19 words
A method as recited in claim 2 wherein the maximum magnitude of the sweep voltage is about 100 volts.
Claim 5
Dependent Claim
16 words
A method as recited in claim 1 wherein the temperature is greater than about 250° C.
Claim 6
Dependent Claim
18 words
A method as recited in claim 1 in which said mobile ion concentration is measured in an oxide.
Claim 7
Dependent Claim
15 words
A method as recited in claim 5 in which said oxide is a deposited oxide.
Claim 8
Dependent Claim
19 words
A method as recited in claim 6 in which said deposited oxide has a thickness greater than 100 nm.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-08-20 | 1994-02-19 | 1994-08-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-08-20 | 1998-02-19 | 1998-08-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-08-20 | 2002-02-19 | 2002-08-21 | $7700.00 | Window Closed / Lapsed |