US4950419A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process, composition, and apparatus for purifying inert gases to remove lewis acid and oxidant impurities therefrom
Assignee: Entegris Inc
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Filing: 1988-03-17
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Granted: 1990-08-21
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Expires: 2008-03-17
Abstract
Abstract A scavenger for purifying inert gas mixtures to remove Lewis acid and oxidant impurities therefrom, comprising (i) an inert inorganic support, and (ii) an active scavenging species on the support, formed by deposition thereon of an organometallic precursor and pyrolysis thereof at a selected elevated temperature. The organometallic precursor is an alkyl metal compound comprising a metal of Group IA, IIA, and/or IIIA, wherein the pyrolysis temperature may range from about 150 DEG C. to about 250 DEG C., depending on the specific alkyl metal compound employed as the precursor. Also disclosed are: a corresponding method of making the scavenger; a process for purifying inert gases by contacting same with the scavenger; and a vessel containing a bed of the scavenger, useful as an apparatus for purifying inert gases.
Inventors
- 👤 Glenn M. Tom
- 👤 Duncan W. Brown
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 19:42
CPC Classifications
B; B01; B01J; B01J20/00; B01J20/02; B01J20/06; B01J20/08; B01J20/22; B01J20/223; B01J20/28; B01J20/28054; B01J20/28057; B01J20/30; B01J20/3078; B01J20/32; B01J20/3202; B01J20/3204; B01J20/3231; B01J20/3242; B01J20/3244; B01J20/3265; C; C01; C01B; C01B21/00; C01B21/04; C01B21/0405; C01B21/0411; C01B21/0427; C01B23/00; C01B25/00; C01B25/06; C01B6/00; C01B6/06; C01B6/065; B01J2220/00; B01J2220/50; B01J2220/56; B01J2220/64; B01J2220/66
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
270 words
A scavenger having utility for purifying inert gas mixtures to remove Lewis acid and oxidant impurities therefrom, and characterized by a water and oxygen removal capacity exceeding 5 liters of gaseous water and/or oxygen per liter of bed of the scavenger, said scavenger comprising: (a) an inert inorganic support having a surface area of from about 30 to about 1000 square meters per gram, and thermally stable up to at least about 300° C.; and (b) an active scavenging species, present on said support at a concentration of from about 1 mole to about 5 moles per liter of support, and formed by deposition on the support of an organometallic precursor and pyrolysis thereof at a selected elevated temperature on said support, said organometallic precursor and said selected elevated temperature being selected from those of the group consisting of: (i) said organometallic precursor being an organometal compound of the formula MR, wherein M is a metal from Group IA and R is alkyl, and said selected elevated temperature being in the range of from about 150° C. to about 210° C.; (ii) said organometallic precursor being an organometallic metal compound of the formula M(R) 2 , wherein M is a metal from Group IIA and R is alkyl, and said selected elevated temperature being in the range from about 150° C. to about 210° C.; and (iii) said organometallic precursor being an organometallic metal compound of the formula M(R) 3 , wherein M is a metal from Group IIIA and R is alkyl, and said selected elevated temperature being in the range of from about 150° to about 250° C.
Claim 2
Dependent Claim
270 words
A scavenger having utility for purifying inert gas mixtures to remove Lewis acid and oxidant impurities therefrom, and characterized by a water and oxygen removal capacity exceeding 5 liters of gaseous water and/or oxygen per liter of bed of the scavenger, said scavenger comprising: (a) an inert inorganic support having a surface area of from about 30 to about 1000 square meters per gram, and thermally stable up to at least about 300° C.; and (b) an active scavenging species, present on said support at a concentration of from about 1 mole to about 5 moles per liter of support, and formed by deposition on the support of an organometallic precursor and pyrolysis thereof at a selected elevated temperature on said support, said organometallic precursor and said selected elevated temperature being selected from those of the group consisting of: (i) said organometallic precursor being an organometal compound of the formula MR, wherein M is a metal from Group IA and R is alkyl, and said selected elevated temperature being in the range of from about 150° C. to about 210° C.; (ii) said organometallic precursor being an organometallic metal compound of the formula M(R) 2 , wherein M is a metal from Group IIA and R is alkyl, and said selected elevated temperature being in the range from about 150° C. to about 210° C.; and (iii) said organometallic precursor being an organometallic metal compound of the formula M(R) 3 , wherein M is a metal from Group IIIA and R is alkyl, and said selected elevated temperature being in the range of from about 150° to about 250° C.
Claim 3
Dependent Claim
31 words
A scavenger according to claim 1, wherein said support is formed of a material selected from the group consisting of: alumina; silica; aluminosilicates; kieselguhr; carbon; and mixtures, alloys, and composites thereof.
Claim 4
Dependent Claim
10 words
A scavenger according to claim 1, comprising an alumina support.
Claim 5
Dependent Claim
28 words
A scavenger according to claim 1, wherein said organometallic precursor is an alkyl metal compound comprising a metal selected from the group consisting of lithium, sodium, and potassium.
Claim 6
Dependent Claim
28 words
A scavenger according to claim 1, wherein said organometallic precursor is an alkyl metal compound comprising a metal selected from the group consisting of magnesium, barium, and clacium.
Claim 7
Dependent Claim
22 words
A scavenger according to claim 1, wherein said organometallic precursor is an alkyl metal compound comprising aluminum as the metal constituent thereof.
Claim 8
Dependent Claim
30 words
A scavenger according to claim 1, characterized by a water scavenging capacity of from about 15 to about 30 liters gaseous water per liter of a bed of said scavenger.
Claim 9
Dependent Claim
12 words
A scavenger according to claim 1, wherein said organometallic precursor is butylithium.
Claim 10
Dependent Claim
12 words
A scavenger according to claim 1, wherein said organometallic precursor is dibutylmagnesium.
Claim 11
Dependent Claim
22 words
A scavenger according to claim 1, wherein said organometallic precusor is selected from the group consisting of trimethylaluminum, triethylaluminum, and diisobutylaluminum hydride.
Claim 12
Dependent Claim
29 words
A scavenger according to claim 1, characterized by a scavenging capacity of from about 20 to about 30 liters gaseous water per liter of a bed of said scavenger.
Claim 13
Independent Claim
216 words
A method of making a scavenger having utility for purifying inert gas mixtures to remove Lewis acids and oxidant impurities therefrom, and characterized by a water and oxygen removal capacity exceeding 5 liters of gaseous water and/or oxygen per liter of bed of the scavenger, comprising the steps of: (a) providing an inert inorganic support having a surface area in the range of from about 30 to about 1000 square meters per gram, and thermally stable up to at least about 300° C.; (b) depositing on said inorganic support, at a concentration from about 1 mole/liter to about 5 moles/liter of support, an organometallic precursor selected from the group consisting of: (i) an organometal compound of the formula MR, wherein M is a metal from Group IA and R is alkyl; (ii) an organometal compound of the formula M(R) 2 , wherein M is a metal from Group IIA and R is alkyl; and (iii) an organometal compound of the formula M(R) 3 , wherein M is a metal from Group IIIA and R is alkyl; and (c) pyrolyzing the organometallic precursor on the support, at a temperature of from about 150° C. to about 210° C. for organometallic precursors (b)(i) and (b)(ii), and from about 150° C. to about 250° C. for organometallic precursor (b)(iii).
Claim 14
Independent Claim
216 words
A method of making a scavenger having utility for purifying inert gas mixtures to remove Lewis acids and oxidant impurities therefrom, and characterized by a water and oxygen removal capacity exceeding 5 liters of gaseous water and/or oxygen per liter of bed of the scavenger, comprising the steps of: (a) providing an inert inorganic support having a surface area in the range of from about 30 to about 1000 square meters per gram, and thermally stable up to at least about 300° C.; (b) depositing on said inorganic support, at a concentration from about 1 mole/liter to about 5 moles/liter of support, an organometallic precursor selected from the group consisting of: (i) an organometal compound of the formula MR, wherein M is a metal from Group IA and R is alkyl; (ii) an organometal compound of the formula M(R) 2 , wherein M is a metal from Group IIA and R is alkyl; and (iii) an organometal compound of the formula M(R) 3 , wherein M is a metal from Group IIIA and R is alkyl; and (c) pyrolyzing the organometallic precursor on the support, at a temperature of from about 150° C. to about 210° C. for organometallic precursors (b)(i) and (b)(ii), and from about 150° C. to about 250° C. for organometallic precursor (b)(iii).
Claim 15
Dependent Claim
29 words
A scavenger according to claim 1, characterized by a water and oxygen removal capacity exceeding 10 liters of gaseous water and/or oxygen per liter of bed of the scavenger.
Claim 16
Dependent Claim
150 words
A scavenger having utility for purifying inert gas mixtures to remove Lewis acid and oxidant impurities therefrom and characterized by a water and oxygen removal capacity exceeding 5 liters of gaseous water and/or oxygen per liter of bed of the scavenger, said scavenger comprising: (a) an inert inorganic support having a surface area of from about 30 to about 1000 square meters per gram, and thermally stable up to at least about 300° C.; and (b) an active scavenging species, present on said support at a concentration of from about 1 mole to about 5 moles per liter of support, and formed by deposition on the support of an organometallic precursor compound of the formula M(R) 2 , wherein M is a metal from Group IIIA and R is alkyl, and pyrolysis thereof on said support at elevated temperature in the range from about 150° C. to about 210° C.
Claim 17
Dependent Claim
150 words
A scavenger having utility for purifying inert gas mixtures to remove Lewis acid and oxidant impurities therefrom and characterized by a water and oxygen removal capacity exceeding 5 liters of gaseous water and/or oxygen per liter of bed of the scavenger, said scavenger comprising: (a) an inert inorganic support having a surface area of from about 30 to about 1000 square meters per gram, and thermally stable up to at least about 300° C.; and (b) an active scavenging species, present on said support at a concentration of from about 1 mole to about 5 moles per liter of support, and formed by deposition on the support of an organometallic precursor compound of the formula M(R) 2 , wherein M is a metal from Group IIIA and R is alkyl, and pyrolysis thereof on said support at elevated temperature in the range from about 150° C. to about 210° C.
Claim 18
Dependent Claim
213 words
A scavenger having utility for purifying inert gas mixtures to remove Lewis acid and oxidant impurities therefrom, said scavenger comprising: (a) an inert inorganic support having a surface area of from about 30 to about 1000 square meters per gram, and thermally stable up to at least about 300° C.; and (b) an active scavenging species, present on said support at a concentration of from about 1 mole to about 5 moles per liter of support, and formed by deposition on the support of an organometallic precursor and pyrolysis thereof at selected elevated temperature on said support, said organometallic precursor and said selected elevated temperature being selected from those of the group consisting of: (i) said organometallic precursor being an organometallic metal compound of the formula M(R) 2 , wherein M is a metal from Group IIA and R is alkyl, and said selected elevated temperature being in the range from about 150° C. to about 210° C.; and (ii) said organometallic precursor being an organometal compound of the formula M(R) 3 , wherein M is a metal from Group IIIA and R is alkyl, and said selected elevated temperature being in the range from about 150° C. to about 250° C.; wherein the scavenger is devoid of metallated aromatic functional organic groups.
Claim 19
Dependent Claim
213 words
A scavenger having utility for purifying inert gas mixtures to remove Lewis acid and oxidant impurities therefrom, said scavenger comprising: (a) an inert inorganic support having a surface area of from about 30 to about 1000 square meters per gram, and thermally stable up to at least about 300° C.; and (b) an active scavenging species, present on said support at a concentration of from about 1 mole to about 5 moles per liter of support, and formed by deposition on the support of an organometallic precursor and pyrolysis thereof at selected elevated temperature on said support, said organometallic precursor and said selected elevated temperature being selected from those of the group consisting of: (i) said organometallic precursor being an organometallic metal compound of the formula M(R) 2 , wherein M is a metal from Group IIA and R is alkyl, and said selected elevated temperature being in the range from about 150° C. to about 210° C.; and (ii) said organometallic precursor being an organometal compound of the formula M(R) 3 , wherein M is a metal from Group IIIA and R is alkyl, and said selected elevated temperature being in the range from about 150° C. to about 250° C.; wherein the scavenger is devoid of metallated aromatic functional organic groups.
Claim 20
Dependent Claim
134 words
A scavenger having utility for purifying inert gas mixtures to remove Lewis acid and oxidant impurities therefrom, scavenger comprising: (a) an inert inorganic support having a surface area of from about 30 to about 1000 square meters per gram, and thermally stable up to at least about 300° C.; and (b) an active scavenging species, present on said support at a concentration of from about 1 mole to about 5 moles per liter of support, and formed by deposition on the support of an organometal compound of the formula MR, wherein M is a metal from Group IIA and R is alkyl, and pyrolysis thereof on said support at elevated temperature in the range of from about 150° C. to about 210° C.; wherein the scavenger is devoid of metallated aromatic functional organic groups.
Claim 21
Dependent Claim
134 words
A scavenger having utility for purifying inert gas mixtures to remove Lewis acid and oxidant impurities therefrom, scavenger comprising: (a) an inert inorganic support having a surface area of from about 30 to about 1000 square meters per gram, and thermally stable up to at least about 300° C.; and (b) an active scavenging species, present on said support at a concentration of from about 1 mole to about 5 moles per liter of support, and formed by deposition on the support of an organometal compound of the formula MR, wherein M is a metal from Group IIA and R is alkyl, and pyrolysis thereof on said support at elevated temperature in the range of from about 150° C. to about 210° C.; wherein the scavenger is devoid of metallated aromatic functional organic groups.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-08-20 | 1994-02-19 | 1994-08-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-08-20 | 1998-02-19 | 1998-08-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-08-20 | 2002-02-19 | 2002-08-21 | $7700.00 | Window Closed / Lapsed |