US4950376A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of gas reaction process control
Assignee: National Institute of Advanced Industrial Science and Technology
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Filing: 1989-02-28
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Granted: 1990-08-21
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Expires: 2009-02-28
Abstract
Abstract A method of gas reaction process control in which plasma gas generated in a location different than a location at which a specimen is held is transported to a location at which the specimen is held and gas processing of the specimen is carried out. A control electrode with porous structure permeable to the plasma gas is provided in the transportation route and a voltage is applied to the control electrode voltage for adjusting the specimen surface potential so as to prevent degradation of the specimen due to specimen surface potential.
Inventors
- 👤 Yutaka Hayashi
- 👤 Yasushi Kondo
- 👤 Kenichi Ishii
- 👤 Eita Kinoshita
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 21:33
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32623; C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/511; H01J37/32917; H01J37/3299; H01J2237/00; H01J2237/004
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
111 words
A method of gas reaction process control wherein plasma gas generated in a location different from a location at which a specimen with a front surface and a rear surface is held is transported to said location at which said specimen is held and gas reaction processing of said specimen is carried out, the improved method comprising the steps of: providing a control electrode with a porous structure permeable to said plasma gas in said transportation route; measuring a surface potential difference between the front surface and the rear surface of said specimen; applying a control voltage to said control electrode; and adjusting said surface potential difference to a predetermined value.
Claim 2
Independent Claim
111 words
A method of gas reaction process control wherein plasma gas generated in a location different from a location at which a specimen with a front surface and a rear surface is held is transported to said location at which said specimen is held and gas reaction processing of said specimen is carried out, the improved method comprising the steps of: providing a control electrode with a porous structure permeable to said plasma gas in said transportation route; measuring a surface potential difference between the front surface and the rear surface of said specimen; applying a control voltage to said control electrode; and adjusting said surface potential difference to a predetermined value.
Claim 3
Dependent Claim
24 words
A method according to claim 1 wherein said plasma gas includes a gas containing radicals and at least one of dissociated ions and electrons.
Claim 4
Dependent Claim
65 words
A method according to claim 1 further comprising the steps of holding a monitoring specimen with a front surface and a rear surface at said location at which said specimen is held, measuring a potential difference between the front surface and rear surface of said monitoring specimen, applying a control voltage to said control electrode, and adjusting said surface potential difference to a predetermined value.
Claim 5
Dependent Claim
24 words
A method according to claim 3 wherein said plasma gas includes a gas containing radicals and at least one of dissociated ions and electrons.
Claim 6
Dependent Claim
38 words
A method according to claim 3 wherein said voltage applied to said control electrode is of such a value that any difference in electrical potential between the front surface and rear surface of said monitoring specimen becomes zero.
Claim 7
Dependent Claim
14 words
A method according to claim 8 wherein said control electrode has a mesh structure.
Claim 8
Dependent Claim
45 words
A method according to claim 3, further comprising the steps of connecting an amplifier to said control electrode for amplifying a difference between the front surface and the rear surface of said monitoring specimen, and supplying an output of said amplifier to said control electrode.
Claim 9
Dependent Claim
36 words
A method according to claim 1 wherein said voltage applied to said control electrode is of such value that any difference in electrical potential between the front surface and rear surface of said specimen becomes zero.
Claim 10
Dependent Claim
14 words
A method according to claim 1 wherein said control electrode has a mesh structure.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-08-20 | 1994-02-19 | 1994-08-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-08-20 | 1998-02-19 | 1998-08-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-08-20 | 2002-02-19 | 2002-08-21 | $7700.00 | Window Closed / Lapsed |