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US4950078A
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High accuracy differential plane mirror interferometer
Assignee: Zygo Corp
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Filing: 1988-12-08
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Granted: 1990-08-21
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Expires: 2008-12-08
Abstract
Abstract A differential plane mirror interferometer system comprises a laser source (10) which emits an input beam (12) having two linear orthogonally polarized components, which may or may not be of the same optical frequency. A birefringent optical element (64) converts the input beam components (20,21) into two separated, parallel, orthogonally polarized beams (22,23). The birefringent element (64) together with a first quarter-wave phase retardation plate (66), a second quarter-wave phase retardation plate (62) with a pair of holes, and a retroreflector (60) with a pair of holes aligned with the holes in the second quarter-wave phase retardation plate (62), causes each of the separated, parallel, orthogonally polarized beams to be reflected twice by one of two plane mirrors (68,70), namely a first plane mirror (68) or a second plane mirror (70), respectively, to produce two separated, parallel, orthogonally polarized output beams (54, 55). The birefringent optical element (64) converts the two separated, parallel, orthogonally polarized outbeams (54, 55) into a single output beam (80) in which the phase difference between the two polarization components of the single output beam (80) is directly proportional to the optical path length between the two plane mirrors (b 68, 70). This phase difference is measured by passing the output beam (80) through a polarizer (81) which mixes the two orthogonally polarized components in beam (80) with the interference between these two components being detected by a photodector (83) which produces an electrical signal (85). An electronic module (80) extracts the phase variation from this signal (85).
Inventors
- 👤 Gary E. Sommargren
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 13:58
CPC Classifications
G; G01; G01B; G01B9/00; G01B9/02; G01B9/02055; G01B9/02056; G01B9/02059; G01B9/02015; G01B9/02017; G01B9/02018; G01B9/02057; G01B2290/00; G01B2290/70
Claims Analysis
Total Claims: 37
Claim 1
Independent Claim
281 words
A differential plane mirror interferometer system capable of measuring changes in length or changes in optical length between two plane mirror surfaces in said system, said system comprising a source of an input beam with two linear orthogonally polarized components; means including a birefringent optical element, optically aligned with said input beam for converting said input beam into two, separated, parallel orthogonally polarized beams; a stationary reference plane mirror comprising one of said two plane mirror surfaces; a movable plane mirror comprising the other of said two plane mirror surfaces; means, including a corner-cube retroreflector, for causing each of said separated, parallel, orthogonally polarized beams to be reflected twice by one of said two plane mirrors, respectively, for producing two separated, parallel, orthogonally polarized output beams; means optically aligned with said two output beams for converting said two, separated, parallel orthogonally polarized output beams into a single output beam having two orthogonal polarization components having a phase difference there between, with said phase difference between said two orthogonal polarization components of said single output beam being directly proportional to the optical path length between said two plane mirrors; means optically aligned with said single output beam for mixing said orthogonal polarization components of said single output beam; means associated with said single output beam for providing an electric measurement signal therefrom; and means for extracting said phase difference between said orthogonal components of said single output beam from said electrical measurement signal, said extracted phase difference being proportional to said optical path length between said two plane mirrors; whereby said changes in length or optical length between said two plane mirror surfaces may be measured with significantly reduced cyclic non-linearity errors.
Claim 2
Dependent Claim
281 words
A differential plane mirror interferometer system capable of measuring changes in length or changes in optical length between two plane mirror surfaces in said system, said system comprising a source of an input beam with two linear orthogonally polarized components; means including a birefringent optical element, optically aligned with said input beam for converting said input beam into two, separated, parallel orthogonally polarized beams; a stationary reference plane mirror comprising one of said two plane mirror surfaces; a movable plane mirror comprising the other of said two plane mirror surfaces; means, including a corner-cube retroreflector, for causing each of said separated, parallel, orthogonally polarized beams to be reflected twice by one of said two plane mirrors, respectively, for producing two separated, parallel, orthogonally polarized output beams; means optically aligned with said two output beams for converting said two, separated, parallel orthogonally polarized output beams into a single output beam having two orthogonal polarization components having a phase difference there between, with said phase difference between said two orthogonal polarization components of said single output beam being directly proportional to the optical path length between said two plane mirrors; means optically aligned with said single output beam for mixing said orthogonal polarization components of said single output beam; means associated with said single output beam for providing an electric measurement signal therefrom; and means for extracting said phase difference between said orthogonal components of said single output beam from said electrical measurement signal, said extracted phase difference being proportional to said optical path length between said two plane mirrors; whereby said changes in length or optical length between said two plane mirror surfaces may be measured with significantly reduced cyclic non-linearity errors.
Claim 3
Dependent Claim
18 words
An interferometer system in accordance with claim 1 wherein said input beam source comprises a frequency stabilized laser.
Claim 4
Dependent Claim
25 words
An interferometer system in accordance with claim 2 wherein said linear orthogonally polarized components of said input beam source are of the same optical frequency.
Claim 5
Dependent Claim
25 words
An interferometer system in accordance with claim 2 wherein said linear orthogonally polarized components of said input beam source are of the different optical frequency.
Claim 6
Dependent Claim
25 words
An interferometer system in accordance with claim 1 wherein said linear orthogonally polarized components of said input beam source are of the same optical frequency.
Claim 7
Dependent Claim
25 words
An interferometer system in accordance with claim 1 wherein said linear orthogonally polarized components of said input beam source are of the different optical frequency.
Claim 8
Dependent Claim
83 words
An interferometer system in accordance with claim 1 wherein said means for causing each of said separated, parallel, orthogonally polarized beams to be reflected twice by one of said two plane mirrors to produce said two separated, parallel, orthogonally polarized output beams comprises a first quarter-wave phase retardation plate, said birefringent optical element, a second quarter-wave phase retardation plate with a pair of holes, and a retroreflector with a pair of holes aligned with said holes in said second quarter-wave phase retardation plate.
Claim 9
Dependent Claim
18 words
An interferometer system in accordance with claim 7 wherein said input beam source comprises a frequency stabilized laser.
Claim 10
Dependent Claim
25 words
An interferometer system in accordance with claim 8 wherein said linear orthogonally polarized components of said input beam source are of the same optical frequency.
Claim 11
Dependent Claim
25 words
An interferometer system in accordance with claim 8 wherein said linear orthogonally polarized components of said input beam source are of the different optical frequency.
Claim 12
Dependent Claim
25 words
An interferometer system in accordance with claim 7 wherein said linear orthogonally polarized components of said input beam source are of the same optical frequency.
Claim 13
Dependent Claim
25 words
An interferometer system in accordance with claim 7 wherein said linear orthogonally polarized components of said input beam source are of the different optical frequency.
Claim 14
Dependent Claim
32 words
An interferometer system in accordance with claim 1 wherein said birefringent optical element further comprises said means for converting said two separated, parallel, orthogonally polarized output beams into said single output beam.
Claim 15
Dependent Claim
18 words
An interferometer system in accordance with claim 13 wherein said input beam source comprises a frequency stabilized laser.
Claim 16
Dependent Claim
24 words
An interferometer system in accordance with claim 1 wherein said means for mixing said orthogonal components of said single output beam comprises a polarizer.
Claim 17
Dependent Claim
18 words
An interferometer system in accordance with claim 15 wherein said input beam source comprises a frequency stabilizer laser.
Claim 18
Dependent Claim
25 words
An interferometer system in accordance with claim 16 wherein said linear orthogonally polarized components of said input beam source are of the same optical frequency.
Claim 19
Dependent Claim
25 words
An interferometer system in accordance with claim 16 wherein said linear orthogonally polarized components of said input beam source are of the different optical frequency.
Claim 20
Dependent Claim
25 words
An interferometer system in accordance with claim 15 wherein said linear orthogonally polarized components of said input beam source are of the same optical frequency.
Claim 21
Dependent Claim
25 words
Am interferometer system in accordance with claim 15 wherein said linear orthogonally polarized components of said input beam source are of the different optical frequency.
Claim 22
Dependent Claim
21 words
An interferometer system in accordance with claim 1 wherein said means for producing said electrical measurement signal comprises a photoelectric detector.
Claim 23
Dependent Claim
18 words
An interferometer system in accordance with claim 21 wherein said input beam source comprises a frequency stabilized laser.
Claim 24
Dependent Claim
25 words
An interferometer system in accordance with claim 22 wherein said linear orthogonally polarized components of said input beam source are of the same optical frequency.
Claim 25
Dependent Claim
25 words
An interferometer system in accordance with claim 22 wherein said linear orthogonally polarized components of said input beam source are of the different optical frequency.
Claim 26
Dependent Claim
25 words
An interferometer system in accordance with claim 21 wherein said linear orthogonally polarized components of said input beam source are of the same optical frequency.
Claim 27
Dependent Claim
25 words
An interferometer system in accordance with claim 21 wherein said linear orthogonally polarized components of said input beam source are of the different optical frequency.
Claim 28
Dependent Claim
25 words
An interferometer system in accordance with claim 1 wherein said means for extracting said phase difference from said electrical measurement signal comprises a phase meter/accumulator.
Claim 29
Dependent Claim
18 words
An interferometer system in accordance with claim 27 wherein said input beam source comprises a frequency stabilized laser.
Claim 30
Dependent Claim
25 words
An interferometer system in accordance with claim 28 wherein said linear orthogonally polarized components of said input beam source are of the different optical frequency.
Claim 31
Dependent Claim
25 words
An interferometer system in accordance with claim 27 wherein said linear orthogonally polarized components of said input beam source are of the different optical frequency.
Claim 32
Dependent Claim
25 words
An interferometer system in accordance with claim 1 wherein said means for extracting said phase difference from said electrical measurement signal comprises a phase meter/accumulator.
Claim 33
Dependent Claim
18 words
An interferometer system in accordance with claim 31 wherein said input beam source comprises a frequency stabilized laser.
Claim 34
Dependent Claim
25 words
An interferometer system in accordance with claim 32 wherein said linear orthogonally polarized components of said input beam source are of the different optical frequency.
Claim 35
Dependent Claim
25 words
An interferometer system in accordance with claim 31 wherein said linear orthogonally polarized components of said input beam source are of the different optical frequency.
Claim 36
Dependent Claim
281 words
A differential plane mirror interferometer system capable of measuring changes in length or changes in optical length between two plane mirror surfaces in said system, said system comprising a source of an input beam with two linear orthogonally polarized components; means, including a birefringent optical element, optically aligned with said input beam for converting said input beam into two, separated, parallel orthogonally polarized beams; a first plane mirror comprising one of said two plane mirror surfaces; a second plane mirror comprising the other of said two plane mirror surfaces; means, including a corner-cube retroreflector, for causing each of said separated, parallel, orthogonally polarized beams to be reflected twice by one of said two plane mirrors, respectively, for producing two separated, parallel, orthogonally polarized output beams; means optically aligned with said two output beams for converting said two, separated, parallel orthogonally polarized output beams into a single output beam having two orthogonal polarization components having a phase difference there between, with said phase difference between said two orthogonal polarization components of said single output beam being directly proportional to the optical path length between said two plane mirrors; means optically aligned with said single output beam for mixing said orthogonal polarization components of said single output beam; means associated with said single output beam for providing an electric measurement signal therefrom; and means for extracting said phase difference between said orthogonal polarization components of said single output beam from said electrical measurement signal, said extracted phase difference being proportional to said optical path length between said two plane mirrors; whereby said changes in length or optical length between said two plane mirror surfaces may be measured with significantly reduced cyclic non-linearity errors.
Claim 37
Dependent Claim
281 words
A differential plane mirror interferometer system capable of measuring changes in length or changes in optical length between two plane mirror surfaces in said system, said system comprising a source of an input beam with two linear orthogonally polarized components; means, including a birefringent optical element, optically aligned with said input beam for converting said input beam into two, separated, parallel orthogonally polarized beams; a first plane mirror comprising one of said two plane mirror surfaces; a second plane mirror comprising the other of said two plane mirror surfaces; means, including a corner-cube retroreflector, for causing each of said separated, parallel, orthogonally polarized beams to be reflected twice by one of said two plane mirrors, respectively, for producing two separated, parallel, orthogonally polarized output beams; means optically aligned with said two output beams for converting said two, separated, parallel orthogonally polarized output beams into a single output beam having two orthogonal polarization components having a phase difference there between, with said phase difference between said two orthogonal polarization components of said single output beam being directly proportional to the optical path length between said two plane mirrors; means optically aligned with said single output beam for mixing said orthogonal polarization components of said single output beam; means associated with said single output beam for providing an electric measurement signal therefrom; and means for extracting said phase difference between said orthogonal polarization components of said single output beam from said electrical measurement signal, said extracted phase difference being proportional to said optical path length between said two plane mirrors; whereby said changes in length or optical length between said two plane mirror surfaces may be measured with significantly reduced cyclic non-linearity errors.
References Cited (Backward Citations)
US3976379A
Cited
US4693605A
Cited
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 7.5 Years (Year 8) | 1997-08-20 | 1998-02-19 | 1998-08-21 | $3760.00 | Window Closed / Lapsed |
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