Devices for regulating the temperature of an element by blowing a gas at appropriate temperature

Claim 1

Thermal regulation device used for regulating, to a desired positive or negative value, the temperature of an element, particularly a semi-conductor component, during electric testing under variable thermal conditions, said temperature regulation being obtained by blowing a gas at the desired temperature on said element, said thermal regulation device comprising a body (1) supporting an intake duct (2) for the gas at the appropriate temperature and means for insulating the element with respect to the ambient atmosphere, said insulating means comprising an insulating bell (6) covering the element (7) and supported slidingly by the free end of said duct, resilient means being inserted between the insulating bell and the body of the device and holding said bell in sealed relation against a support (8) of the element, characterized by the combination of the following arrangements: between the insulating bell (6) and the body (1) said resilient means comprises a tubular bellows (15) and is substantially coaxial with the gas intake duct and said bellows and is an annular chamber with the opposing walls of the insulating bell, of the body and of the duct, said bellows holding the bell resiliently and sealingly against the support of the element; the bell (6) and the bellows (15) are both made from a material or from respective materials which are very good heat insulators; the bell (6) is provided with at least one passage (17) between its inner volume and said annular chamber; the body (1) of the device has passing therethrough, over the whole of its height, a discharge tube (19) opening into the annular chamber at its lower end (at 18) and emerging into the atmosphere at its upper end.