Patent US4937129A successfully refreshed from Google Patents.
US4937129A
Expired / Lapsed
US
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Thin film pattern structure formed on a glass substrate
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1989-01-03
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Granted: 1990-06-26
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Expires: 2009-01-03
Abstract
Abstract A conductive pattern is formed, by laser scribing, on a soda-lime glass substrate suitable for liquid crystal devices. Besides a first ion blocking film interposed between the glass substrate and the conductive pattern, a second ion blocking film is provided on the structure in order to inhibit sodium ions drift from the substrate during the laser scribing through the pattern formed in the first ion blocking film and the conductive film constituting the pattern.
Inventors
- 👤 Shunpei Yamazaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 17:51
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/1333; G02F1/1343; G02F1/13439; G02F1/133345; H; H10; H10F; H10F77/00; H10F77/10; H10F77/16; H10F77/169; H10F77/1692; H10F77/20; H10F77/244; C; C09; C09K; C09K2323/00; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y10; Y10S; Y10S430/00; Y10S430/146; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/31504; Y10T428/31678
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
95 words
A film pattern structure comprising: a glass substrate; a first ion blocking film formed on said substrate; a conductive film formed on said first ion blocking film, portions of said first ion blocking film and said conductive film being integrally removed throughout the thickness in accordance with a prescribed pattern; and a second ion blocking film formed on the surface portions of said glass substrate that are deprived of said first ion blocking film and said conductive film and exposed through the said pattern formed in said first ion blocking film and said conductive film.
Claim 2
Dependent Claim
95 words
A film pattern structure comprising: a glass substrate; a first ion blocking film formed on said substrate; a conductive film formed on said first ion blocking film, portions of said first ion blocking film and said conductive film being integrally removed throughout the thickness in accordance with a prescribed pattern; and a second ion blocking film formed on the surface portions of said glass substrate that are deprived of said first ion blocking film and said conductive film and exposed through the said pattern formed in said first ion blocking film and said conductive film.
Claim 3
Dependent Claim
15 words
The structure of claim 1 wherein said glass substrate is made of a soda-lime glass.
Claim 4
Dependent Claim
15 words
The structure of claim 2 wherein said second ion blocking film is made of polyimide.
Claim 5
Dependent Claim
16 words
The structure of claim 2 wherein said second ion blocking film is made of silicon oxide.
Claim 6
Dependent Claim
16 words
The structure of claim 2 wherein said conductive film is made of a conductive transparent material.
Claim 7
Dependent Claim
19 words
The structure of claim 5 wherein said conductive transparent material is tin oxide, indium oxide, zinc oxide or ITO.
Claim 8
Dependent Claim
26 words
The structure of claim 1 wherein the thickness of said second ion blocking film on said conductive film is less than that on said substrate surface.
Claim 9
Independent Claim
87 words
A method of producing a pattern in a thin film formed on a glass substrate comprising the steps of: forming a first ion blocking film on said substrate; forming a conductive film on said first ion blocking film; removing said first ion blocking film and said conductive film in accordance with a prescribed pattern in order that the corresponding surface portions of said substrate are exposed therethrough; and forming a second blocking film on said first ion blocking film over the exposed surface portions of said substrate.
Claim 10
Independent Claim
87 words
A method of producing a pattern in a thin film formed on a glass substrate comprising the steps of: forming a first ion blocking film on said substrate; forming a conductive film on said first ion blocking film; removing said first ion blocking film and said conductive film in accordance with a prescribed pattern in order that the corresponding surface portions of said substrate are exposed therethrough; and forming a second blocking film on said first ion blocking film over the exposed surface portions of said substrate.
Claim 11
Dependent Claim
15 words
The method of claim 8 wherein said removing step is carried out by laser scribing.
Claim 12
Dependent Claim
16 words
The method of claim 9 wherein said laser scribing is carried out with an eximer laser.
Claim 13
Dependent Claim
22 words
The method of claim 10 wherein the wavelength of laser rays used for said laser scribing is not longer than 400 nm.
Claim 14
Dependent Claim
27 words
The method of claim 9 further comprising a step of removing the residue remaining after the removal of said first ion blocking film and said conductive film.
Claim 15
Dependent Claim
18 words
The method of claim 12 wherein said residue removal step is carried out by use of hydrofluoric acid.
Claim 16
Dependent Claim
23 words
The method of claim 8 wherein said second ion blocking film step comprises applying a liquid precursor, and thermal annealing the liquid precursor.
Claim 17
Dependent Claim
41 words
The method of claim 8, wherein the step of removing said first ion blocking film and said conductive film in accordance with a prescribed pattern includes removing said first film and said conductive film in patterns suitable for liquid crystal devices.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1993-06-25 | 1993-12-25 | 1994-06-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-06-25 | 1997-12-25 | 1998-06-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-06-25 | 2001-12-25 | 2002-06-26 | $7700.00 | Window Closed / Lapsed |