US4935625A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electron holography apparatus
Assignee: Hitachi Ltd
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Filing: 1988-08-30
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Granted: 1990-06-19
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Expires: 2008-08-30
Abstract
Abstract An electron holography apparatus includes an electron microscope which is provided with an electron source, a beam splitter for dividing an electron beam emitted from the electron source into first and second electron beams, and a phase controller for controllably changing a phase difference between the first and second electron beams, and further includes an image detector for detecting an electron interference fringe pattern which varies in accordance with the phase difference between the first and second electron beams, as a picture image, and an image data processor for determining the phase distribution of one of the first and second electron beams from detected image data.
Inventors
- 👤 Shuji Hasegawa
- 👤 Junji Endo
- 👤 Nobuyuki Osakabe
- 👤 Akira Tonomura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 09:07
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/26; G; G03; G03H; G03H5/00; H01J2237/00; H01J2237/15; H01J2237/151; H01J2237/1514; H01J2237/22; H01J2237/226; H01J2237/228; H01J2237/26; H01J2237/2614
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
139 words
An electron holography apparatus comprising: an electron microscope provided with an electron source, a beam splitter for dividing an electron beam emitted from the electron source into first and second electron beams, and a phase controller for controllably changing a phase difference between the first and second electron beams; an image detector for detecting an electron interference fringe pattern as a picture image, the electron interference fringe pattern varying in accordance with the phase difference between the first and second electron beams; an image data processor for determining the phase distribution of one of the first and second electron beams from detected image data; wherein the phase controller includes electric-field generating means for controlling the velocity of at least one of the first and second electron beams, to control the phase difference between the first and second electron beams.
Claim 2
Dependent Claim
139 words
An electron holography apparatus comprising: an electron microscope provided with an electron source, a beam splitter for dividing an electron beam emitted from the electron source into first and second electron beams, and a phase controller for controllably changing a phase difference between the first and second electron beams; an image detector for detecting an electron interference fringe pattern as a picture image, the electron interference fringe pattern varying in accordance with the phase difference between the first and second electron beams; an image data processor for determining the phase distribution of one of the first and second electron beams from detected image data; wherein the phase controller includes electric-field generating means for controlling the velocity of at least one of the first and second electron beams, to control the phase difference between the first and second electron beams.
Claim 3
Dependent Claim
147 words
An electron holography apparatus comprising: an electron microscope provided with an electron source, a beam splitter for dividing an electron beam emitted from the electron source into first and second electron beams, and a phase controller for controllably changing a phase difference between the first and second electron beams; an image detector for detecting an electron interference fringe pattern as a picture image, the electron interference fringe pattern varying in accordance with the phase difference between the first and second electron beams; an image data processor for determining the phase distribution of one of the first and second electron beams from detected image data; wherein the phase controller includes a body serving as a phase shifter, in such a manner that at least one of the first and second electron beams passes through the body, to control the phase difference between the first and second electron beams.
Claim 4
Dependent Claim
147 words
An electron holography apparatus comprising: an electron microscope provided with an electron source, a beam splitter for dividing an electron beam emitted from the electron source into first and second electron beams, and a phase controller for controllably changing a phase difference between the first and second electron beams; an image detector for detecting an electron interference fringe pattern as a picture image, the electron interference fringe pattern varying in accordance with the phase difference between the first and second electron beams; an image data processor for determining the phase distribution of one of the first and second electron beams from detected image data; wherein the phase controller includes a body serving as a phase shifter, in such a manner that at least one of the first and second electron beams passes through the body, to control the phase difference between the first and second electron beams.
Claim 5
Dependent Claim
138 words
An electron holography apparatus comprising: an electron source; a beam splitter for dividing an electron beam emitted from said electron source into first and second electron beams; a phase controller for stepwise changing a relative phase difference between the first and second electron beams into a plurality of values; an electron biprism for superposing the first and second electron beams on each other to form an electron interference fringe pattern; an image detector for detecting in a time series a plurality of electron interference fringe patterns, which are obtained in the time series according to said plurality of phase difference values, as respective image data; and an image data processor for determining a phase distribution of at least one of the first and second beams from the image data corresponding to the plurality of electron interference fringe patterns.
Claim 6
Dependent Claim
138 words
An electron holography apparatus comprising: an electron source; a beam splitter for dividing an electron beam emitted from said electron source into first and second electron beams; a phase controller for stepwise changing a relative phase difference between the first and second electron beams into a plurality of values; an electron biprism for superposing the first and second electron beams on each other to form an electron interference fringe pattern; an image detector for detecting in a time series a plurality of electron interference fringe patterns, which are obtained in the time series according to said plurality of phase difference values, as respective image data; and an image data processor for determining a phase distribution of at least one of the first and second beams from the image data corresponding to the plurality of electron interference fringe patterns.
Claim 7
Dependent Claim
43 words
An electron holography apparatus according to claim 3, wherein the phase controller includes electric-field generating means for controlling the velocity of at least one of the first and second electron beams to control the phase difference between the first and second electron beams.
Claim 8
Dependent Claim
51 words
An electron holography apparatus according to claim 3, wherein the phase controller includes a body serving as a phase shifter, in such a manner that at least one of the first and second electron beams passes through the body to control the phase difference between the first and second electron beams.
Claim 9
Dependent Claim
58 words
An electron holography apparatus according to claim 3, wherein the phase controller includes magnetic-field generating means for generating a magnetic flux so that the magnetic flux passes through a space formed between the first and second electron beams, to control the phase difference between the first and second electron beams by changing the intensity of the magnetic flux.
Claim 10
Dependent Claim
17 words
An electron holography apparatus according to claim 6, wherein the magnetic-field generating means comprises an electromagnetic coil.
Claim 11
Dependent Claim
17 words
An electron holography apparatus according to claim 6, wherein the magnetic-field generating means comprises a magnetic substance.
Claim 12
Dependent Claim
38 words
An electron holography apparatus according to claim 6, wherein the magnetic-field generating means includes a closed magnetic circuit made of a magnetic material, and an electromagnetic coil for generating the magnetic flux all over the closed magnetic circuit.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-06-18 | 1993-12-18 | 1994-06-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-06-18 | 1997-12-18 | 1998-06-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-06-18 | 2001-12-18 | 2002-06-19 | $7700.00 | Window Closed / Lapsed |