Electron holography microscope

Claim 2

An electron holography microscope system comprising: (a) an electron holography microscope for producing an interference pattern of a specimen; (b) image forming means for producing an electrical output signal produced by the scanning of the interference pattern of the specimen formed by the electron holography microscope; (c) means for generating a signal representing a straight line fringe pattern as a basic fringe pattern produced by scanning an image of spaced apart parallel lines as basic fringes, the spacing between the interference fringes of the interference pattern and the spaced apart parallel lines being such that the ratio of the spacing between adjacent parallel spaced apart lines and the spacing between adjacent interference fringes is 1 or 1/n, where n is an integer; (d) means for combining the straight line fringe signal and the electrical output signal of the image forming means to produce a composite signal; and (e) means for displaying the composite signal to produce a composite image of the interference pattern of the specimen and the straight line fringe signal.

Claim 3

An electron holography microscope system in accordance with claim 1, wherein the means for generating a straight line fringe signal comprises: (a) a television camera with variable magnification optics which is imaged on a series of parallel spaced apart lines; and (b) means for rotating the orientation of the parallel spaced apart lines with respect to a field of view of the camera.

Claim 4

An electron holography microscope system in accordance with claim 1, wherein the means for generating a straight line fringe signal comprises: (a) means for producing an electrical output signal of an electron beam interference pattern produced by the electron holography microscope without the specimen being in the field of view; (b) means for storing the electrical output signal of the means which produces the electrical output signal of the electron beam interference pattern produced by the electron holography microscope without the specimen being in the field of view; and (c) means for reproducing the stored electrical output signal synchronously with the scanning of the specimen by the image forming means.

Claim 5

An electron holography microscope system in accordance with claim 3, wherein (a) the image forming means and the means for producing an electrical output signal comprises a single television camera; and (b) the means for displaying comprises a television monitor.

Claim 6

An electron holographic microscope system in accordance with claim 2, wherein (a) the image forming means is a television camera; and (b) the means for displaying comprises a television monitor.

Claim 7

An electron holography microscope comprising: means for irradiating an electron beam into a specimen; means for dividing the electron beam into a specimen electron beam transmitted through the specimen which contains information of the specimen and a reference electron beam passing outside the specimen which functions as a reference of electron beam phase; means for producing an interference pattern of the specimen electron beam and the reference electron beam on a focusing plane of the microscope; an image forming means for producing an electrical output signal produced by scanning the interference pattern formed by the electron holography microscope means; means for generating a straight line fringe signal produced by scanning an image of spaced apart parallel lines as basic fringes, the direction of the basic fringes being identical to the direction of the interference fringes which appear on the focusing plane corresonding to the part outside the specimen, and the period of the basic fringes is equal to, or 1/n of, the period of the interference fringes which appear on the focusing plane corresponding to the part outside the specimen, where n is an integer; means for compositing the straight line fringe signal and the electrical output signal of the specimen to produce a composite signal; and means for displaying the composite signal to produce a composite image of the interference pattern of the specimen and the straight line fringe signal.

Claim 8

An electron holography microscope comprising: means for irradiating an electron beam into a specimen; means for dividing the electron beam into a specimen electron beam transmitted through the specimen which contains information of the specimen and a reference electron beam passing outside the specimen which functions as a reference of electron beam phase; means for producing an interference pattern of the specimen electron beam and the reference electron beam on a focusing plane of the microscope; an image forming means for producing an electrical output signal produced by scanning the interference pattern formed by the electron holography microscope means; means for generating a straight line fringe signal produced by scanning an image of spaced apart parallel lines as basic fringes, the direction of the basic fringes being identical to the direction of the interference fringes which appear on the focusing plane corresonding to the part outside the specimen, and the period of the basic fringes is equal to, or 1/n of, the period of the interference fringes which appear on the focusing plane corresponding to the part outside the specimen, where n is an integer; means for compositing the straight line fringe signal and the electrical output signal of the specimen to produce a composite signal; and means for displaying the composite signal to produce a composite image of the interference pattern of the specimen and the straight line fringe signal.

Claim 9

An electron holography microscope in accordance with claim 6, wherein the means for generating a straight line fringe signal comprises: a television camera with variable magnification optics which is imaged on a series of parallel spaced apart lines; and means for rotating the orientation of the parallel spaced apart lines with respect to a field of view of the camera.

Claim 10

An electron holograph microscope in accordance with claim 6, wherein the means for generating a straight line fringe signal comprises: means for producing an electrical output signal of an elecron beam interference pattern produced by the electron holography microscope means without the specimen being in the field of view; means for storing the electrical output signal of the means which produces the electrical output signal of the electron beam interference pattern produced by the electron holography microscope means without the specimen being in the field of view; and means for reproducing the stored electrical output signal synchronously with the scanning of the specimen by the image forming means.

Claim 11

An electron holography microscope in accordance with claim 8, wherein the image forming means, and the means for producing an electrical output signal comprises a single television camera; and the means for displaying comprises a television monitor.

Claim 12

An electron holographic microscope in accordance with claim 7, wherein the image forming means is a television camera; and the means for displaying comprises a television monitor.