US4924490A
Expired / Lapsed
US
⏱️ 0.0 years remaining
X-ray mirror and production thereof
Assignee: Mitsubishi Electric Corp
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Filing: 1989-01-24
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Granted: 1990-05-08
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Expires: 2009-01-24
Abstract
Abstract An X-ray mirror having its layer structure in the sequence of: a substrate having the surface roughness (R max ) of 1,000 Å or below; an intermediate layer of high molecular weight material formed on this substrate and having a surface roughness (R max ) of 100 Å or below; and a thin film formed on this intermediate layer, the X-ray mirror being produced by the process steps of: providing a substrate having a surface roughness (R max ) of 1,000 Å or below; forming on this substrate an intermediate layer of a high molecular weight material by spin-coating with a surface roughness (R max ) of 100 Å or below; and finally forming a thin film on this intermediate layer.
Inventors
- 👤 Yoichi Hashimoto
- 👤 Masami Inoue
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 18:48
CPC Classifications
G; G21; G21K; G21K1/00; G21K1/06; G21K2201/00; G21K2201/06; G21K2201/067
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
51 words
An X-ray mirror which comprises, in combination: a substrate having the surface roughness of 1,000 Å or below; an intermediate layer of high molecular weight organic polymer material formed on said substrate and having a surface roughness of 100 Å or below; and a thin film formed on said intermediate layer.
Claim 2
Dependent Claim
51 words
An X-ray mirror which comprises, in combination: a substrate having the surface roughness of 1,000 Å or below; an intermediate layer of high molecular weight organic polymer material formed on said substrate and having a surface roughness of 100 Å or below; and a thin film formed on said intermediate layer.
Claim 3
Dependent Claim
15 words
An X ray mirror according to claim 1, wherein said substrate is of copper (Cu).
Claim 4
Dependent Claim
25 words
An X-ray mirror according to claim 2, wherein said high molecular weight material is photo-resist made up of phenolic novolac resin as the principal constituent.
Claim 5
Dependent Claim
15 words
An X-ray mirror according to claim 3, wherein said thin film is of gold (Au).
Claim 6
Dependent Claim
13 words
An X-ray mirror according to claim 1, wherein said substrate is of ceramic.
Claim 7
Dependent Claim
14 words
An X-ray mirror according to claim 1, wherein said substrate is of ferrous material.
References Cited (Backward Citations)
US4693933A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-05-07 | 1993-11-06 | 1994-05-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-05-07 | 1997-11-06 | 1998-05-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-05-07 | 2001-11-06 | 2002-05-08 | $7700.00 | Window Closed / Lapsed |