Abstract In an apparatus for coating a substrate with an organic substance by placing the substrate in a coating chamber containing a gaseous hydrocarbon compound, in which the hydrocarbon compound can be broken down by means of a cathode system having magnets, a plasma is formed in the vicinity of the substrate by applying a radiofrequency voltage to the cathode system while the substrate is held immediately in front of the cathode. The pressure in the coating chamber and the supply of the electric energy from the generator to the cathode are variable for the purpose of achieving a coating quality that will change during the build-up of the coating. For this purpose, electric motor-powered valve means are inserted into the gas supply line and into the pump suction line and are operated through a timing mechanism or a control apparatus which is connected to a vacuum gauge.
A process for coating a substrate with an organic coating, comprising the following steps placing the substrate in an evacuable coating chamber having a cathode system equipped with magnets, introducing a hydrocarbon gas into said chamber, producing a plasma in the area of the substrate by applying a radiofrequency voltage to said cathode system, and varying the pressure of hydrocarbon gas in the coating chamber and the power applied to the cathode system so that a coating derived from said hydrocarbon gas and having a gradated hardness is formed on the substrate, a relatively hard protective coating being formed first, followed by a softer surface coating.
Claim 2
Dependent Claim
106 words
A process for coating a substrate with an organic coating, comprising the following steps placing the substrate in an evacuable coating chamber having a cathode system equipped with magnets, introducing a hydrocarbon gas into said chamber, producing a plasma in the area of the substrate by applying a radiofrequency voltage to said cathode system, and varying the pressure of hydrocarbon gas in the coating chamber and the power applied to the cathode system so that a coating derived from said hydrocarbon gas and having a gradated hardness is formed on the substrate, a relatively hard protective coating being formed first, followed by a softer surface coating.
Claim 3
Dependent Claim
21 words
A process as in claim 1 wherein the power applied to the cathode system is decreased as the coating is formed.
Claim 4
Dependent Claim
20 words
A process as in claim 1 wherein the pressure maintained in the chamber is increased as the coating is formed.