Patent US4916002A successfully refreshed from Google Patents.
US4916002A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Microcasting of microminiature tips
Assignee: Leland Stanford Junior University
•
Filing: 1989-01-13
•
Granted: 1990-04-10
•
Expires: 2009-01-13
Abstract
Abstract A microminiature tip and tip assembly is fabricated using microelectronic fabrication techniques. A masking aperture is formed in a dielectric layer which overlies a (100) silicon substrate. For a square aperture, a pyramidal pit is anisotropically etched into the surface of the silicon substrate. Tungsten is selectively deposited in the pit to form a pyramid-shaped microminiature point. Continued deposition of tungsten fills the aperture to form a base portion of the tip which integrally locks the tip to the dielectric layer, which is fabricated to form a support member for the tip.
Inventors
- 👤 Thomas E. Carver
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 23:10
CPC Classifications
G; G01; G01Q; G01Q70/00; G01Q70/08; G01Q70/14; C; C23; C23C; C23C16/00; C23C16/04; G01Q70/16; H; H01; H01J; H01J9/00; H01J9/02; H01J9/022; H01J9/025; H10; H10P; H10P50/00; H10P50/60; H10P50/64; H10P50/642; H10P50/644; H01J2201/00; H01J2201/30; H01J2201/304; H01J2201/30446; H01J2201/30453; H01J2201/30457; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/875; Y10S977/878; Y10S977/879; Y10T; Y10T428/00; Y10T428/12; Y10T428/12486; Y10T428/12493; Y10T428/12535; Y10T428/12611; Y10T428/24; Y10T428/24273; Y10T428/24322; Y10T428/24331; Y10T428/24339; Y10T428/24802; Y10T428/24917
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
170 words
A method of forming a microminiature tip, comprising the steps of: coating a (100) silicon substrate with a layer of dielectric material; forming an aperture in said layer of dielectric material to expose a predetermined portion of the surface of said silicon substrate; anisotropically etching a pit in the predetermined portion of the surface of the (100) silicon substrate; depositing a tip material by chemical vapor deposition into said anisotropically etched pit to form a tip body using said anisotropically etched pit as a mold, said tip body being defined to extend from bas s and tapering inwardly to a predetermined extent, said tip body having a polygonal cross section at any point along its length; depositing said tip material into the aperture in said layer of dielectric material to form a base portion of said tip, which base portion is formed to engage said aperture and integrally attach the tip to said layer of dielectric material; removing the silicon substrate surrounding said deposited tip to provide a microminiature tip.
Claim 2
Independent Claim
170 words
A method of forming a microminiature tip, comprising the steps of: coating a (100) silicon substrate with a layer of dielectric material; forming an aperture in said layer of dielectric material to expose a predetermined portion of the surface of said silicon substrate; anisotropically etching a pit in the predetermined portion of the surface of the (100) silicon substrate; depositing a tip material by chemical vapor deposition into said anisotropically etched pit to form a tip body using said anisotropically etched pit as a mold, said tip body being defined to extend from bas s and tapering inwardly to a predetermined extent, said tip body having a polygonal cross section at any point along its length; depositing said tip material into the aperture in said layer of dielectric material to form a base portion of said tip, which base portion is formed to engage said aperture and integrally attach the tip to said layer of dielectric material; removing the silicon substrate surrounding said deposited tip to provide a microminiature tip.
Claim 3
Dependent Claim
50 words
The method of claim 1 including the step of depositing said tip material into the aperture in said layer of dielectric material to form a base portion of said tip, which base portion is formed to engage said aperture and integrally attach the tip to said layer of dielectric material.
Claim 4
Dependent Claim
71 words
The method of claim 2 including: undercutting said dielectric material adjacent to said pyramidal pit to leave a lip of dielectric material around the edge of the pit; and selectively filling said pyramidal pit said tip material such that said tip material follows the contours of said pit and also forms underneath and over the lip of dielectric material to form a tip mechanically bonded to said layer of dielectric material.
Claim 5
Dependent Claim
67 words
The method of claim 3 wherein the step of depositing a tip material into said anisotropically etched pit to form a tip body using said anisotropically etched pit as a mold and the step of depositing said tip material into the aperture in said layer of dielectric material to form the base portion of said tip include selectively depositing said tip material by low-pressure chemical vapor deposition.
Claim 6
Dependent Claim
67 words
The method of claim 1 including forming an aperture in said layer of dielectric material which aperture is appropriate to result in a rectangular etched pit in the silicon substrate, anisotropically etching a rectangular pit in the silicon substrate, and depositing said tip material to form a tip body which has a rectangular cross section at any point along its length and which terminates in a line.
Claim 7
Dependent Claim
67 words
The method of claim 1 including forming an aperture in said layer of dielectric material which aperture is appropriate to result in a square etched pit in the silicon substrate, anisotropically etching a substantially square pit in the silicon substrate, and depositing said tip material to form a pyramidal-shaped tip body which has a substantially square cross section along its length and which terminates in a point.
Claim 8
Dependent Claim
31 words
The method of claim 1 wherein the step of anisotropically etching a pit in the predetermined portion of the surface of the (100) silicon substrate includes etching with a KOH solution.
Claim 9
Dependent Claim
29 words
The method of claim 1 wherein the step of anisotropically etching a pit in the predetermined portion of the surface of the (100) silicon substrate includes etching with EDP.
Claim 10
Dependent Claim
14 words
The method of claim 1 wherein said tip material includes an electrically conductive material.
Claim 11
Dependent Claim
11 words
The method of claim 8 wherein the tip material includes tungsten.
Claim 12
Dependent Claim
28 words
The method of claim 1 wherein the method of forming a microminiature tip includes batch forming a plurality of microminiature tips spaced apart on a single silicon substrate.
Claim 13
Independent Claim
185 words
A method of fabricating a microminiature tip assembly, comprising the steps of: providing a (100) oriented silicon substrate; forming a masking layer of dielectric material on the top surface of said silicon wafer; forming an opening in said dielectric masking layer to expose a selected portion of the top surface of said silicon wafer; anisotropically etching the selected portion of the top surface of said (100) oriented silicon wafer to form a pyramidal pit in said silicon surface; undercutting said dielectric material adjacent to said pyramidal pit to leave a lip of dielectric material around the edge of the pit; selectively filling said pyramidal pit with LPCVD tungsten such that said tungsten follows the contours of said pyramidal pit and also forms underneath and over the lip of dielectric material to form a conductive tip mechanically bonded to said layer of dielectric material; depositing a conducting layer over said conductive tip and said layer of dielectric material; patterning said layer of dielectric material into a cantilever structure; removing said silicon substrate to provide a cantilever of said dielectric material with said conductive tip attached thereto.
Claim 14
Independent Claim
185 words
A method of fabricating a microminiature tip assembly, comprising the steps of: providing a (100) oriented silicon substrate; forming a masking layer of dielectric material on the top surface of said silicon wafer; forming an opening in said dielectric masking layer to expose a selected portion of the top surface of said silicon wafer; anisotropically etching the selected portion of the top surface of said (100) oriented silicon wafer to form a pyramidal pit in said silicon surface; undercutting said dielectric material adjacent to said pyramidal pit to leave a lip of dielectric material around the edge of the pit; selectively filling said pyramidal pit with LPCVD tungsten such that said tungsten follows the contours of said pyramidal pit and also forms underneath and over the lip of dielectric material to form a conductive tip mechanically bonded to said layer of dielectric material; depositing a conducting layer over said conductive tip and said layer of dielectric material; patterning said layer of dielectric material into a cantilever structure; removing said silicon substrate to provide a cantilever of said dielectric material with said conductive tip attached thereto.
Claim 15
Dependent Claim
65 words
A microminiature tip assembly, comprising: a support arm member having an aperture formed therein; a microminiature tip member having a base portion engaged by said support arm member within said aperture, said microminiature tip also having a body portion extending from said base portion and tapering inward to a predetermined extent, said body portion having a polygon cross section at any point along its length.
Claim 16
Dependent Claim
65 words
A microminiature tip assembly, comprising: a support arm member having an aperture formed therein; a microminiature tip member having a base portion engaged by said support arm member within said aperture, said microminiature tip also having a body portion extending from said base portion and tapering inward to a predetermined extent, said body portion having a polygon cross section at any point along its length.
Claim 17
Dependent Claim
22 words
The tip assembly of claim 13 wherein said polygonal cross-section is substantially rectangular and wherein said body portion terminates in a line.
Claim 18
Dependent Claim
26 words
The tip assembly of claim 13 wherein said polygon is substantially square and wherein said body portion is pyramidal in shape and terminates in a point.
Claim 19
Dependent Claim
13 words
The tip assembly of claim 13 wherein said tip member is electrically conductive.
Claim 20
Dependent Claim
22 words
The tip assembly of claim 16 including a conductor formed on said support arm member and electrically coupled to said tip member.
Claim 21
Dependent Claim
18 words
The tip assembly of claim 13 wherein said support arm member is formed as a thin dielectric layer.
Claim 22
Dependent Claim
50 words
The tip assembly of claim 13 wherein said base portion of said tip member has a groove formed therein which groove is engaged by portions of said support arm member adjacent to said aperture in said support arm member to mechanically lock said tip assembly to said support arm member.
Claim 23
Dependent Claim
49 words
A microminiature tip for atomic force microscopy, scanning tunneling microscopy, field emission microscopy, and microfilming, comprising a microminiature tip member having a base from which a body portion extends and tapers inwardly to a predetermined extent, said body portion having a polygonal cross-section at any point along its length.
Claim 24
Dependent Claim
49 words
A microminiature tip for atomic force microscopy, scanning tunneling microscopy, field emission microscopy, and microfilming, comprising a microminiature tip member having a base from which a body portion extends and tapers inwardly to a predetermined extent, said body portion having a polygonal cross-section at any point along its length.
Claim 25
Dependent Claim
21 words
The tip of claim 20 wherein said polygonal cross-section is substantially rectangular and wherein said body portion terminates in a line.
Claim 26
Dependent Claim
21 words
The tip of claim 20 wherein said polygonal cross-section is substantially square and wherein said body portion terminates in a point.
Claim 27
Dependent Claim
15 words
The tip of claim 20 wherein said tip member is formed of a conductive material.
Claim 28
Dependent Claim
11 words
The tip of claim 23 wherein said conductive material includes tungsten.
Claim 29
Dependent Claim
14 words
The tip of claim 24 wherein said tungsten is deposited by chemical vapor deposition.
Claim 30
Dependent Claim
11 words
The tip of claim 24 wherein said conductive material includes nickel.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-04-09 | 1993-10-09 | 1994-04-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-04-09 | 1997-10-09 | 1998-04-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-04-09 | 2001-10-09 | 2002-04-10 | $7700.00 | Window Closed / Lapsed |