Process for fabricating color filters

Claim 2

A process for fabricating, an electrical device including a solid pickup element with a plurality of sensors arranged in a pattern for converting two dimensional images into electrical signals and a color filter having color elements arranged in the form of a mosaic or stripe precisely located relative to the sensor pattern and disposed in a color element layer formed of said color elements on the solid pickup element, said process comprising: registering the sensors of the solid pickup element with a pattern mask, having a pattern corresponding to the mosaic or stripe arrangement of color elements of the color filter, by aligning alignment marks carried respectively on the solid pickup element and on the pattern mask; irradiating a layer of coloring matter disposed between the solid pickup element and the pattern mask with an energy beam modulated by the pattern mask, to melt or sublime the coloring matter; and applying selectively the coloring matter to the solid pickup element in accordance with said modulation to form the color element layer.

Claim 3

A process according to claim 1 in which the color element layer is formed by transferring coloring matter to a color element receiving layer on the solid pickup element.

Claim 4

A process according to claim 1 in which the pattern mask has energy ray intercepting portions that are reflective to the energy ray.

Claim 5

A process according to claim 1 in which the layer of coloring matter comprises coloring matters of colors different from each other in which the pattern mask has at least two kinds of window portions each of which passes or reflects an energy ray of a particular wavelength and the energy rays with wavelengths different from each other are modified so as to thereby apply selectively different coloring onto the solid pickup element by means of the energy rays having different wavelengths.

Claim 6

A process according to claim 4 in which one pattern mask has at least three kinds of windows for modifying at least three kinds of energy rays which have different wavelengths and correspond to at least red, green and blue coloring matters whereby red, green, and blue coloring matters are selectively applied to the solid pickup element by said applying step.

Claim 7

A process according to claim 1 in which a layer of the coloring matters to be applied is provided on the pattern mask.

Claim 8

A process for fabricating an electrical device including a solid pickup element with a plurality of sensors arranged in a pattern for converting two dimensional images into electrical signals and a color filter having a color element layer that includes color elements of colors different from each other disposed on the solid pickup element and precisely located relative to the sensor pattern, said process comprising: registering the sensors of the solid pickup element with a pattern mask, having a pattern corresponding to the arrangement of different color elements of the color filter, by aligning alignment marks carried respectively on the solid pickup element and on the pattern mask; and irradiating a layer, disposed between the solid pickup element and the pattern mask, of coloring matters different from each other and corresponding to the different colors, with an energy beam modulated by the pattern mask and with a monitor beam to melt or sublime the coloring matters, thereby applying selectively the coloring matters onto the solid pickup element in accordance with the modulation, to form the color element layer, the modulation by the monitor beam being conducted by scanning the pattern mask with the monitor beam, detecting a reflecting beam of the monitor beam at the pattern mask surface and modulating the energy beam.

Claim 9

A process for fabricating an electrical device including a solid pickup element with a plurality of sensors arranged in a pattern for converting two dimensional images into electrical signals and a color filter having a color element layer that includes color elements of colors different from each other disposed on the solid pickup element and precisely located relative to the sensor pattern, said process comprising: registering the sensors of the solid pickup element with a pattern mask, having a pattern corresponding to the arrangement of different color elements of the color filter, by aligning alignment marks carried respectively on the solid pickup element and on the pattern mask; and irradiating a layer, disposed between the solid pickup element and the pattern mask, of coloring matters different from each other and corresponding to the different colors, with an energy beam modulated by the pattern mask and with a monitor beam to melt or sublime the coloring matters, thereby applying selectively the coloring matters onto the solid pickup element in accordance with the modulation, to form the color element layer, the modulation by the monitor beam being conducted by scanning the pattern mask with the monitor beam, detecting a reflecting beam of the monitor beam at the pattern mask surface and modulating the energy beam.

Claim 10

A process for fabricating an electrical device including a solid pickup element with a plurality of sensors arranged in a pattern for converting two dimensional images into electrical signals and a color filter having a color element layer that includes color elements of color different from each other disposed on the solid pickup element and precisely located relative to the sensor pattern, said process comprising: providing a pattern mask in registration with the sensors of the solid pickup element and having at least two window portions that pass or reflect particular energy rays of wavelengths different from each other; and modulating an energy beam by the pattern mask to irradiate a layer disposed between the solid pickup element and the pattern mask of coloring matters different from each other and corresponding to the different colors with modulated energy rays, thereby applying selectively different coloring matters onto the solid pickup element by means of the energy rays having different wavelengths to produce the color element layer.

Claim 11

A process for fabricating an electrical device including a solid pickup element with a plurality of sensors arranged in a pattern for converting two dimensional images into electrical signals and a color filter having a color element layer that includes color elements of color different from each other disposed on the solid pickup element and precisely located relative to the sensor pattern, said process comprising: providing a pattern mask in registration with the sensors of the solid pickup element and having at least two window portions that pass or reflect particular energy rays of wavelengths different from each other; and modulating an energy beam by the pattern mask to irradiate a layer disposed between the solid pickup element and the pattern mask of coloring matters different from each other and corresponding to the different colors with modulated energy rays, thereby applying selectively different coloring matters onto the solid pickup element by means of the energy rays having different wavelengths to produce the color element layer.

Claim 12

A process according to any one of claims 1, 9 or 8, in which the pattern mask is finely divided.

Claim 13

A process according to any one of claims 1, 9 or 8, in which dry coloring matter comprises the layer thereof.

Claim 14

A process according to any one of claims 1, 9 or 8, in which the energy beam is modulated by scanning across the pattern mask.