US4910965A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Means for periodic desorption of a cryopump
Assignee: Azenta Inc
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Filing: 1984-06-29
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Granted: 1990-03-27
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Expires: 2004-06-29
Abstract
Abstract The invention discloses a cryopump comprising a primary cryopanel 67 associated with a low temperature heat sink 60 having means for adsorbing a first low boiling point gas and a secondary cryopanel 80 associated with heat sink 60 and a higher temperature heat sink 48 having means for condensing a higher boiling point gas. There are means 90 for selectively irradiating the primary cryopanel from a location external to the vacuum chamber. The radiation raises the temperature of the cryopanel above that which is necessary to cause said first gas to become desorbed from said cryopanel while having minimal effect on the capacity of the higher temperature heat sink.
Inventors
- 👤 Robert J. Lepofsky
- 👤 Bruce R. Andeen
- 👤 Gerald R. Pruitt
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 06:28
CPC Classifications
F; F04; F04B; F04B37/00; F04B37/06; F04B37/08; Y; Y10; Y10S; Y10S417/00; Y10S417/901
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
115 words
A cryopump comprising a primary cryopanel associated with a low temperature heat sink having means for adsorbing a first low boiling point gas, a secondary cryopanel associated with a higher temperature heat sink having means for condensing a higher boiling point gas, a vacuum chamber enclosing the primary and secondary cryopanels, a source of thermal radiation external to the vacuum chamber and a transparent member closing the vacuum chamber which is transparent to radiation from said source of radiation, the radiation being selectively transmitted through the transparent member to the primary cryopanel to raise the temperature of the cryopanel above that which is necessary to cause said first gas to become desorbed from said cryopanel.
Claim 2
Dependent Claim
115 words
A cryopump comprising a primary cryopanel associated with a low temperature heat sink having means for adsorbing a first low boiling point gas, a secondary cryopanel associated with a higher temperature heat sink having means for condensing a higher boiling point gas, a vacuum chamber enclosing the primary and secondary cryopanels, a source of thermal radiation external to the vacuum chamber and a transparent member closing the vacuum chamber which is transparent to radiation from said source of radiation, the radiation being selectively transmitted through the transparent member to the primary cryopanel to raise the temperature of the cryopanel above that which is necessary to cause said first gas to become desorbed from said cryopanel.
Claim 3
Dependent Claim
18 words
A cryopump as claimed in claim 1 comprising a light guide for transmitting the radiation toward the cryopanel.
Claim 4
Dependent Claim
15 words
A cryopump as claimed in claim 2 wherein the light guide closes the vacuum chamber.
Claim 5
Dependent Claim
16 words
A cryopump as claimed in claim 2 wherein the light guide is a fibre optic bundle.
Claim 6
Dependent Claim
14 words
A cryopump as clammed in claim 1 wherein the transparent member is a window.
Claim 7
Dependent Claim
121 words
A cryopump comprising a primary cryopanel associated with a low temperature heat sink having means for adsorbing a first low boiling point gas, a secondary cryopanel associated with a higher temperature heat sink having means for condensing a higher boiling point gas a vacuum chamber enclosing the primary and secondary cryopanels, a source of thermal radiation external to the vacuum chamber and a transparent member closing the vacuum chamber which is transparent to radiation from said source of radiation, the radiation being selectively transmitted through the transparent member to the primary cryopanel to cause said first low boiling point gas to be desorbed from the primary cryopanel without causing substantial sublimation of the higher boiling point gas from the secondary cryopanel.
Claim 8
Dependent Claim
121 words
A cryopump comprising a primary cryopanel associated with a low temperature heat sink having means for adsorbing a first low boiling point gas, a secondary cryopanel associated with a higher temperature heat sink having means for condensing a higher boiling point gas a vacuum chamber enclosing the primary and secondary cryopanels, a source of thermal radiation external to the vacuum chamber and a transparent member closing the vacuum chamber which is transparent to radiation from said source of radiation, the radiation being selectively transmitted through the transparent member to the primary cryopanel to cause said first low boiling point gas to be desorbed from the primary cryopanel without causing substantial sublimation of the higher boiling point gas from the secondary cryopanel.
Claim 9
Dependent Claim
18 words
A cryopump as claimed in claim 6 comprising a light guide for transmitting the radiation toward the cryopanel.
Claim 10
Dependent Claim
14 words
A cryopump as claimed in claim 7 the light guide closes the vacuum chamber.
Claim 11
Dependent Claim
16 words
A cryopump as claimed in claim 7 wherein the light guide is a fibre optic bundle.
Claim 12
Dependent Claim
14 words
A cryopump as claimed in claim 6 wherein the transparent member is a window.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-03-26 | 1993-09-25 | 1994-03-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-03-26 | 1997-09-25 | 1998-03-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-03-26 | 2001-09-25 | 2002-03-27 | $7700.00 | Window Closed / Lapsed |