US4910044A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Ultraviolet light emitting device and application thereof
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1988-09-01
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Granted: 1990-03-20
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Expires: 2008-09-01
Abstract
Abstract Ultraviolet light is emitted mainly with 185 nm in wave length so that a thick silicon layer is fabricated by decomposition of silane gas at a high deposition speed. As a light source, a bulb is filled with an amount of mercury gas without dosing argon gas which enhances preferentially light with 254 nm in wave length.
Inventors
- 👤 Shunpei Yamazaki
- 👤 Kazuo Urata
- 👤 Mamoru Tashiro
- 👤 Yuji Tanamura
- 👤 Shinji Imato
- 👤 Takashi Inujima
- 👤 Shigenori Hayashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 21:13
CPC Classifications
B; B01; B01J; B01J19/00; B01J19/08; B01J19/12; B01J19/122; B01J19/123; C; C23; C23C; C23C16/00; C23C16/44; C23C16/48; C23C16/482
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
87 words
A photo enhanced CVD method comprising: disposing a substrate in a reaction chamber; inputting a reactive gas into said reaction chamber; and initiating an optical reaction by irradiating said reactive gas with a UV light from a mercury lamp whereupon the product of said reaction is deposited on said substrate, wherein said mercury lamp is supplied with an AC power of a frequency higher than 100 Hz, and the distance between a window surface of said mercury lamp and said substrate is between 0.5 and 2 cm.
Claim 2
Dependent Claim
87 words
A photo enhanced CVD method comprising: disposing a substrate in a reaction chamber; inputting a reactive gas into said reaction chamber; and initiating an optical reaction by irradiating said reactive gas with a UV light from a mercury lamp whereupon the product of said reaction is deposited on said substrate, wherein said mercury lamp is supplied with an AC power of a frequency higher than 100 Hz, and the distance between a window surface of said mercury lamp and said substrate is between 0.5 and 2 cm.
Claim 3
Dependent Claim
13 words
The method of claim 1 where said reactive gas is a silane gas.
Claim 4
Dependent Claim
10 words
A method of claim 1, wherein said silane is monosilane.
Claim 5
Dependent Claim
10 words
A method of claim 1 wherein said silane is disilane.
Claim 6
Dependent Claim
34 words
A method of claim 2 further comprising a step of introducing an amount of another reactant gas which forms a reactant mixture with said silane gas for forming a silicide layer on said substrate.
Claim 7
Dependent Claim
93 words
A photo-enhanced chemical vapor reaction method comprising: disposing an object to be treated in a reaction chamber; inputting a reactive gas into said reaction chamber; and initiating an optical reaction by irradiating said reactive gas with a UV light from a mercury lamp, wherein the pressure of the mercury gas is selected within a range between 0.065 Torr and 0.215 Torr, the frequency supplied to said mercury lamp is higher than 100 Hz, and the distance between a window surface of said mercury lamp and said object is between 0.5 and 2 cm.
Claim 8
Dependent Claim
93 words
A photo-enhanced chemical vapor reaction method comprising: disposing an object to be treated in a reaction chamber; inputting a reactive gas into said reaction chamber; and initiating an optical reaction by irradiating said reactive gas with a UV light from a mercury lamp, wherein the pressure of the mercury gas is selected within a range between 0.065 Torr and 0.215 Torr, the frequency supplied to said mercury lamp is higher than 100 Hz, and the distance between a window surface of said mercury lamp and said object is between 0.5 and 2 cm.
Claim 9
Dependent Claim
62 words
A photo-enhanced chemical vapor reaction method comprising; disposing an object to be treated in a reaction chamber; inputting a reactive gas into said reaction chamber; and initiating an optical reaction by irradiating said reactive gas with a UV light from a light source, wherein the distance between said light source and said object is chosen to be from 0.5 to 2 cm.
Claim 10
Dependent Claim
62 words
A photo-enhanced chemical vapor reaction method comprising; disposing an object to be treated in a reaction chamber; inputting a reactive gas into said reaction chamber; and initiating an optical reaction by irradiating said reactive gas with a UV light from a light source, wherein the distance between said light source and said object is chosen to be from 0.5 to 2 cm.
References Cited (Backward Citations)
US1917848A
Cited
FR2268753A1
Cited
US4558660A
Cited
US4435445A
Cited
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Cited
US4735821A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-03-19 | 1993-09-18 | 1994-03-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-03-19 | 1997-09-18 | 1998-03-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-03-19 | 2001-09-18 | 2002-03-20 | $7700.00 | Window Closed / Lapsed |