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US4909863A Expired / Lapsed US ⏱️ 0.0 years remaining

Process for levelling film surfaces and products thereof

Assignee: DELAWARE NEWARK DE 19716, University of
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Filing: 1988-07-13
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Granted: 1990-03-20
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Expires: 2008-07-13
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Abstract

Abstract Semiconductor films and photovoltaic devices prepared therefrom are provided wherein the semiconductor films have a specular surface with a texture less than about 0.25 micron greater than the average planar film surface and wherein the semiconductor films are surface modified by exposing the surface to an aqueous solution of bromine containing an acid or salt and continuing such exposure for a time sufficient to etch the surface.

Inventors

  • 👤 Robert W. Birkmire
  • 👤 Brian E. McCandless

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-06 17:35
CPC Classifications
H; H10; H10F; H10F10/00; H10F10/10; H10F10/16; H10F10/167; H10F19/00; H10F19/40; H10F77/00; H10F77/10; H10F77/12; H10F77/126; H10F77/20; H10F77/244; H10P; H10P50/00; H10P50/20; H10P52/00; H10P95/00; H10P95/70; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02E10/541; Y10; Y10S; Y10S148/00; Y10S148/051; Y10S438/00; Y10S438/964

Claims Analysis

Total Claims: 42
Claim 1
Independent Claim 53 words
A process for providing a specular surface on a semiconductor film composed of group I-III-VI or II-VI elements which comprises exposing the film surface to an aqueous solution containing bromine and an acid or salt or mixtures thereof, and continuing such exposure for a time sufficient to polish the surface of the film.
Claim 2
Dependent Claim 53 words
A process for providing a specular surface on a semiconductor film composed of group I-III-VI or II-VI elements which comprises exposing the film surface to an aqueous solution containing bromine and an acid or salt or mixtures thereof, and continuing such exposure for a time sufficient to polish the surface of the film.
Claim 3
Dependent Claim 17 words
The process of claim 1 wherein the pH of the aqueous solution is about 9.5 or lower.
Claim 4
Dependent Claim 17 words
The process of claim 2 wherein the pH of the aqueous solution is about 2.5 to 7.
Claim 5
Dependent Claim 22 words
The process of claim 3 wherein the salt is an alkali metal, alkaline earth metal, or heavy metal salt or mixture thereof.
Claim 6
Dependent Claim 21 words
The process of claim 4 wherein the aqueous solution contains bromine at a concentration of from about 0.02 mol/l to saturation.
Claim 7
Dependent Claim 21 words
The process of claim 4 wherein the concentration of bromine in the aqueous solution is from about 0.02 to 0.25 mol/l.
Claim 8
Dependent Claim 21 words
The process of claim 3 wherein the concentration of the acid in the aqueous solution is at least about 0.01 mol/l.
Claim 9
Dependent Claim 19 words
The process of claim 3 wherein the concentration of the acid is from about 0.05 mol/l to 0.15 mol/l.
Claim 10
Dependent Claim 14 words
The process of claim 8 wherein the acid is hydrogen bromide or hydrogen chloride.
Claim 11
Dependent Claim 21 words
The process of claim 3 wherein the concentration of the salt in the aqueous solution is at least about 0.01 mol/l.
Claim 12
Dependent Claim 22 words
The process of claim 10 wherein the concentration of the salt in the aqueous solution is from about 0.05 mol/l to saturation.
Claim 13
Dependent Claim 23 words
The process of claim 11 wherein the concentration of the salt in the aqueous solution is from about 0.05 mol/l to 0.15 mol/l.
Claim 14
Dependent Claim 19 words
The process of claim 12 wherein the salt is an alkali metal, alkaline earth metal, or heavy metal salt.
Claim 15
Dependent Claim 17 words
The process of claim 13 wherein the salt is an alkali metal or alkaline earth metal salt.
Claim 16
Dependent Claim 15 words
The process of claim 14 wherein the anion of the salt is chlorine or bromine.
Claim 17
Dependent Claim 14 words
The process of claim 15 wherein the salt is sodium chloride or potassium bromide.
Claim 18
Dependent Claim 30 words
The process of claim 3 wherein the specular surface on the semiconductor film has a texture of less than 0.25 micron greater than the average planar surface of the film.
Claim 19
Dependent Claim 13 words
The process of claim 1 wherein the semiconductor is a polycrystalline thin film.
Claim 20
Dependent Claim 19 words
The process of claim 1 wherein the semiconductor film contains Cu, In, Se, Cd, S, Zn, and mixtures thereof.
Claim 21
Dependent Claim 13 words
The process of claim 18 wherein the film is CuInSe 2 or CdTe.
Claim 22
Dependent Claim 61 words
A process for providing a specular surface having a texture of less than about 0.25 micron greater than the average planar surface of a 3 micron thick CuInSe 2 film which comprises immersing the film in an aqueous solution of 0.02 mol/l of bromine and 0.13 mol/l KBr and mildly agitating the solution until 1.5 microns of the thickness is removed.
Claim 23
Dependent Claim 61 words
A process for providing a specular surface having a texture of less than about 0.25 micron greater than the average planar surface of a 3 micron thick CuInSe 2 film which comprises immersing the film in an aqueous solution of 0.02 mol/l of bromine and 0.13 mol/l KBr and mildly agitating the solution until 1.5 microns of the thickness is removed.
Claim 24
Dependent Claim 69 words
A polycrystalline thin film semiconductor having a specular surface and a texture of less than about 0.25 micron greater than the average planar surface of the film prepared by exposing a polycrystalline film surface to an aqueous solution of bromine and an acid or salt or mixture thereof and continuing such exposure until from about 0.1 to 1.5 micron of the average planar surface of the film is removed.
Claim 25
Dependent Claim 69 words
A polycrystalline thin film semiconductor having a specular surface and a texture of less than about 0.25 micron greater than the average planar surface of the film prepared by exposing a polycrystalline film surface to an aqueous solution of bromine and an acid or salt or mixture thereof and continuing such exposure until from about 0.1 to 1.5 micron of the average planar surface of the film is removed.
Claim 26
Dependent Claim 13 words
The film of claim 22 composed of group I-III-VI, III-V, and II-VI elements.
Claim 27
Dependent Claim 15 words
The film of claim 23 containing Cu, In, Se, Cd, S, Zn, and mixtures thereof.
Claim 28
Dependent Claim 10 words
The film of claim 24 comprising CuInSe 2 or CdTe.
Claim 29
Dependent Claim 17 words
The film of claim 22 wherein the pH of the aqueous solution is about 9.5 or less.
Claim 30
Dependent Claim 17 words
The film of claim 26 wherein the pH of the aqueous solution is about 2.5 to 7.
Claim 31
Dependent Claim 22 words
The film of claim 27 wherein the salt is an alkali metal, alkaline earth metal, or heavy metal salt or mixture thereof.
Claim 32
Dependent Claim 21 words
The film of claim 28 wherein the aqueous solution contains bromine at a concentration of from about 0.02 mol/l to saturation.
Claim 33
Dependent Claim 21 words
The film of claim 29 wherein the concentration of bromine in the aqueous solution is from about 0.02 to 0.25 mol/l.
Claim 34
Dependent Claim 21 words
The film of claim 27 wherein the concentration of the acid in the aqueous solution is at least about 0.01 mol/l.
Claim 35
Dependent Claim 19 words
The film of claim 31 wherein the concentration of the acid is from about 0.05 mol/l to 0.15 mol/l.
Claim 36
Dependent Claim 14 words
The film of claim 32 wherein the acid is hydrogen bromide or hydrogen chloride.
Claim 37
Dependent Claim 21 words
The film of claim 28 wherein the concentration of the salt in the aqueous solution is at least about 0.01 mol/l.
Claim 38
Dependent Claim 22 words
The film of claim 34 wherein the concentration of the salt in the aqueous solution is from about 0.05 mol/l to saturation.
Claim 39
Dependent Claim 23 words
The film of claim 35 wherein the concentration of the salt in the aqueous solution is from about 0.05 mol/l to 0.15 mol/l.
Claim 40
Dependent Claim 17 words
The film of claim 28 wherein the salt is an alkali metal or alkaline earth metal salt.
Claim 41
Dependent Claim 15 words
The film of claim 37 wherein the anion of the salt is chlorine or bromine.
Claim 42
Dependent Claim 14 words
The film of claim 38 wherein the salt is sodium chloride or potassium bromide.

References Cited (Backward Citations)

DD237732A1 Cited
DD238286A1 Cited
US4536607A Cited
JPS61132621A Cited
JPS61176122A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1993-03-19 1993-09-18 1994-03-20 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1997-03-19 1997-09-18 1998-03-20 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2001-03-19 2001-09-18 2002-03-20 $7700.00 Window Closed / Lapsed

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