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US4907052A Expired / Lapsed US ⏱️ 0.0 years remaining

Semiconductor tandem solar cells with metal silicide barrier

Assignee: Kanegafuchi Chemical Industry Co Ltd
•
Filing: 1989-01-23
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Granted: 1990-03-06
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Expires: 2009-01-23
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Abstract

Abstract A heat-resistant multijunction semiconductor device comprising a p-layer, a n-layer and a diffusion-blocking layer, the diffusion-blocking layer being provided between the p-layer and the n-layer. The semiconductor device can reduce the deterioration in quality which is caused by the diffusion of dopant atoms in the p-layer and n-layer, respectively, into the other layer.

Inventors

  • 👤 Jun Takada
  • 👤 Minori Yamaguchi
  • 👤 Yoshihisa Tawada

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-27 08:47
CPC Classifications
H; H10; H10F; H10F10/00; H10F10/10; H10F10/17; H10F10/172; H10D; H10D8/00; H10D8/50; H10F71/00; H10F71/10; H10F71/103; H10F77/00; H10F77/10; H10F77/16; H10F77/162; H10F77/166; H10W; H10W90/00; H10W90/701; H10W90/731; H10W90/732; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02E10/548; Y02P; Y02P70/00; Y02P70/50

Claims Analysis

Total Claims: 17
Claim 1
Independent Claim 112 words
A multijunction semiconductor device comprising at least one p-type semiconductor layer, at least one n-type semiconductor layer and at least one dopant diffusion-blocking layer, wherein each semiconductor layer is made of a material selected from the group consisting of amorphous semiconductor material and amorphous semiconductor material containing microcrystals, said dopant diffusion-blocking layer being provided between a p-type semiconductor layer and an n-type semiconductor layer which would be in contact with each other if the dopant diffusion-blocking layer were not provided, and said dopant diffusion-blocking layer comprising at least one layer of metal silicide which is adjacent to one of the group consisting of said p-type semiconductor layer and said n-type semiconductor layer.
Claim 2
Dependent Claim 112 words
A multijunction semiconductor device comprising at least one p-type semiconductor layer, at least one n-type semiconductor layer and at least one dopant diffusion-blocking layer, wherein each semiconductor layer is made of a material selected from the group consisting of amorphous semiconductor material and amorphous semiconductor material containing microcrystals, said dopant diffusion-blocking layer being provided between a p-type semiconductor layer and an n-type semiconductor layer which would be in contact with each other if the dopant diffusion-blocking layer were not provided, and said dopant diffusion-blocking layer comprising at least one layer of metal silicide which is adjacent to one of the group consisting of said p-type semiconductor layer and said n-type semiconductor layer.
Claim 3
Dependent Claim 20 words
The multijunction semiconductor device of claim 1, wherein at least one semiconductor layer consists of a hydrogenated amorphous semiconductor material.
Claim 4
Dependent Claim 37 words
The multijunction semiconductor device of claim 1, wherein the metal silicide is selected from the group consisting of chromium silicide, nickel silicide, niobium silicide, molybdenum silicide, palladium silicide, tantalum silicide, tungsten silicide, iridium silicide and platinum silicide.
Claim 5
Dependent Claim 68 words
The multijunction semiconductor device of claim 1, wherein said dopant diffusion-blocking layer comprises a layer of metal provided on each of its opposite sides with a layer of metal silicide, wherein the metal in the layer of metal silicide is selected from the group consisting of the same metal as the metal in said layer of metal and metals different from the metal in said layer of metal.
Claim 6
Dependent Claim 114 words
The multijunction semiconductor device of claim 1, wherein said dopant diffusion-blocking layer comprises: (1) a layer of metal silicide; (2) a layer of a first metal provided on one surface of the layer of metal silicide, wherein said first metal is selected from the group consisting of the same metal as the metal in the layer of metal silicide and metals different from the metal in the layer of the metal silicide; and (3) a layer of a material selected from the group consisting of a second metal and a transparent conducting oxide, provided on the surface of the layer of the first metal which is not adjacent to the layer of metal silicide.
Claim 7
Dependent Claim 30 words
The multijunction semiconductor device of claim 5, wherein the transparent conducting oxide is selected from the group consisting of indium tin oxide, tin oxide, indium oxide and cadmium tin oxide.
Claim 8
Dependent Claim 30 words
The multijunction semiconductor device of claim 5, wherein the transparent conducting oxide is selected from the group consisting of tin oxide and a compound of tin oxide and indium oxide.
Claim 9
Dependent Claim 19 words
The multijunction semiconductor device of claim 1, wherein said dopant diffusion-blocking layer comprises only a layer of metal silicide.
Claim 10
Dependent Claim 76 words
The multijunction semiconductor device of claim 1, wherein said dopant diffusion-blocking layer comprises: (1) a layer of metal silicide; and (2) a layer of metal provided on one of the two surfaces of the layer of metal silicide, wherein the metal in the layer of metal silicide is selected from the group consisting of the same metal as the metal in the layer of metal and metals different from the metal in the layer of metal.
Claim 11
Dependent Claim 122 words
A multijunction semiconductor device comprising at least one p-type semiconductor layer, at least one n-type semiconductor layer, at least one dopant diffusion-blocking layer, and an electrode provided on one of said p-type semiconductor layer and said n-type semiconductor layer, wherein each semiconductor layer is made of a material selected from the group consisting of amorphous semiconductor material and amorphous semiconductor material containing microcrystals, said dopant diffusion-blocking layer being provided between a p-type semiconductor layer and an n-type semiconductor layer which would be in contact with each other if the dopant diffusion-blocking layer were not provided, and said diffusion-blocking layer comprising at least one layer of metal silicide which is adjacent to one of said p-type semiconductor layer and said n-type semiconductor layer.
Claim 12
Dependent Claim 122 words
A multijunction semiconductor device comprising at least one p-type semiconductor layer, at least one n-type semiconductor layer, at least one dopant diffusion-blocking layer, and an electrode provided on one of said p-type semiconductor layer and said n-type semiconductor layer, wherein each semiconductor layer is made of a material selected from the group consisting of amorphous semiconductor material and amorphous semiconductor material containing microcrystals, said dopant diffusion-blocking layer being provided between a p-type semiconductor layer and an n-type semiconductor layer which would be in contact with each other if the dopant diffusion-blocking layer were not provided, and said diffusion-blocking layer comprising at least one layer of metal silicide which is adjacent to one of said p-type semiconductor layer and said n-type semiconductor layer.
Claim 13
Dependent Claim 38 words
The multijunction semiconductor device of claim 10, wherein a dopant diffusion-blocking layer is also provided between the electrode and a semiconductor layer which would be in contact with the electrode if the dopant diffusion-blocking layer were not provided.
Claim 14
Dependent Claim 61 words
The multijunction semiconductor device of claim 10, wherein said dopant diffusion-blocking layer comprises a layer of metal provided on each of its opposite sides with a layer of metal silicide, wherein the metal in the layer of metal silicide is selected from the group consisting of the same metal and a metal different from the metal in said layer of metal.
Claim 15
Dependent Claim 112 words
The multijunction semiconductor device of claim 10, wherein said dopant diffusion-blocking layer comprises: (1) a layer of metal silicide; (2) a layer of a first metal provided on one surface of the layer of metal silicide, wherein said first metal is selected from the group consisting of the same metal as the metal in the layer of metal silicide and metals different from the metal in the layer of the metal silicide; and (3) a layer selected from the group consisting of a second metal and of a transparent conducting oxide, provided on the surface of the layer of the first metal which is not adjacent to the layer of metal silicide.
Claim 16
Dependent Claim 19 words
The multijunction semiconductor device of claim 10, wherein said dopant diffusion-blocking layer comprises only a layer of metal silicide.
Claim 17
Dependent Claim 76 words
The multijunction semiconductor device of claim 10, wherein said dopant diffusion-blocking layer comprises: (1) a layer of metal silicide; and (2) a layer of metal provided on one of the two surfaces of the layer of metal silicide, wherein the metal in the layer of metal silicide is selected from the group consisting of the same metal as the metal in the layer of metal and metals different from the metal in the layer of metal.

References Cited (Backward Citations)

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1993-03-05 1993-09-04 1994-03-06 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1997-03-05 1997-09-04 1998-03-06 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2001-03-05 2001-09-04 2002-03-06 $7700.00 Window Closed / Lapsed

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