US4904543A — Compositionally modulated, nitrided alloy films a…

Claim 1

Independent Claim 94 words

A compositionally modulated, nitrided magnetic alloy film consisting essentially of an alloy having an average composition of the following general formula TaXbNc in which T represents at least one member selected from the group consisting of Fe, Fe and Co, and Fe and Ni, X represents at least one member selected from the group consisting of Si, Ge, Si and Ga, and Ge and Al, N is nitrogen, 71≦a≦97, 2≦b≦28 and 1≦c≦20, each on the atomic percent basis, provided that a+b+c=100, at least the nitrogen being compositionally modulated along the thickness of the film.

Claim 2

Dependent Claim 94 words

A compositionally modulated, nitrided magnetic alloy film consisting essentially of an alloy having an average composition of the following general formula TaXbNc in which T represents at least one member selected from the group consisting of Fe, Fe and Co, and Fe and Ni, X represents at least one member selected from the group consisting of Si, Ge, Si and Ga, and Ge and Al, N is nitrogen, 71≦a≦97, 2≦b≦28 and 1≦c≦20, each on the atomic percent basis, provided that a+b+c=100, at least the nitrogen being compositionally modulated along the thickness of the film.

Claim 3

Dependent Claim 23 words

A compositionally modulated, nitrided magnetic alloy film according to claim 1, wherein said film has a thickness of from 0.1 to 100 micrometers.

Claim 4

Dependent Claim 43 words

A compositonally modulated, nitrided magnetic alloy film according to claim 1, wherein said film has a multilayered structure which comprises a plurality of the layers of the nitrided alloy and a plurality of the layers of the nitride-free alloys which are alternately superposed.

Claim 5

Dependent Claim 23 words

A compositionally modulated, nitrided magnetic alloy film according to claim 3, wherein each layer has a thickness of from 50 to 1000 angstroms.

Claim 6

Dependent Claim 34 words

A compositionally modulated, nitrided magnetic alloy film according to claim 1, wherein said film contains the nitrogen throughout the film and the content of the nitrogen is modulated along the thickness of the film.

Claim 7

Dependent Claim 24 words

A compositionally modulated, nitrided magnetic alloy film according to claim 5, wherein said film has a modulation wave length of less than 2000 angstroms.

Claim 8

Dependent Claim 19 words

A compositionally modulated, nitrided magnetic alloy film according to claim 1, wherein T is Fe and X is Si.

Claim 9

Dependent Claim 24 words

A compositionally modulated, nitrided magnetic alloy film according to claim 1, wherein T is a mixture of Fe and Co and X is Si.

Claim 10

Dependent Claim 24 words

A compositionally modulated, nitrided magnetic alloy film according to claim 1, wherein T is Fe and X is a mixture of Si and Ga.

Claim 11

Dependent Claim 24 words

A compositionally modulated, nitrided magnetic alloy film according to claim 1, wherein T is Fe and X is a mixture of Ge and Al.

Claim 12

Dependent Claim 78 words

A compositionally modulated, nitrided magnetic alloy film consisting essentially of an alloy having an average composition of the following formula Fe.sub.x Si.sub.y N.sub.z T'.sub.w in which T' represents at least one member selected from the group consisting of Nb, Ta, Ti, Zr, Hf, Cr, Mo and W, and 70≦x≦97, 1≦y≦20, 1≦z≦15 and 1≦w≦10, each on the atomic percent basis, provided that x+y+z+w=100, at least the content of the nitrogen along the thickness of the film being compositionally modulated.

Claim 13

Dependent Claim 78 words

A compositionally modulated, nitrided magnetic alloy film consisting essentially of an alloy having an average composition of the following formula Fe.sub.x Si.sub.y N.sub.z T'.sub.w in which T' represents at least one member selected from the group consisting of Nb, Ta, Ti, Zr, Hf, Cr, Mo and W, and 70≦x≦97, 1≦y≦20, 1≦z≦15 and 1≦w≦10, each on the atomic percent basis, provided that x+y+z+w=100, at least the content of the nitrogen along the thickness of the film being compositionally modulated.

Claim 14

Dependent Claim 43 words

A compositionally modulated, nitrided magnetic alloy film according to claim 11, wherein said alloy film has a multilayered structure comprises a plurality of the layers of the nitrided alloy and a plurality of the layers of the nitride-free alloys which are alternately superposed.

Claim 15

Dependent Claim 34 words

A compositionally modulated, nitrided magnetic alloy film according to claim 11, wherein said film contains the nitrogen throughout the film and the content of the nitrogen is modulated along the thickness of the film.

Claim 16

Dependent Claim 23 words

A compositionally modulated, nitrided magnetic alloy film according to claim 13, wherein said film has a modulation wavelength of less than 2000 angstroms.

Claim 17

Dependent Claim 54 words

A compositionally modulated, nitrided magnetic alloy film consisting essentially of an alloy having an average composition of the following formula (Fe.sub.a Si.sub.b' Ru.sub.c')(100-.sub.d)/100N.sub.d' in which 70≦a'≦96, 3≦b'≦20, 1≦c'≦6 and 1≦d'≦15, each on the atomic percent basis, provided that a'+b'+c'+d'=100, and the content of the nitrogen along the thickness of the film being compositionally modulated.

Claim 18

Dependent Claim 54 words

A compositionally modulated, nitrided magnetic alloy film consisting essentially of an alloy having an average composition of the following formula (Fe.sub.a Si.sub.b' Ru.sub.c')(100-.sub.d)/100N.sub.d' in which 70≦a'≦96, 3≦b'≦20, 1≦c'≦6 and 1≦d'≦15, each on the atomic percent basis, provided that a'+b'+c'+d'=100, and the content of the nitrogen along the thickness of the film being compositionally modulated.

Claim 19

Dependent Claim 43 words

A compositionally modulated, nitrided magnetic alloy film according to claim 15, wherein said film has a multilayered structure which comprises a plurality of the layers of the nitrided alloy and a plurality of the layers of the nitrided-free alloys which are alternately superposed.

Claim 20

Dependent Claim 34 words

A compositionally modulated, nitrided magnetic alloy film according to claim 15, wherein said film contains the nitrogen throughout the film and the content of the nitrogen is modulated along the thickness of the film.

Claim 21

Dependent Claim 23 words

A compositionally modulated, nitrided magnetic alloy film according to claim 17, wherein said film has a modulation wavelength of less than 2000 angstroms.

Claim 22

Independent Claim 173 words

A method for making a compositionally modulated, nitrided magnetic alloy film having an average composition of T a X b N c wherein T represents at least one member selected from the group consisting of Fe, Fe and Co, and Fe and Ni, X represents at least one member selected from the group consisting of Si, Ge, Si and Ga, and Ge and Al, and N is nitrogen 71≦a≦97, 2≦b≦28 and 1≦c≦20, each based on the atomic percent basis, provided that a+b+c=100, at least the nitrogen being compositionally modulated along the thickness of the film, the method comprising providing a target of a nitride-free Fe based alloy, and subjecting said target to sputtering first in an Ar gas atmosphere for a time sufficient to form a nitride-free Fe based alloy layer on a substrate and then in the Ar gas atmosphere to which nitrogen gas is added to a level of from 0.1 to 50% by partial pressure, so that a nitride alloy layer is formed on the nitride-free Fe based alloy layer.

Claim 23

Independent Claim 173 words

A method for making a compositionally modulated, nitrided magnetic alloy film having an average composition of T a X b N c wherein T represents at least one member selected from the group consisting of Fe, Fe and Co, and Fe and Ni, X represents at least one member selected from the group consisting of Si, Ge, Si and Ga, and Ge and Al, and N is nitrogen 71≦a≦97, 2≦b≦28 and 1≦c≦20, each based on the atomic percent basis, provided that a+b+c=100, at least the nitrogen being compositionally modulated along the thickness of the film, the method comprising providing a target of a nitride-free Fe based alloy, and subjecting said target to sputtering first in an Ar gas atmosphere for a time sufficient to form a nitride-free Fe based alloy layer on a substrate and then in the Ar gas atmosphere to which nitrogen gas is added to a level of from 0.1 to 50% by partial pressure, so that a nitride alloy layer is formed on the nitride-free Fe based alloy layer.

Claim 24

Dependent Claim 58 words

A method according to claim 19, wherein the sputtering in the Ar gas atmosphere and in the nitrogen-added Ar gas atmosphere is repeated a desired number of times, whereby the resultant film has a multilayered structure consisting essentially of a plurality of the nitride-free Fe alloy layers and a plurality of the nitrided Fe alloy layers superposed alternately.

Claim 25

Dependent Claim 34 words

A method according to claim 19 or 20, wherein when the thickness of the nitride-free Fe alloy layer is taken as t' and the thickness of the nitrided layer is taken as t, t≧t'/2.

Claim 26

Dependent Claim 36 words

A method according to claim 19 or 20, further comprising annealing the resultant film under conditions sufficient to cause at least the nitrogen in the film to be compositionally modulated along the thickness of the film.

Claim 27

Dependent Claim 29 words

A method according to claim 22, wherein the annealing is effected at a temperature of from 300° to 700° C. for a time sufficient to cause the compositional modulation.

Claim 28

Independent Claim 153 words

A method for making a compositionally modulated, nitride magnetic alloy film having an average composition of Fe x Si y N z T' w wherein T' represents at least one member selected from the group consisting of Nb, Ta, Ti, Zr, Hf, Cr, Mo and W, and 70≦x≦97, 1≦y≦20, 1≦z≦15 and 1≦w≦10, each based on the atomic percent basis, provided that x+y+z+w=100, at least the nitrogen being compositionally modulated along the thickness of the film, the method comprising providing a target of a nitride-free Fe based alloy, and subjecting said target to sputtering first in an Ar gas atmoshpere for a time sufficient to form a nitride-free Fe based alloy layer on a substrate and then in the Ar gas atmosphere to which nitrogen gas is added to a level of from 0.1 to 50% by partial pressure, so that a nitride alloy layer is formed on the nitride-free Fe based alloy layer.

Claim 29

Independent Claim 153 words

A method for making a compositionally modulated, nitride magnetic alloy film having an average composition of Fe x Si y N z T' w wherein T' represents at least one member selected from the group consisting of Nb, Ta, Ti, Zr, Hf, Cr, Mo and W, and 70≦x≦97, 1≦y≦20, 1≦z≦15 and 1≦w≦10, each based on the atomic percent basis, provided that x+y+z+w=100, at least the nitrogen being compositionally modulated along the thickness of the film, the method comprising providing a target of a nitride-free Fe based alloy, and subjecting said target to sputtering first in an Ar gas atmoshpere for a time sufficient to form a nitride-free Fe based alloy layer on a substrate and then in the Ar gas atmosphere to which nitrogen gas is added to a level of from 0.1 to 50% by partial pressure, so that a nitride alloy layer is formed on the nitride-free Fe based alloy layer.

Claim 30

Dependent Claim 58 words

A method according to claim 24, wherein the sputtering in the Ar gas atmosphere and in the nitrogen-added Ar gas atmosphere is repeated a desired number of times, whereby the resultant film has a multilayered structure consisting essentially of a plurality of the nitride-free Fe alloy layers and a plurality of the nitrided Fe alloy layers superposed alternately.

Claim 31

Dependent Claim 34 words

A method according to claim 24 or 25, wherein when the thickness of the nitride-free Fe alloy layer is taken as t' and the thickness of the nitrided layer is taken as t, t≧t'/2.

Claim 32

Dependent Claim 36 words

A method according to claim 24 or 25, further comprising annealing the resultant film under conditions sufficient to cause at least the nitrogen in the film to be compositionally modulated along the thickness of the film.

Claim 33

Dependent Claim 28 words

A method according to claim 27, wherein the annealing is effected at a temperature from 300° to 700° C. for a time sufficient to cause the compositional modulation.

Claim 34

Independent Claim 125 words

A method for making a compositionally modulated, nitride magnetic alloy film having an average composition Fe.sub.a' Si.sub.b' Ru.sub.c')(100-.sub.d')/'100N.sub.d' wherein 70≦a≦96, 3≦b'≦20, 1≦c'≦6 and 1≦d'≦15, each based on the atomic percent basis, provided that a'+b'+c'+d'=100, at least the nitrogen being compositionally modulated along the thickness of the film, the method comprising providing a target of a nitride-free Fe based alloy, and subjecting said target to sputtering first in an Ar gas atmosphere for a time sufficient to form a nitride-free Fe based alloy layer on a substrate and then in the Ar gas atmosphere to which nitrogen gas is added to a level of from 0.1 to 50% by partial pressure, so that a nitride alloy layer is formed on the nitride-free Fe based alloy layer.

Claim 35

Independent Claim 125 words

A method for making a compositionally modulated, nitride magnetic alloy film having an average composition Fe.sub.a' Si.sub.b' Ru.sub.c')(100-.sub.d')/'100N.sub.d' wherein 70≦a≦96, 3≦b'≦20, 1≦c'≦6 and 1≦d'≦15, each based on the atomic percent basis, provided that a'+b'+c'+d'=100, at least the nitrogen being compositionally modulated along the thickness of the film, the method comprising providing a target of a nitride-free Fe based alloy, and subjecting said target to sputtering first in an Ar gas atmosphere for a time sufficient to form a nitride-free Fe based alloy layer on a substrate and then in the Ar gas atmosphere to which nitrogen gas is added to a level of from 0.1 to 50% by partial pressure, so that a nitride alloy layer is formed on the nitride-free Fe based alloy layer.

Claim 36

Dependent Claim 58 words

A method according to claim 29, wherein the sputtering in the Ar gas atmosphere and in the nitrogen-added Ar gas atmosphere is repeated a desired number of times, whereby the resultant film has a multilayered structure consisting essentially of a plurality of the nitride-free Fe alloy layers and a plurality of the nitrided Fe alloy layers superposed alternately.

Claim 37

Dependent Claim 34 words

A method according to claim 29 or 30, wherein when the thickness of the nitride-free Fe alloy layer is taken as t' and the thickness of the nitrided layer is taken as t, t≧t'/2.

Claim 38

Dependent Claim 36 words

A method according to claim 29 or 30, further comprising annealing the resultant film under conditions sufficient to cause at least the nitrogen in the film to be compositionally modulated along the thickness of the film.

Claim 39

Dependent Claim 29 words

A method according to claim 32, wherein the annealing is effected at a temperature of from 300° to 700° C. for a time sufficient to cause the compositional modulation.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1993-02-26	1993-08-28	1994-02-27	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	1997-02-26	1997-08-28	1998-02-27	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2001-02-26	2001-08-28	2002-02-27	$7700.00	Window Closed / Lapsed

Compositionally modulated, nitrided alloy films and method for making the same

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