US4899060A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Diaphragm system for generating a plurality of particle probes haivng variable cross section
Assignee: Siemens AG
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Filing: 1989-06-13
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Granted: 1990-02-06
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Expires: 2009-06-13
Abstract
Abstract A diaphragm system includes two diaphragms provided with the same multi-aperture arranged following one another in a beam path of lithography equipment so that recesses in the first diaphragm coincide with corresponding recesses in the second diaphragm. A primary particle beam is directed onto the first diaphragm which is equipped with deflection elements for individual displacement of the particle probes in a plane of the second diaphragm. In a second embodiment, the diaphragm system provides simultaneous variation of the cross section of all particle probes by providing that one of the two diaphragms be displaceable in a plane perpendicular to the beam direction.
Inventors
- 👤 Burkhard Lischke
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 23:14
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/317; H01J37/3174; H01J37/3177; B; B82; B82Y; B82Y10/00; B82Y40/00; H01J37/02; H01J37/04; H01J37/09
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
119 words
A diaphragm system for generating a plurality of particle probes having variable cross sections from a particle beam, comprising: a first diaphragm for receiving a particle beam and having a first multi-aperture structure; a second diaphragm disposed following said first diaphragm in a direction of the particle beam, said second diaphragm having a second multi-aperture structure corresponding to said first multi-aperture structure of said first diaphragm, said first and second diaphragms oriented relative to one another so that in a non-displaced condition apertures of said first multi-aperture structure coincide with corresponding apertures of said second multi-aperture structure; and means for displacing one of said first or second diaphragms in a plane perpendicular to the direction of the particle beam.
Claim 2
Dependent Claim
119 words
A diaphragm system for generating a plurality of particle probes having variable cross sections from a particle beam, comprising: a first diaphragm for receiving a particle beam and having a first multi-aperture structure; a second diaphragm disposed following said first diaphragm in a direction of the particle beam, said second diaphragm having a second multi-aperture structure corresponding to said first multi-aperture structure of said first diaphragm, said first and second diaphragms oriented relative to one another so that in a non-displaced condition apertures of said first multi-aperture structure coincide with corresponding apertures of said second multi-aperture structure; and means for displacing one of said first or second diaphragms in a plane perpendicular to the direction of the particle beam.
Claim 3
Dependent Claim
23 words
A diaphragm system as claimed in claim 1, wherein said multi-aperture structure of said first and second diaphragms have rectangular or quadratic apertures.
Claim 4
Dependent Claim
16 words
A diaphragm system as claimed in claim 2, wherein said apertures are arranged along a line.
Claim 5
Dependent Claim
29 words
A diaphragm system as claimed in claim 1, wherein said means for displacing is a means for relative shifting of said first and second diaphragms relative to one another.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-02-05 | 1993-08-07 | 1994-02-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-02-05 | 1997-08-07 | 1998-02-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-02-05 | 2001-08-07 | 2002-02-06 | $7700.00 | Window Closed / Lapsed |