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US4897628A
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Gas sensor and method of manufacturing the same
Assignee: Osaka Gas Co Ltd
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Filing: 1987-11-05
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Granted: 1990-01-30
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Expires: 2007-11-05
Abstract
Abstract A gas sensor using an n-type metal oxide semiconductor and a method for manufacturing such a gas sensor is provided. More particularly, a gas sensor for detecting an inflammable gas and a method for manufacturing the same.
Inventors
- 👤 Masamichi Ippommatsu
- 👤 Takeshi Matsumoto
- 👤 Shingo Yakushizi
- 👤 Katsuyuki Kuroki
- 👤 Takashi Matsuzaka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 01:58
CPC Classifications
G; G01; G01N; G01N27/00; G01N27/02; G01N27/04; G01N27/12
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
62 words
A gas sensor comprising a thin film of an n-type metal oxide conductor which changes resistivity according to the gas species detected, and an insulting film on a surface of said thin film, wherein the oxide film insulator contains one or more oxides selected from the group consisting of SiO 2 , MnO 2 , MNO and V 2 O 5 .
Claim 2
Dependent Claim
62 words
A gas sensor comprising a thin film of an n-type metal oxide conductor which changes resistivity according to the gas species detected, and an insulting film on a surface of said thin film, wherein the oxide film insulator contains one or more oxides selected from the group consisting of SiO 2 , MnO 2 , MNO and V 2 O 5 .
Claim 3
Dependent Claim
17 words
A gas sensor as in claim 1, wherein the metal oxide semiconductor film comprises SnO 2 .
Claim 4
Dependent Claim
19 words
A gas sensor as in claim 1, wherein the n-type metal oxide semiconductor film has a columnar crystal structure.
Claim 5
Dependent Claim
19 words
A gas sensor as in claim 1, wherein the oxide film insulator is 0.005 to 3 μm in thickness
Claim 6
Dependent Claim
19 words
A gas sensor as in claim 4, wherein the oxide film insulator is 0.01 to 1 μm in thickness.
Claim 7
Dependent Claim
19 words
A gas sensor as in claim 4 wherein the oxide film insulator is 0.1 to 0.5 μm is thickness.
Claim 8
Dependent Claim
17 words
A gas sensor as in claim 1 wherein the oxide film insulator has the columnar crystal structure.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-01-29 | 1993-07-31 | 1994-01-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-01-29 | 1997-07-31 | 1998-01-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-01-29 | 2001-07-31 | 2002-01-30 | $7700.00 | Window Closed / Lapsed |