Optical pressure sensor

Claim 2

An optical fibre sensor comprising a Fabry-Perot device including a pair of partial reflectors spaced apart by a distance which varies in dependence upon pressure applied to at least one of the reflectors, light source means for producing light at a plurality of wavelengths and optical fibre means for transmitting said light to said reflectors and for receiving light reflected back from said reflectors, in which the wavelength components of the transmitted light and wavelength components of the reflected light are received by range gates switched in accordance with the distance travelled by said wavelength components and are compared by comparator means to provide respective ratios of transmitted intensities and received intensities and in which said ratios are in turn compared by further comparator means to provide a ratio dependent upon the change in spacing between the reflectors but independent of any changes in the intensities of the transmitted light.

Claim 3

An optical sensor as claimed in claim 1, in which light source means comprises two light sources for providing respective light signals of different wavelengths which are combined by a multiplexer and then divided into two parts by an optical directional coupler, one part being conveyed by the optical fibre to the reflectors of the Fabry-Perot device and the other part being demultiplexed by a wavelength de-multiplexer the respective outputs from which are fed to photo-diodes the electrical outputs from which are in turn fed to range gates which provide outputs compared by a first comparator which produces an output indicative of the intensity ratio between the two wavelength signals applied to the Fabry-Perot sensor, and in which the light signals of different wavelengths reflected back along the optical fibre from the reflectors of the Fabry-Perot device are directed by the directional coupler into a further wavelength de-multiplexer the respective outputs from which are fed to photo-diodes the electrical outputs from which are in turn fed to range gates which provide outputs compared by a second comparator which produces an output indicative of the intensity ratio between the intensities of the reflected signals at the two different wavelengths, and in which the outputs from the first and second comparators are fed to a third comparator which produces an output dependent upon the spacing of the reflectors of the Fabry-Perot device and the pressure applied to the sensor but which is independent of changes in the intensities of the light transmitted to the sensor device.

Claim 4

An optical pressure or displacement sensor as claimed in claim 1 or claim 2, in which buffer means is provided in a space between the partial reflectors of the Fabry-Perot device in order to safeguard the device against the occurrence of an excessive parameter being sensed, in which the buffer means has an aperture therethrough to permit access of incoming light to the partial reflectors but which limits displacement of the displacement reflector beyond a predetermined value.

Claim 5

An optical pressure of displacement sensor as claimed in claim 3, in which the Fabry-Perot device comprises a transparent block having a partial reflector on one surface thereof and an anti-reflector coating on its opposite surface, a flexible transparent substrate having a partial reflector on one surface thereof which is spaced from the transparent block by a spacer member to leave a cavity the dimensions of which will be varied in response to flexure of the substrate, in which the buffer means comprises a deposited zone of silicon on the transparent block.

Claim 6

An optical pressure or displacement sensor as claimed in claim 1 or 2, in which the light conveyed to the Fabry-Perot device through the optical fibre is collimated by means of a graded index rod which also serves to re-focus the light reflected back from the partial reflectors into the optical fibre.