US4896204A
Expired / Lapsed
US
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Semiconductor device and method of manufacturing thereof
Assignee: Mitsubishi Electric Corp
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Filing: 1988-07-25
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Granted: 1990-01-23
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Expires: 2008-07-25
Abstract
Abstract An Al layer (6) is first formed to cover an opening region (9) for interconnection in a semiconductor device. Then, an Al-Si-Ti layer (7) having a higher degree of hardness than that of the Al layer (6) is formed on the Al layer (6) and subsequently a mixture layer (8) of aluminum hydrate and aluminum oxide is formed on the surface of the Al-Si-Ti layer (7). Thus, a multilayered film of electrode and interconnection (11) is formed.
Inventors
- 👤 Yoshihiro Hirata
- 👤 Reiji Tamaki
- 👤 Takeshi Noguchi
- 👤 Junichi Arima
- 👤 Kenji Saitoh
- 👤 Shigeru Harada
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 03:03
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/425; H10W20/45; H10W20/48
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
80 words
A semiconductor device having an electrode and interconnection film covering an opening region for interconnection, wherein said electrode and interconnection film comprises a first metal layer comprising aluminum, a second metal layer comprising aluminum alloy formed on said first metal layer, the hardness of said second metal layer being of a higher value than that of said first metal layer, and a layer consisting essentially of a mixture of aluminum hydrate and aluminum oxide formed on said second metal layer.
Claim 2
Dependent Claim
80 words
A semiconductor device having an electrode and interconnection film covering an opening region for interconnection, wherein said electrode and interconnection film comprises a first metal layer comprising aluminum, a second metal layer comprising aluminum alloy formed on said first metal layer, the hardness of said second metal layer being of a higher value than that of said first metal layer, and a layer consisting essentially of a mixture of aluminum hydrate and aluminum oxide formed on said second metal layer.
Claim 3
Dependent Claim
16 words
A semiconductor device in accordance with claim 1, wherein said aluminum alloy is aluminum silicon titanium.
Claim 4
Dependent Claim
16 words
A semiconductor device in accordance with claim 1, wherein the first metal layer is aluminum silicon.
Claim 5
Dependent Claim
93 words
A semiconductor device having an electrode and interconnection film covering an opening region for interconnection, wherein said electrode and interconnection film comprises a first metal layer comprising aluminum and formed on a substrate while heating the substrate, a second metal layer comprising aluminum alloy formed on said first metal layer without heating said substrate, the hardness of the second metal layer being of a higher value than that of the first metal layer, and a layer consisting essentially of a mixture of aluminum hydrate and aluminum oxide formed on the second metal layer.
Claim 6
Dependent Claim
93 words
A semiconductor device having an electrode and interconnection film covering an opening region for interconnection, wherein said electrode and interconnection film comprises a first metal layer comprising aluminum and formed on a substrate while heating the substrate, a second metal layer comprising aluminum alloy formed on said first metal layer without heating said substrate, the hardness of the second metal layer being of a higher value than that of the first metal layer, and a layer consisting essentially of a mixture of aluminum hydrate and aluminum oxide formed on the second metal layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-01-22 | 1993-07-24 | 1994-01-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-01-22 | 1997-07-24 | 1998-01-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-01-22 | 2001-07-24 | 2002-01-23 | $7700.00 | Window Closed / Lapsed |