Electro-optic measurements of voltage waveforms on electrical conductors

Claim 3

The method of claim 1 wherein the crystal is selected from the group consisting of KDP, KD*P, GaAs, ZnTe, CdTe, and CuCl.

Claim 4

The method of claim 1 wherein the crystal has an end face which is positioned over or on the conductor and a backface which is maintained at a reference-potential.

Claim 5

The method of claim 3 wherein the beam is reflected from the end of the crystal positioned over or on the conductor and is thereafter detected.

Claim 6

The method of claim 1 wherein the beam is reflected from the conductor and is thereafter detected.

Claim 7

The method of claim 1 wherein the directing step includes generating the light beam as a train of optical pulses having a duration of about a picosecond or less.

Claim 8

The method of claim 6 wherein the pulses are generated by a laser.

Claim 9

The method of claim 7 wherein the pulses are generated by a colliding pulse mode-locked laser.

Claim 10

The method of claim 1 wherein the conductor is disposed in an integrated circuit.

Claim 11

Apparatus for measuring a voltage waveform of an electrical signal on an electrical conductor comprising: means for generating the signal on the conductor, a probe comprising a crystal exhibiting a longitudinal electro-optic effect, means for positioning the crystal over or on the conductor, means for directing a polarized light beam through the crystal along a direction essentially perpendicular to the conductor, birefringence being induced in the crystal and the polarization of the beam being modulated in response essentially to only those components of the electric field generated by the signal which are perpendicular to the conductor, and means for detecting the modulated polarization of the beam to generate a voltage waveform corresponding to that on the conductor.

Claim 12

Apparatus for measuring a voltage waveform of an electrical signal on an electrical conductor comprising: means for generating the signal on the conductor, a probe comprising a crystal exhibiting a longitudinal electro-optic effect, means for positioning the crystal over or on the conductor, means for directing a polarized light beam through the crystal along a direction essentially perpendicular to the conductor, birefringence being induced in the crystal and the polarization of the beam being modulated in response essentially to only those components of the electric field generated by the signal which are perpendicular to the conductor, and means for detecting the modulated polarization of the beam to generate a voltage waveform corresponding to that on the conductor.

Claim 13

The apparatus of claim 10 wherein the crystal is selected from the group consisting of KDP, KD*P, GaAs, ZnTe, CdTe, and CuCl.

Claim 14

The apparatus of claim 10 wherein the crystal has an end face positioned over or on the conductor and a backface maintained at a referencepotential.

Claim 15

The apparatus of claim 12 including a conductive layer disposed on the backface.

Claim 16

The apparatus of claim 12 including a reflector disposed on the end face of the crystal.

Claim 17

The apparatus of claim 10 wherein the directing means includes means for generating the light beam as a train of optical pulses having a duration of about a picosecond or less.

Claim 18

The apparatus of claim 15 wherein the generating means comprises a laser.

Claim 19

The apparatus of claim 16 wherein the generating means comprises a colliding pulse mode-locked laser.

Claim 20

The apparatus of claim 10 wherein the conductor is disposed in an integrated circuit.

Claim 21

The apparatus of claim 11, 12, 13 or 14 wherein the probe comprises a transparent support and a tip formed from the crystal and mounted on the support.

Claim 22

The apparatus of claim 19 wherein the tip has the shape of a truncated pyramid.