US4891577A
Expired / Lapsed
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Apparatus for measuring noise characteristics
Assignee: Panasonic Holdings Corp
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Filing: 1987-10-27
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Granted: 1990-01-02
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Expires: 2007-10-27
Abstract
Abstract A device for measuring characteristics of a semiconductor device using a noise measurement system and an impedance measuring system includes an input probe and an output probe for providing connection to the semiconductor device. The device also includes first and second variable impedance devices for respectively varying a source and a load impedance, and respectively connected to the input and output probing devices. First and second switching devices are respectively connected to the first and second variable impedance devices. The switching devices selectively connect the first and second variable impedance devices to the noise measurement system, and selectively connect the first and second variable impedance devices to the impedance measuring system.
Inventors
- 👤 Osamu Ishikawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 14:53
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/073; G01R1/07307; G01R1/07342; G01R31/00; G01R31/26; G01R31/2646
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
125 words
A system for measuring characteristics of a semiconductor device using a noise measuring system and an impedance measuring system, said system comprising: an input probing means and an output probing means for providing connection to the semiconductor device; first and second variable impedance means for respectively varying a source and a load impedance, and respectively connected to said input probing means and said output probing means; first and second switching means respectively connected to said first and second variable impedance means and each having means for connection to the noise measuring system and the impedance measuring system, said first and second switching means for selectively connecting said first and second variable impedance means to one of the noise measuring system and the impedance measuring system.
Claim 2
Independent Claim
125 words
A system for measuring characteristics of a semiconductor device using a noise measuring system and an impedance measuring system, said system comprising: an input probing means and an output probing means for providing connection to the semiconductor device; first and second variable impedance means for respectively varying a source and a load impedance, and respectively connected to said input probing means and said output probing means; first and second switching means respectively connected to said first and second variable impedance means and each having means for connection to the noise measuring system and the impedance measuring system, said first and second switching means for selectively connecting said first and second variable impedance means to one of the noise measuring system and the impedance measuring system.
Claim 3
Dependent Claim
18 words
The system according to claim 1, wherein said first and second switching means each includes a coaxial switch.
Claim 4
Dependent Claim
20 words
The system according to claim 1, wherein said first and second variable impedance means each includes a slide screw tuner.
Claim 5
Dependent Claim
20 words
The system according to claim 2, wherein said first and second variable impedance means each includes a slide screw tuner.
Claim 6
Dependent Claim
23 words
The system according to claim 1, wherein said input probing means and said output probing means each includes a microwave frequency wafer probe.
Claim 7
Dependent Claim
23 words
The system according to claim 2, wherein said input probing means and said output probing means each includes a microwave frequency wafer probe.
Claim 8
Dependent Claim
23 words
The system according to claim 3, wherein said input probing means and said output probing means each includes a microwave frequency wafer probe.
Claim 9
Dependent Claim
23 words
The system according to claim 4, wherein said input probing means and said output probing means each includes a microwave frequency wafer probe.
Claim 10
Dependent Claim
13 words
The system according to claim 1, wherein said semiconductor device is a transistor.
References Cited (Backward Citations)
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