US4891525A
Expired / Lapsed
US
⏱️ 0.0 years remaining
SKM ion source
Assignee: Axcelis Technologies Inc
•
Filing: 1988-11-14
•
Granted: 1990-01-02
•
Expires: 2008-11-14
Abstract
Abstract An ion source of the side extraction type which includes auxiliary electrodes surrounding the cathode at the ends of the anode, and insulators surrounding the auxiliary electrodes and electrically isolating them from the anode. The auxiliary electrodes essentially define the ends of the discharge chamber, leaving the anode confined to the cylindrical surface surrounding the filament. Each insulator is made up of an inner insulator and an outer insulator with an annular space defined between them. The inner and outer insulators are each in the form of a cylinder with a radially extending flange formed at one end, and interfit with the anode and with each other such that cylindrical spaces are defined between the outer flange portion and the anode and between the inner and outer flange portions. These and other features contribute to improve the electrical isolation between the auxiliary electrode and the anode, prolong source life, and improve beam purity.
Inventors
- 👤 Larry E. Frisa
- 👤 Monroe L. King
- 👤 Stephen E. Sampayan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 19:53
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/08; H01J27/00; H01J27/02; H01J27/08; H01J27/10
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
129 words
In an ion source comprising a housing having a cylindrical bore, a cathode extending axially within said housing, first insulator means supporting said cathode within said housing, a first electrode at least a portion of which is proximate to said cathode adjacent one end thereof, a second electrode at least a portion of which is proximate to said cathode adjacent the opposite end thereof, biasing means operable to apply potentials to said first and second electrodes, and second insulator means electrically isolating said first and second electrodes from said cathode and from said housing; the improvement wherein said second insulator means comprises an inner insulator and an outer insulator, said inner and outer insulators being disposed relative to one another to define a space between at least portions thereof.
Claim 2
Dependent Claim
129 words
In an ion source comprising a housing having a cylindrical bore, a cathode extending axially within said housing, first insulator means supporting said cathode within said housing, a first electrode at least a portion of which is proximate to said cathode adjacent one end thereof, a second electrode at least a portion of which is proximate to said cathode adjacent the opposite end thereof, biasing means operable to apply potentials to said first and second electrodes, and second insulator means electrically isolating said first and second electrodes from said cathode and from said housing; the improvement wherein said second insulator means comprises an inner insulator and an outer insulator, said inner and outer insulators being disposed relative to one another to define a space between at least portions thereof.
Claim 3
Dependent Claim
126 words
Apparatus as claimed in claim 1, in which said first insulator means, said first and second electrodes, and said second insulator means are arranged on parallel axes and received in the ends of said housing; said first insulator means comprises an elongated cylindrical member in surrounding relation to and engaging said cathode; each of said first and second electrodes comprises a cylindrical member in surrounding relation to said first insulator means; and each of said inner and outer insulators comprises a generally cylindrical member having an axially elongated cylindrical portion and a radially extending flange portion, said space between said inner and outer insulators being defined by an annular space between the cylindrical portion of said inner insulator and the cylindrical portion of said outer insulator.
Claim 4
Dependent Claim
39 words
Apparatus as claimed in claim 2, wherein the ends of said housing are counterbored, and said outer insulator is received within the counterbores with the flange portion of the outer insulator is contact with the bottom of the counterbore.
Claim 5
Dependent Claim
95 words
Apparatus as claimed in claim 2, wherein each end of the housing is formed with a first counterbore and a second counterbore of greater diameter than the first, and wherein said outer insulator is received within the counterbores with the outer diameter of the flange portion of the outer insulator engaging the diameter of the second counterbore and a face of the flange portion of the outer insulator engaging the bottom of the second counterbore, and the cylindrical portion of the outer insulator being received within but spaced from the diameter of the first counterbore.
Claim 6
Dependent Claim
48 words
Apparatus as claimed in claim 4, in which a portion of the face of the flange portion of the outer insulator in contact with the bottom of the second counterbore is recessed to define a cylindrical space between such flange portion and the bottom of the second counterbore.
Claim 7
Dependent Claim
110 words
Apparatus as claimed in claim 5, in which the flange portion of said outer insulator is counterbored, the flange portion of said inner insulator being received within the counterbore in said outer insulator with the outer diameter of the flange portion of the inner insulator in engagement with the diameter of the counterbore in said outer insulator and a face of the flange portion of the inner insulator in engagement with the bottom of the counterbore in said outer insulator; a portion of said face being recessed to define a cylindrical space between the flange portion of the inner insulator and the bottom of the counterbore in said outer insulator.
Claim 8
Dependent Claim
70 words
Apparatus as claimed in claim 2, in which said inner insulators are counterbored, at least a portion of each of said first and second electrodes is received within such counterbores, and the outer diameter of the portions of said first and second electrodes within the counterbores is less than the diameter of the counterbores to define an annular space between the corresponding portions of said electrodes and said inner insulators.
Claim 9
Dependent Claim
22 words
Apparatus as claimed in claim 4 in which the intersection of said cylindrical bore and said first counterbore is formed a radius.
Claim 10
Dependent Claim
30 words
Apparatus as claimed in claim 8, in which said radius is substantially equal to the difference between the radius of said cylindrical bore and the radius of said first counterbore.
Claim 11
Dependent Claim
142 words
In an ion source comprising a housing having a cylindrical bore defining a plasma discharge chamber, said housing defining an anode; a cathode extending axially within said chamber; first insulator means supporting said cathode within said housing; a first electrode at least a portion of which is proximate to said cathode adjacent one end thereof; a second electrode at least a portion of which is proximate to said cathode adjacent the opposite end thereof; biasing means operable to apply potentials to said first and second electrodes; and second insulator means electrically isolating said first and second electrodes from said cathode and from said housing; the improvement wherein said first and second electrodes and said first and second insulator means define the entire end walls of said plasma discharge chamber, such that no anode area exists at the ends of said discharge chamber.
Claim 12
Dependent Claim
142 words
In an ion source comprising a housing having a cylindrical bore defining a plasma discharge chamber, said housing defining an anode; a cathode extending axially within said chamber; first insulator means supporting said cathode within said housing; a first electrode at least a portion of which is proximate to said cathode adjacent one end thereof; a second electrode at least a portion of which is proximate to said cathode adjacent the opposite end thereof; biasing means operable to apply potentials to said first and second electrodes; and second insulator means electrically isolating said first and second electrodes from said cathode and from said housing; the improvement wherein said first and second electrodes and said first and second insulator means define the entire end walls of said plasma discharge chamber, such that no anode area exists at the ends of said discharge chamber.
Claim 13
Dependent Claim
53 words
Apparatus as claimed in claim 10 in which said first and second electrodes comprise cylindrical members surrounding said first insulator means, wherein the surface area of the end of each of said electrodes facing said chamber makes up at least twenty five percent of the surface area of each of said end walls.
Claim 14
Dependent Claim
25 words
Apparatus as claimed in any one of said claims 1 through 11 in which said first and second insulator means are fabricated of boron nitride.
Claim 15
Dependent Claim
23 words
Apparatus as claimed in any one of claims 1 through 13 in which said first and second insulator means are fabricated of alumina.
Claim 16
Dependent Claim
22 words
Apparatus as claimed in any one of claims 1 through 11 in which said first and second electrodes are fabricated of molybdenum.
References Cited (Backward Citations)
GB916703A
Cited
US3846668A
Cited
US4139772A
Cited
US4288716A
Cited
JPS5842150A
Cited
US4506160A
Cited
US4542321A
Cited
US4608513A
Cited
US4800281A
Cited
US4760262A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-01-01 | 1993-07-03 | 1994-01-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-01-01 | 1997-07-03 | 1998-01-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-01-01 | 2001-07-03 | 2002-01-02 | $7700.00 | Window Closed / Lapsed |