US4608513A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Dual filament ion source with improved beam characteristics
Assignee: Varian Semiconductor Equipment Associates Inc
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Filing: 1984-09-13
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Granted: 1986-08-26
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Expires: 2004-09-13
Abstract
Abstract A Freeman type electron bombardment ion source includes dual filament electrodes positioned in an arc chamber having a slit for extraction of an ion beam. The filament electrodes are symmetrically positioned with respect to the extraction slit. The filament electrode currents are equal in magnitude and oppositely directed. As a result, lateral magnetic fields in the region of the extraction slit are substantially eliminated.
Inventors
- 👤 William B. Thompson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 22:16
CPC Classifications
H; H01; H01J; H01J27/00; H01J27/02; H01J27/08; H01J27/14
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
122 words
An ion source comprising: a housing which defines an internal arc chamber and includes an extraction slit for extraction of an ion beam; at least two filament electrodes for thermionic emission of electrons positioned in said arc chamber; means for supplying electrical current through said filament electrodes for heating thereof in opposite directions such that, in the region of said extraction slit, the net magnetic field produced by said electrodes in a direction transverse to said ion beam is approximately zero; means for biasing said housing at a more positive potential than said filament electrodes; means for imposing a magnetic field on said arc chamber generally parallel to said filament electrodes; and means for introducing an ionizable material into said arc chamber.
Claim 2
Dependent Claim
122 words
An ion source comprising: a housing which defines an internal arc chamber and includes an extraction slit for extraction of an ion beam; at least two filament electrodes for thermionic emission of electrons positioned in said arc chamber; means for supplying electrical current through said filament electrodes for heating thereof in opposite directions such that, in the region of said extraction slit, the net magnetic field produced by said electrodes in a direction transverse to said ion beam is approximately zero; means for biasing said housing at a more positive potential than said filament electrodes; means for imposing a magnetic field on said arc chamber generally parallel to said filament electrodes; and means for introducing an ionizable material into said arc chamber.
Claim 3
Dependent Claim
23 words
The ion source as defined in claim 1 wherein said filament electrodes are parallel to each other and parallel to said extraction slit.
Claim 4
Dependent Claim
29 words
The ion source as defined in claim 2 wherein said filament electrodes are symmetrically positioned with respect to said extraction slit and are supplied with currents equal in magnitude.
Claim 5
Dependent Claim
17 words
The ion source as defined in claim 3 wherein said filament electrodes are electrically connected in series.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-08-25 | 1990-02-24 | 1990-08-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-08-25 | 1994-02-24 | 1994-08-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-08-25 | 1998-02-24 | 1998-08-26 | $7700.00 | Window Closed / Lapsed |