Process for manufacturing an optical recording medium

Claim 2

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; and forming said recording layer by successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy of (In.sub.1-x Sb.sub.x).sub.1-y M.sub.y, 0.4 ≦x0.8, 0≦y≦0.2, (In.sub.1-x As.sub.x).sub.1-y M.sub.y, 0.2≦x1.0, 0≦y≦0.2, (In.sub.1-x Bi.sub.x).sub.1-y M, 0.2≦x≦0.7, 0≦y≦0.2, (Ga.sub.1-x Sb.sub.x).sub.1-y M.sub.y, 0.4≦x≦0.9, 0≦y≦0.2, (Ga.sub.1-x Bi.sub.x).sub.1-y M.sub.y, 0.4≦x≦0.7, 0≦y≦0.2 or (Tl.sub.1-x Bi.sub.x).sub.1-y M.sub.y, 0.5≦x≦0.8, 0≦y≦0.2, and wherein, M is one or more of the group consisting of Al, Si, P, S, Zn, Ga, Ge, As, Se, Ag, Cd, In, Sn, Sb, Te and Pb.

Claim 3

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; and forming said recording layer by successively depositing a plurality of layers of the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy, wherein said successively deposited layers have an average chemical composition of (In 1-x Sb x ) 1-y M 7 wherein 0.4≦x≦0.8, 0≦y≦0.2, and M is one or more of the group consisting of Al, Si, P, S, Zn, Ga, Ge, As, Se, Ag, Cd, Sn, Bi, Te, Tl and Pb.

Claim 4

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; and forming said recording layer by successively depositing a plurality of layers of the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy, wherein said successively deposited layers have an average chemical composition of (In 1-x Sb x ) 1-y M 7 wherein 0.4≦x≦0.8, 0≦y≦0.2, and M is one or more of the group consisting of Al, Si, P, S, Zn, Ga, Ge, As, Se, Ag, Cd, Sn, Bi, Te, Tl and Pb.

Claim 5

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; and forming said recording layer by successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy, wherein said successively deposited layers have an average chemical composition of (In 1-x As x ) 1-y M y wherein 0.2≦x ≦1.0, 0≦y≦0.2, and M is one or more of the group consisting of Al, Si, P, S, Zn, Ge, Bi, Se, Ag, Cd, Sn, Sb, Te, Tl and Pb.

Claim 6

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; and forming said recording layer by successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy, wherein said successively deposited layers have an average chemical composition of (In 1-x As x ) 1-y M y wherein 0.2≦x ≦1.0, 0≦y≦0.2, and M is one or more of the group consisting of Al, Si, P, S, Zn, Ge, Bi, Se, Ag, Cd, Sn, Sb, Te, Tl and Pb.

Claim 7

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; and forming said recording layer by successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy, wherein said successively deposited layers have an average chemical composition of (In 1-x Bi x ) 1-y M wherein 0.2≦x≦0.7, 0≦y≦0.2, and M is one or more of the group consisting of Al, Si, P, S, Zn, Ga, Ge, As, Se, Ag, Cd, Sn, Sb, Te, Tl and Pb.

Claim 8

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; and forming said recording layer by successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy, wherein said successively deposited layers have an average chemical composition of (In 1-x Bi x ) 1-y M wherein 0.2≦x≦0.7, 0≦y≦0.2, and M is one or more of the group consisting of Al, Si, P, S, Zn, Ga, Ge, As, Se, Ag, Cd, Sn, Sb, Te, Tl and Pb.

Claim 9

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; and forming said recording layer by successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy, wherein said successively deposited layer have an average chemical composition of (Ga 1-x Sb x ) 1-y M y wherein 0.4≦x≦0.9, 0≦y≦0.2, and M is one or more of the group consisting of Al, Si, P, S, Zn, Ge, As, Se, Ag, Cd, Sn, Tl, Te, Bi and Pb.

Claim 10

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; and forming said recording layer by successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy, wherein said successively deposited layer have an average chemical composition of (Ga 1-x Sb x ) 1-y M y wherein 0.4≦x≦0.9, 0≦y≦0.2, and M is one or more of the group consisting of Al, Si, P, S, Zn, Ge, As, Se, Ag, Cd, Sn, Tl, Te, Bi and Pb.

Claim 11

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; and forming said recording layer by successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy, wherein said successively deposited layers have an average chemical composition of (Ga 1-x Bi x ) 1-y M y wherein 0.4≦x≦0.7, 0≦y≦0.2, and M is one or more of the group consisting of Al, Si, P, S, Zn, Ge, As, Se, Ag, Cd, In, Sn, Sb, Te, Tl and Pb.

Claim 12

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; and forming said recording layer by successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy, wherein said successively deposited layers have an average chemical composition of (Ga 1-x Bi x ) 1-y M y wherein 0.4≦x≦0.7, 0≦y≦0.2, and M is one or more of the group consisting of Al, Si, P, S, Zn, Ge, As, Se, Ag, Cd, In, Sn, Sb, Te, Tl and Pb.

Claim 13

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; and forming said recording layer by successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy, wherein said successively deposited layers have an average chemical composition of (Ti 1-x Bi x ) 1-y M y wherein 0.5≦x≦0.8, 0≦y≦0.2, and M is one or more of the group consisting of Al, Si, P, S, Zn, Ge, As, Se, Ag, Cd, Sn, Tl, Te, Bi and Pb.

Claim 14

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; and forming said recording layer by successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy, wherein said successively deposited layers have an average chemical composition of (Ti 1-x Bi x ) 1-y M y wherein 0.5≦x≦0.8, 0≦y≦0.2, and M is one or more of the group consisting of Al, Si, P, S, Zn, Ge, As, Se, Ag, Cd, Sn, Tl, Te, Bi and Pb.

Claim 15

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; and forming said recording layer by successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy, wherein said substrate is made of a polymer mainly consisting of a polycarbonate and said temperature for heating said substrate is from 60° C. to 130° C.

Claim 16

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; and forming said recording layer by successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy, wherein said substrate is made of a polymer mainly consisting of a polycarbonate and said temperature for heating said substrate is from 60° C. to 130° C.

Claim 17

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; and forming said recording layer by successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy, wherein said substrate is made of a polymer mainly consisting of an epoxy resin and said temperature for heating said substrate is from 60° C. to 120° C.

Claim 18

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; and forming said recording layer by successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy, wherein said substrate is made of a polymer mainly consisting of an epoxy resin and said temperature for heating said substrate is from 60° C. to 120° C.

Claim 19

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; and forming said recording layer by successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy, wherein said substrate is made of a polymer mainly consisting of a polymethylmethacrylate and said temperature for heating said substrate is from 40° C. to 80° C.

Claim 20

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; and forming said recording layer by successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy, wherein said substrate is made of a polymer mainly consisting of a polymethylmethacrylate and said temperature for heating said substrate is from 40° C. to 80° C.

Claim 21

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; and forming said recording layer by successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy, wherein said substrate is made of glass, having a surface layer of a light-cured polymer on which said temperature for heating said substrate is from 60° C. to 250° C.

Claim 22

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; and forming said recording layer by successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy, wherein said substrate is made of glass, having a surface layer of a light-cured polymer on which said temperature for heating said substrate is from 60° C. to 250° C.

Claim 23

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; forming said recording layer by successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy; and forming a protecting layer of a plastic on said recording layer of an alloy.

Claim 24

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; forming said recording layer by successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy; and forming a protecting layer of a plastic on said recording layer of an alloy.

Claim 25

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; forming said recording layer by successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy; and forming a protecting layer of a light-cured polymer on said recording layer of an alloy.

Claim 26

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; forming said recording layer by successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy; and forming a protecting layer of a light-cured polymer on said recording layer of an alloy.

Claim 27

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; forming said recording layer by successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy; and forming a protecting layer of an inorganic layer on said recording layer of an alloy by vacuum deposition.

Claim 28

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; forming said recording layer by successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy; and forming a protecting layer of an inorganic layer on said recording layer of an alloy by vacuum deposition.

Claim 29

A process according to claim 14, wherein said inorganic layer is made of one element selected from the group consisting of TiO 2 , GeO 2 , SiO 2 , SiO, Al 2 O 3 , ZrO 2 , ZnS, MgF 2 , CaF 2 , Si 3 N 4 , AlN and BN.

Claim 30

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; forming a layer having a thickness of more than 20 nm above said substrate and underlying said recording layer of an alloy; and forming said recording layer by successively depositing a plurality of layer on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy.

Claim 31

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; forming a layer having a thickness of more than 20 nm above said substrate and underlying said recording layer of an alloy; and forming said recording layer by successively depositing a plurality of layer on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy.

Claim 32

A process according to claim 11, wherein said underlying layer is made of one element selected from the group consisting of TiO 2 , GeO 2 , SiO 2 , SiO, Al 2 O 3 , ZrO 2 , ZnS, MgF 2 , CaF 2 , Si 3 N 4 , AlN and BN.

Claim 33

A process according to claim 16, wherein said underlying layer has a thickness of 50 nm to 200 nm.

Claim 34

A process according to claim 16, wherein said formation of said underlying layer is carried out by vacuum deposition while heating said substrate.

Claim 35

A process according to claim 16, wherein said formation of said underlying layer is carried out by vacuum deposition without heating said substrate.

Claim 36

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy; and heating said recording layer of an alloy deposited on said substrate.

Claim 37

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy; and heating said recording layer of an alloy deposited on said substrate.

Claim 38

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; and successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy, wherein said step of successively depositing a plurality of layers comprises the substeps of: first depositing a layer of an element Sb on said substrate while heating said substrate at a temperature lower than thermal deformation temperature of said substrate; and then depositing a layer of an intermetallic compound of InSb on said layer of Sb, an average chemical composition of said layers of Sb and InSb being 50% to 70% by atom number of Sb and the remainder of In, while heating said substrate at said temperature.

Claim 39

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; and successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy, wherein said step of successively depositing a plurality of layers comprises the substeps of: first depositing a layer of an element Sb on said substrate while heating said substrate at a temperature lower than thermal deformation temperature of said substrate; and then depositing a layer of an intermetallic compound of InSb on said layer of Sb, an average chemical composition of said layers of Sb and InSb being 50% to 70% by atom number of Sb and the remainder of In, while heating said substrate at said temperature.

Claim 40

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; and successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy, wherein said step of successively depositing a plurality of layers comprises the substeps of: first depositing a layer of an intermetallic compound of InSb on said substrate while heating said substrate at a temperature lower than a thermal deformation temperature of said substrate; and then depositing a layer of an element of Sb on said layer of InSb, an average chemical composition of said layers of InSb and Sb being 50% to 70% by atom number of Sb and the remainder of In, while heating said substrate at said temperature.

Claim 41

A process for manufacturing an optical recording medium including a recording layer of an alloy, said recording layer of an alloy being crystalline, said process comprising the steps of: preparing a substrate; and successively depositing a plurality of layers on the substrate while heating the substrate at a temperature lower than the thermal deformation temperature of the substrate, at least one of said successively deposited layers consisting essentially of an element composing said alloy or a chemical compound of two or more elements composing said alloy, said successively deposited layers having an average chemical composition of said alloy, wherein said step of successively depositing a plurality of layers comprises the substeps of: first depositing a layer of an intermetallic compound of InSb on said substrate while heating said substrate at a temperature lower than a thermal deformation temperature of said substrate; and then depositing a layer of an element of Sb on said layer of InSb, an average chemical composition of said layers of InSb and Sb being 50% to 70% by atom number of Sb and the remainder of In, while heating said substrate at said temperature.

Claim 42

A process according to claim 22, further comprising the steps of depositing a layer of an element of Se between said layers of Sb and InSb while heating said substrate at said temperature.

Claim 43

A process according to claim 23, further comprising the step of depositing a layer of an element of Se between said layers of InSb and Sb while heating said substrate at said temperature.