Quadratic frequency modulated absolute distance measuring interferometry

Claim 2

In an absolute distance measurement interferometry method of the type employing frequency modulation of a laser beam and detecting a beat frequency produced at the output of the interferometer to determine absolute distance to a test object, the improvement comprising the steps of: a. quadratically modulating the frequency of the laser beam; and b. detecting the rate of change of a beat frequency produced at the output of the interferometer to determine the absolute distance to the test object.

Claim 3

The method claimed in claim 1, wherein the laser beam is produced by a laser diode, and the step of quadratically modulating the laser beam comprises driving the laser diode with a parabolically variable driving current.

Claim 4

The method claimed in claim 1, wherein the beat frequency is detected by a first detector having an output representing a sine component of an interference pattern and a second detector having an output representing a cosine component of the interference pattern, the step of detecting the rate of change of the beat frequency comprises the steps of differentiating the output of the second detector and dividing the result by the output of the first detector to produce a triangular waveform, and detecting the slope of the triangular waveform as a measure of the rate of change of the beat frequency and hence the distance to the test object.

Claim 5

Absolute distance measurement apparatus comprising; a. means for producing a plane polarized laser beam having a quadratically variable frequency; b. interferometer means for splitting the laser beam into a reference beam and a test beam, the reference beam being reflected from a reference object fixed with respect to the apparatus and the test beam being reflected from a test object, the distance to which is being measured and for combining the reflected beams to form an interference pattern; c. detector means for detecting the interference pattern, including a first detector for detecting light polarized in a first direction and producing a first detection signal V 1 in response thereto, and a second detector for detecting light polarized in a second direction 90° to said first direction and producing a second detector signal V 2 in response thereto; d. computer means responsive to said first and second signals to form a distance detection signal represented by D=(dV 1 /dt)/V 2 where D is a periodic signal having a triangular waveform, and wherein the slope of the triangular waveform represents the absolute distance to the test object, and including means for detecting the slope of the distance detection signal D to produce a signal representing the absolute distance to the test object.

Claim 6

Absolute distance measurement apparatus comprising; a. means for producing a plane polarized laser beam having a quadratically variable frequency; b. interferometer means for splitting the laser beam into a reference beam and a test beam, the reference beam being reflected from a reference object fixed with respect to the apparatus and the test beam being reflected from a test object, the distance to which is being measured and for combining the reflected beams to form an interference pattern; c. detector means for detecting the interference pattern, including a first detector for detecting light polarized in a first direction and producing a first detection signal V 1 in response thereto, and a second detector for detecting light polarized in a second direction 90° to said first direction and producing a second detector signal V 2 in response thereto; d. computer means responsive to said first and second signals to form a distance detection signal represented by D=(dV 1 /dt)/V 2 where D is a periodic signal having a triangular waveform, and wherein the slope of the triangular waveform represents the absolute distance to the test object, and including means for detecting the slope of the distance detection signal D to produce a signal representing the absolute distance to the test object.

Claim 7

The apparatus claimed in claim 1, wherein said means for producing a laser beam comprises a laser diode and drive means for parabolically modulating the injection current to the laser diode.

Claim 8

The apparatus claimed in claim 1, wherein said computer means comprises a programmed microprocessor.