Patent US4885472A successfully refreshed from Google Patents.
US4885472A
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Silicon grid as a reference and calibration standard in a particle beam lithography system
Assignee: Applied Materials Inc
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Filing: 1988-03-14
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Granted: 1989-12-05
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Expires: 2008-03-14
Abstract
Abstract A reference and calibration grid (44a or 44b) of silicon is incorporated into a particle beam lithography system (10) and used to calibrate the system (10). The grid (44a or 44b) is formed in a silicon die (50) of much thicker structure and with square holes (64) and with a period to enable direct coordination with binary electronics. The grid (44a or 44b) is coated with a suitable material, preferably gold (72), to prevent charged particles or electrons from passing through the solid portions of the grid and the grid is preferably mounted on a grid holder (52) which can be aligned to the X-Y reference on the workpiece stage (32) and may be adjusted in tilt and in height (Z direction). The crystallography of silicon provides accuracies in orthogonality, corner radii, and edge roughness required for grids used as fiducials for particle beam lithography. In addition, as part of a thicker structure (silicon die 50), the grid (44a or 44 b) can easily be handled and hence mounting and alignment procedures can be markedly simplified. The flatness of the grid (44a or 44b) is consistent over the whole surface.
Inventors
- 👤 Lydia J. Young
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 13:44
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/317; H01J37/3174; B; B82; B82Y; B82Y10/00; B82Y40/00; H01J37/304; H01J2237/00; H01J2237/30; H01J2237/304; H01J2237/30433
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
167 words
In a particle beam lithography system having a beam column and particle beam directed toward a workpiece for processing a workpiece located on a X-Y stage, binary electronic means for deflecting said particle beam in an X and Y direction, means for driving said X-Y stage in an X and Y direction and means for sensing the position of the X-Y stage and sending signals of said stage position to said binary means, the improvement comprising, a reference and calibration grid having a plurality of square openings formed in a silicon die said grid being calibrated for direct coordination with the binary electronic system and said silicon die being much larger than said grid for easy handling and mounting in said system, means connecting said grid to said X-Y stage, and means cooperating with said grid to provide calibration signals whereby the grid may serve as a global reference location, as a reference for writing plane location and a reference to set up the particle beam column.
Claim 2
Dependent Claim
167 words
In a particle beam lithography system having a beam column and particle beam directed toward a workpiece for processing a workpiece located on a X-Y stage, binary electronic means for deflecting said particle beam in an X and Y direction, means for driving said X-Y stage in an X and Y direction and means for sensing the position of the X-Y stage and sending signals of said stage position to said binary means, the improvement comprising, a reference and calibration grid having a plurality of square openings formed in a silicon die said grid being calibrated for direct coordination with the binary electronic system and said silicon die being much larger than said grid for easy handling and mounting in said system, means connecting said grid to said X-Y stage, and means cooperating with said grid to provide calibration signals whereby the grid may serve as a global reference location, as a reference for writing plane location and a reference to set up the particle beam column.
Claim 3
Dependent Claim
30 words
The system as claimed in claim 1 wherein said grid calibration comprises a plurality of square holes about 32 microns on a side with a period of about 64 microns.
Claim 4
Dependent Claim
29 words
The system as claimed in claim 2 wherein said grid is coated with a suitable metal to prevent charged particles from passing through the solid parts of said grid.
Claim 5
Dependent Claim
13 words
The system as claimed in claim 3 wherein said suitable metal is gold.
Claim 6
Dependent Claim
19 words
The system as claimed in claim 1 wherein said means cooperating with said grid comprises a PIN diode detector.
Claim 7
Dependent Claim
18 words
The system as claimed in claim 1 wherein said means cooperating with said grid comprises a Faraday cup.
Claim 8
Dependent Claim
170 words
In a particle beam lithography system having a beam column and particle beam directed toward a workpiece for processing a workpiece located on a X-Y stage, binary electronic means for deflecting said particle beam in an X and Y direction, means for driving said X-Y stage in an X and Y direction and means for sensing the position of the X-Y stage and sending signals of said stage position to said binary means, the improvement comprising, a reference and calibration grid having a plurality of square openings formed in a silicon die, said grid being calibrated for direct coordination with the binary electronic system, grid mounting means connected to said X-Y stage, adjustable in tilt and in the Z direction and may be aligned to X-Y reference mirrors mounted on the X-Y stage, and means cooperating with said grid to provide calibration signals whereby the grid may serve as a global reference location, as a reference for writing plane location and a reference to set up the particle beam column.
Claim 9
Dependent Claim
170 words
In a particle beam lithography system having a beam column and particle beam directed toward a workpiece for processing a workpiece located on a X-Y stage, binary electronic means for deflecting said particle beam in an X and Y direction, means for driving said X-Y stage in an X and Y direction and means for sensing the position of the X-Y stage and sending signals of said stage position to said binary means, the improvement comprising, a reference and calibration grid having a plurality of square openings formed in a silicon die, said grid being calibrated for direct coordination with the binary electronic system, grid mounting means connected to said X-Y stage, adjustable in tilt and in the Z direction and may be aligned to X-Y reference mirrors mounted on the X-Y stage, and means cooperating with said grid to provide calibration signals whereby the grid may serve as a global reference location, as a reference for writing plane location and a reference to set up the particle beam column.
Claim 10
Dependent Claim
48 words
A die with at least one grid formed therein for reference in a particle beam lithography system having binary electronics for operating said system comprising, a silicon structure forming said die, said grid being smaller and thinner than said structure and having sidewalls that are trapezoidal in cross-section.
Claim 11
Dependent Claim
48 words
A die with at least one grid formed therein for reference in a particle beam lithography system having binary electronics for operating said system comprising, a silicon structure forming said die, said grid being smaller and thinner than said structure and having sidewalls that are trapezoidal in cross-section.
Claim 12
Dependent Claim
28 words
The die of claim 8 wherein said grid comprises a plurality of square holes of about 32 microns on a side with a period of about 64 microns.
Claim 13
Dependent Claim
26 words
The die of claim 9 wherein said grid is provided with a coating to prevent particle beams from passing through the solid portions of said grid.
Claim 14
Dependent Claim
10 words
The die of claim 10 wherein said coating is gold.
References Cited (Backward Citations)
US4517465A
Cited
US4587433A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-12-04 | 1993-06-05 | 1993-12-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-12-04 | 1997-06-05 | 1997-12-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-12-04 | 2001-06-05 | 2001-12-05 | $7700.00 | Window Closed / Lapsed |