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US4883768A Expired / Lapsed US ⏱️ 0.0 years remaining

Mesa fabrication in semiconductor structures

Assignee: Murata Electronics Oy
•
Filing: 1989-02-28
•
Granted: 1989-11-28
•
Expires: 2009-02-28
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Abstract

Abstract Semiconductor structures for electronic use, such as for example a silicon-glass-silicon pressure sensor (Fig. 3), include mesa or pedestal structures (12A) extending up from silicon substrates (12). In the invention the mesa structures are fabricated in an oxidation process applied in a cyclical fashion (steps 1-3 through 1-5 of Fig. 1). Each cycle includes a photolithographic operation to protect the previously grown oxide on the mesas from etching. During each cycle less oxide is grown (or conversely silicon consumed) on the mesas than in the preceding cycle, while equivalent amounts of oxide are grown on non-mesa areas in each cycle. As a result, the tops of the mesas get higher and higher above the surrounding areas in each cycle. In order to prevent the leaving of any oxide "scraps" in a non-mesa area during the oxidation steps, resulting from a flaw in the mask, a double exposure process is used, utilizing two completely independent masks, with a positive working photo-resist.

Inventors

  • 👤 James L. Swindal
  • 👤 Daniel H. Grantham

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-06 01:23
CPC Classifications
H; H10; H10D; H10D48/00; H10D48/50; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6302; H10P14/6304; H10P14/6306; H10P14/6308; H10P14/6309; G; G01; G01L; G01L9/00; G01L9/0041; G01L9/0042; G01L9/0072; G01L9/0073; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283; H10P50/60; H10P50/64; H10P50/642; H10P50/69; H10P50/691; Y; Y10; Y10S; Y10S438/00; Y10S438/911; Y10S438/977

Claims Analysis

Total Claims: 6
Claim 1
Independent Claim 113 words
A method of fabricating a mesa in a semiconductor structure, comprising the following step(s): (a) fabricating the mesa in an oxidation process applied in a cyclical fashion, with each cycle including a photolithographic operation protecting the previously grown oxide on the mesa from etching while exposing the areas surrounding the mesa to etching; and (b) during each cycle growing less oxide and conversely consuming less silicon on the mesa than in the preceding cycle, while growing substantially equal amounts of oxide on the non-mesa areas surrounding the mesa in each cycle, causing the top of the mesa to get higher above the surrounding areas in each cycle in comparison to the preceding cycle.
Claim 2
Independent Claim 113 words
A method of fabricating a mesa in a semiconductor structure, comprising the following step(s): (a) fabricating the mesa in an oxidation process applied in a cyclical fashion, with each cycle including a photolithographic operation protecting the previously grown oxide on the mesa from etching while exposing the areas surrounding the mesa to etching; and (b) during each cycle growing less oxide and conversely consuming less silicon on the mesa than in the preceding cycle, while growing substantially equal amounts of oxide on the non-mesa areas surrounding the mesa in each cycle, causing the top of the mesa to get higher above the surrounding areas in each cycle in comparison to the preceding cycle.
Claim 3
Dependent Claim 35 words
The method of claim 1, wherein there is included the step(s) of: using a silicon substrate and in the oxidation process forming a layer of silicon dioxide on the exterior surface of the silicon substrate.
Claim 4
Dependent Claim 23 words
The method of claim 2, wherein there is included the step(s) of: etching the silicon dioxide layer away with a wet chemical etch.
Claim 5
Dependent Claim 33 words
The method of claim 1, wherein there is included the step(s) of: providing a photo-resist layer over the mesa in the photolithographic operation protecting the previously grown oxide on the mesa from etching.
Claim 6
Dependent Claim 48 words
The method of claim 1, wherein there is included the following step(s): using a double exposure process in the photolithographic operation, utilizing two completely independent, substantially identical masks, in conjunction with a positive working photo-resist, effectively eliminating any oxide "scraps" in a non-mesa area during the oxidation step.

References Cited (Backward Citations)

US4167745A Cited
JPS5846648A Cited
JPS59165434A Cited
JPS59186343A Cited
US4635344A Cited
JPH0621541A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1992-11-27 1993-05-29 1993-11-28 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1996-11-27 1997-05-29 1997-11-28 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2000-11-27 2001-05-29 2001-11-28 $7700.00 Window Closed / Lapsed

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