Patent US4882206A successfully refreshed from Google Patents.
US4882206A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Chemical vapor deposition of group IIIB metals
Assignee: Georgia Tech Research Corp
•
Filing: 1988-06-22
•
Granted: 1989-11-21
•
Expires: 2008-06-22
Abstract
Abstract Coatings of Group IIIB metals and compounds thereof are formed by chemical vapor deposition, in which a heat decomposable organometallic compound of the formula (I) ##STR1## where M is a Group IIIB metal, such as lanthanum or yttrium and R is a lower alkyl or alkenyl radical containing from 2 to about 6 carbon atoms, with a heated substrate which is above the decomposition temperature of the organometallic compound. The pure metal is obtained when the compound of the formula I is the sole heat decomposable compound present and deposition is carried out under nonoxidizing conditions. Intermetallic compounds such as lanthanum telluride can be deposited from a lanthanum compound of formula I and a heat decomposable tellurium compound under nonoxidizing conditions.
Inventors
- 👤 Ahmet Erbil
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:04
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/009; C04B41/45; C04B41/4505; C04B41/455; C04B41/4554; C04B41/80; C04B41/81; C23; C23C; C23C16/00; C23C16/06; C23C16/18
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
76 words
A process for depositing a metallic coating on a heated substrate by chemical vapor decomposition of an organometallic compound, said process comprising contacting an organometallic compound of the formula (I) ##STR3## where M is a Group IIIB metal or a mixture thereof and R is an alkyl or alkenyl radical containing from 2 to about 6 carbon atoms, with said heated substrate, said substrate being at a temperature above the decomposition temperature of said organometallic compound.
Claim 2
Dependent Claim
76 words
A process for depositing a metallic coating on a heated substrate by chemical vapor decomposition of an organometallic compound, said process comprising contacting an organometallic compound of the formula (I) ##STR3## where M is a Group IIIB metal or a mixture thereof and R is an alkyl or alkenyl radical containing from 2 to about 6 carbon atoms, with said heated substrate, said substrate being at a temperature above the decomposition temperature of said organometallic compound.
Claim 3
Dependent Claim
13 words
A process according to claim 1 in which M is lanthanum or yttrium.
Claim 4
Dependent Claim
17 words
A process according to claim 1 in which R contains from 2 to about 4 carbon atoms.
Claim 5
Dependent Claim
13 words
A process according to claim 1 in which R is an alkyl radical.
Claim 6
Dependent Claim
11 words
A process according to claim 1 in which R is isopropyl.
Claim 7
Dependent Claim
19 words
A process according to claim 1 in which said organometallic compound is supplied in a stream of carrier gas.
Claim 8
Dependent Claim
24 words
A process according to claim 6 in which said carrier gas is a non-oxidizing carrier gas and said substrate is in a non-oxidizing atmosphere.
Claim 9
Dependent Claim
21 words
A process according to claim 1 in which the temperature of said substrate is from about 150 to about 1000° C.
Claim 10
Dependent Claim
15 words
A process in which said coating has a thickness not greater than about 100 microns.
Claim 11
Dependent Claim
15 words
A process in which said coating has a thickness not greater than about 100 microns.
Claim 12
Dependent Claim
28 words
A process according to claim 1 which further comprises contacting said substrate with an oxidizing agent, and where the metallic coating of said process comprises a metal compound.
Claim 13
Dependent Claim
19 words
A process according to claim 1 in which said metallic coating comprises at least two metals or metal compounds.
Claim 14
Dependent Claim
14 words
A process according to claim 1 in which said coating comprises an intermetallic compound.
Claim 15
Dependent Claim
14 words
A process according to claim 12 in which said intermetallic compound is lanthanum telluride.
Claim 16
Dependent Claim
15 words
A process according to claim 11 further comprising contacting said substrate with an oxidizing agent.
References Cited (Backward Citations)
US3018194A
Cited
US3253946A
Cited
US3071493A
Cited
US3856582A
Cited
US3856581A
Cited
US3856580A
Cited
US4510182A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-11-20 | 1993-05-22 | 1993-11-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-11-20 | 1997-05-22 | 1997-11-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-11-20 | 2001-05-22 | 2001-11-21 | $7700.00 | Window Closed / Lapsed |