US4882206A
Expired / Lapsed
US
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Chemical vapor deposition of group IIIB metals
Assignee: Georgia Tech Research Corp
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Filing: 1988-06-22
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Granted: 1989-11-21
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Expires: 2008-06-22
Abstract
Abstract Coatings of Group IIIB metals and compounds thereof are formed by chemical vapor deposition, in which a heat decomposable organometallic compound of the formula (I) ##STR1## where M is a Group IIIB metal, such as lanthanum or yttrium and R is a lower alkyl or alkenyl radical containing from 2 to about 6 carbon atoms, with a heated substrate which is above the decomposition temperature of the organometallic compound. The pure metal is obtained when the compound of the formula I is the sole heat decomposable compound present and deposition is carried out under nonoxidizing conditions. Intermetallic compounds such as lanthanum telluride can be deposited from a lanthanum compound of formula I and a heat decomposable tellurium compound under nonoxidizing conditions.
Inventors
- 👤 Ahmet Erbil
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:37
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/009; C04B41/45; C04B41/4505; C04B41/455; C04B41/4554; C04B41/80; C04B41/81; C23; C23C; C23C16/00; C23C16/06; C23C16/18
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
76 words
A process for depositing a metallic coating on a heated substrate by chemical vapor decomposition of an organometallic compound, said process comprising contacting an organometallic compound of the formula (I) ##STR3## where M is a Group IIIB metal or a mixture thereof and R is an alkyl or alkenyl radical containing from 2 to about 6 carbon atoms, with said heated substrate, said substrate being at a temperature above the decomposition temperature of said organometallic compound.
Claim 2
Dependent Claim
76 words
A process for depositing a metallic coating on a heated substrate by chemical vapor decomposition of an organometallic compound, said process comprising contacting an organometallic compound of the formula (I) ##STR3## where M is a Group IIIB metal or a mixture thereof and R is an alkyl or alkenyl radical containing from 2 to about 6 carbon atoms, with said heated substrate, said substrate being at a temperature above the decomposition temperature of said organometallic compound.
Claim 3
Dependent Claim
13 words
A process according to claim 1 in which M is lanthanum or yttrium.
Claim 4
Dependent Claim
17 words
A process according to claim 1 in which R contains from 2 to about 4 carbon atoms.
Claim 5
Dependent Claim
13 words
A process according to claim 1 in which R is an alkyl radical.
Claim 6
Dependent Claim
11 words
A process according to claim 1 in which R is isopropyl.
Claim 7
Dependent Claim
19 words
A process according to claim 1 in which said organometallic compound is supplied in a stream of carrier gas.
Claim 8
Dependent Claim
24 words
A process according to claim 6 in which said carrier gas is a non-oxidizing carrier gas and said substrate is in a non-oxidizing atmosphere.
Claim 9
Dependent Claim
21 words
A process according to claim 1 in which the temperature of said substrate is from about 150 to about 1000° C.
Claim 10
Dependent Claim
15 words
A process in which said coating has a thickness not greater than about 100 microns.
Claim 11
Dependent Claim
15 words
A process in which said coating has a thickness not greater than about 100 microns.
Claim 12
Dependent Claim
28 words
A process according to claim 1 which further comprises contacting said substrate with an oxidizing agent, and where the metallic coating of said process comprises a metal compound.
Claim 13
Dependent Claim
19 words
A process according to claim 1 in which said metallic coating comprises at least two metals or metal compounds.
Claim 14
Dependent Claim
14 words
A process according to claim 1 in which said coating comprises an intermetallic compound.
Claim 15
Dependent Claim
14 words
A process according to claim 12 in which said intermetallic compound is lanthanum telluride.
Claim 16
Dependent Claim
15 words
A process according to claim 11 further comprising contacting said substrate with an oxidizing agent.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-11-20 | 1993-05-22 | 1993-11-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-11-20 | 1997-05-22 | 1997-11-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-11-20 | 2001-05-22 | 2001-11-21 | $7700.00 | Window Closed / Lapsed |