Patent US4875825A successfully refreshed from Google Patents.
US4875825A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for automated cassette handling
Assignee: Avago Technologies International Sales Pte Ltd
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Filing: 1987-11-10
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Granted: 1989-10-24
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Expires: 2007-11-10
Abstract
Abstract An automated cassette handler is disclosed for transporting a cassette containing integrated circuit wafers between first and second elevators in a standardized mechanical interface (SMIF) system for integrated circuit processing. The handler is adapted to grip and transport the cassette while positively pushing the wafers into the cassette.
Inventors
- 👤 Barclay J. Tullis
- 👤 John S. Bailey
- 👤 D. R. Gunawardena
- 👤 Ulrich Kaempf
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 12:38
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/34; H10P72/3406; H10P72/3408; H10P72/70; H10P72/76; H10P72/7602; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/139; Y10S414/14
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
195 words
A method for automatically transporting integrated circuit wafers held in a wafer cassette within a canopy, said canopy coupled to a piece of integrated circuit processing equipment, said method comprising the steps of: (a) placing the cassette on an interface port handle of an interface port of the canopy; (b) actuating a switch coupled to a controller; (c) lowering the casette on the interface port handle into the canopy; (d) positioning a cassette handler into conjunction with the cassette; (e) gripping the cassette with a gripper coupled to the cassette handler; (f) swinging a wafer depressor partially moounted on an upper portion of and cantilevered from the cassette handler to push and retain wafers within the cassette; (g) swinging the cassette handler in a substantially constant plane with respect to the canopy to transport the cassette from the interface port handler to a processing equipment cassette handler without significantly changing the planar orientation of the cassette with respect to the canopy; (h) swinging the wafer depressor to release the wafers within the cassette; and (i) ungripping the cassette, wherein the steps (c) through (i) are performed under the control of a controller without operator intervention.
Claim 2
Independent Claim
195 words
A method for automatically transporting integrated circuit wafers held in a wafer cassette within a canopy, said canopy coupled to a piece of integrated circuit processing equipment, said method comprising the steps of: (a) placing the cassette on an interface port handle of an interface port of the canopy; (b) actuating a switch coupled to a controller; (c) lowering the casette on the interface port handle into the canopy; (d) positioning a cassette handler into conjunction with the cassette; (e) gripping the cassette with a gripper coupled to the cassette handler; (f) swinging a wafer depressor partially moounted on an upper portion of and cantilevered from the cassette handler to push and retain wafers within the cassette; (g) swinging the cassette handler in a substantially constant plane with respect to the canopy to transport the cassette from the interface port handler to a processing equipment cassette handler without significantly changing the planar orientation of the cassette with respect to the canopy; (h) swinging the wafer depressor to release the wafers within the cassette; and (i) ungripping the cassette, wherein the steps (c) through (i) are performed under the control of a controller without operator intervention.
Claim 3
Dependent Claim
100 words
A method as in claim 1 further comprising the steps of: (j) sensing the presence of the cassette in conjunction with the cassette handler between steps (d) and (e); (k) sensing the gripping of the cassette with the gripper during step (e); (l) sensing the pushing of the wafers into the cassette during step (f); (m) sensing the transport of the cassette to the processing equipment handler between steps (g) and (h); (n) sensing the release of the wafers in the cassette by the wafer depressor during step (h); and (o) sensing the ungripping of the cassette after step (i).
Claim 4
Dependent Claim
15 words
The method as in claim 1 further comprising the steps of: (p) actuating the switch;
Claim 5
Dependent Claim
117 words
(q) gripping the cassette; (r) swinging the wafer depressor to push and retain the wafers within the cassette; (s) swinging the cassette handler in a substantially constant plane with respect to the canopy to transport the cassette from the processing equipment handler to the interface port handler without significantly changing the planar orientation of the cassette with respect to the canopy; (t) swinging the wafer depressor to release the wafers within the cassette; (u) ungripping the cassette; (v) swinging the cassette handler away from the cassette; and (w) raising the cassette out of the canopy on the interface port handler, wherein the steps (q) through (w) are performed under the control of a controller without operator intervention.
Claim 6
Dependent Claim
117 words
(q) gripping the cassette; (r) swinging the wafer depressor to push and retain the wafers within the cassette; (s) swinging the cassette handler in a substantially constant plane with respect to the canopy to transport the cassette from the processing equipment handler to the interface port handler without significantly changing the planar orientation of the cassette with respect to the canopy; (t) swinging the wafer depressor to release the wafers within the cassette; (u) ungripping the cassette; (v) swinging the cassette handler away from the cassette; and (w) raising the cassette out of the canopy on the interface port handler, wherein the steps (q) through (w) are performed under the control of a controller without operator intervention.
Claim 7
Dependent Claim
94 words
A method as in claim 3 further comprising the steps of: (x) sensing the gripping of the cassette during step (q); (y) sensing the pushing of the wafers into the cassette during step (r); (z) sensing the transport of the cassette to the interface port handler between steps (s) and (t); (aa) sensing the release of the wafers in the cassette by the wafer depressor during step (t); (bb) sensing the ungripping of the cassette during step (u); and (cc) sensing the swinging of the cassette handler away from the cassette during step (v).
Claim 8
Independent Claim
55 words
A method for automatically transporting integrated circuit wafers held in a wafer cassette within a canopy, said canopy coupled to a piece of intetrated circuit processing equipment, said method comprising the steps of: (a) positioning a cassette handler in conjunction with the cassette; (b) gripping the cassette with a gripper coupled to the cassette handler;
Claim 9
Independent Claim
55 words
A method for automatically transporting integrated circuit wafers held in a wafer cassette within a canopy, said canopy coupled to a piece of intetrated circuit processing equipment, said method comprising the steps of: (a) positioning a cassette handler in conjunction with the cassette; (b) gripping the cassette with a gripper coupled to the cassette handler;
Claim 10
Dependent Claim
85 words
(c) swinging a wafer depressor partially mounted on an upper portion of and cantilevered from the cassette handler to push and retain wafers within the cassette; and (d) swinging the cassette handler in a substantially constant plane with respect to the canopy to transport the cassette to the piece of integrated circuit processing equipment without significantly changing the planar orientation of the cassette with respect to the canopy; wherein the steps (a) through (d) are performed under the control of a controller wihtout operator intervention.
Claim 11
Dependent Claim
85 words
(c) swinging a wafer depressor partially mounted on an upper portion of and cantilevered from the cassette handler to push and retain wafers within the cassette; and (d) swinging the cassette handler in a substantially constant plane with respect to the canopy to transport the cassette to the piece of integrated circuit processing equipment without significantly changing the planar orientation of the cassette with respect to the canopy; wherein the steps (a) through (d) are performed under the control of a controller wihtout operator intervention.
Claim 12
Dependent Claim
60 words
A method as in claim 5 further comprising the steps of: (e) ungripping the cassette, (f) sensing the presence of the cassette in conjunction with the cassette handler between steps (a) and (e); (g) sensing the gripping of the cassette with the gripper during step (b); and, (h) sensing the pushing of the wafers into the cassette during step (c).
References Cited (Backward Citations)
GB710309A
Cited
US3651957A
Cited
US4047624A
Cited
DE2702974A1
Cited
US4343584A
Cited
FR2512425A1
Cited
US4668484A
Cited
US4674939A
Cited
US4815912A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-10-23 | 1993-04-24 | 1993-10-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-10-23 | 1997-04-24 | 1997-10-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-10-23 | 2001-04-24 | 2001-10-24 | $7700.00 | Window Closed / Lapsed |