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Non-enhanced laser evaporation of oxide superconductors

Assignee: Research Foundation of the State University of New York
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Filing: 1988-04-14
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Granted: 1989-10-17
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Expires: 2008-04-14
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Abstract

Abstract The present invention relates to a method of directly forming a thin, orientated layer, or film, of superconducting materials, suitably mixtures of Pervoskite-type superconducting oxides, on a support base, or substrate, by depositing the layer, or film, in an ionized oxygen atmosphere using a laser beam means. The present process is carried out at temperatures sufficiently high that the film adheres to the substrate, but sufficiently low that a superconducting layer is directly deposited the substrate. Preferably the process is carried out at a temperature less than about 450 degrees C. Temperatures as low as 400 degrees C. have been found useful.

Inventors

  • 👤 David T. Shaw
  • 👤 Sarath Witanachchi
  • 👤 Hoi-Sing Kwok

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-27 20:46
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0521; C; C23; C23C; C23C14/00; C23C14/06; C23C14/08; C23C14/087

Claims Analysis

Total Claims: 10
Claim 1
Independent Claim 65 words
A method of depositing a superconducting layer on a substrate which comprises the steps of: a. forming at least one mixture of a source material for an oxide superconducting layer, b. evaporating said source material by a laser beam means, and c. depositing said source material on a substrate under an ionized oxygen atmosphere to directly form an orientated, thin superconducting layer on said substrate.
Claim 2
Independent Claim 65 words
A method of depositing a superconducting layer on a substrate which comprises the steps of: a. forming at least one mixture of a source material for an oxide superconducting layer, b. evaporating said source material by a laser beam means, and c. depositing said source material on a substrate under an ionized oxygen atmosphere to directly form an orientated, thin superconducting layer on said substrate.
Claim 3
Dependent Claim 17 words
The method of claim 1 where in the source material is a source material for Perovskite-type oxides.
Claim 4
Dependent Claim 14 words
The method of claim 1 wherein the superconducting layer is comprised of Perovskite-type oxides.
Claim 5
Dependent Claim 17 words
The method of claim 2 wherein the said source material is a source for cuprate Perovskite-type oxides.
Claim 6
Dependent Claim 14 words
The method of claim 3 wherein the said Perovskite-type oxides are cuprate Perovskite-type oxides.
Claim 7
Dependent Claim 16 words
The method of claim 1 wherein the deposition temperature is less than about 450 degrees C.
Claim 8
Dependent Claim 22 words
The method of claim 1 wherein the ionized oxygen is obtained by the passage of an electrical discharge through an oxygen atmosphere.
Claim 9
Dependent Claim 17 words
The method of claim 7 wherein the electrical discharge ranges between about 150 and about 600 volts.
Claim 10
Dependent Claim 17 words
The method of claim 1 wherein the oxygen atmosphere ranges between about 0.1 and about 2.0 milliTorr.

References Cited (Backward Citations)

No citation records indexed.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1992-10-16 1993-04-17 1993-10-17 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1996-10-16 1997-04-17 1997-10-17 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2000-10-16 2001-04-17 2001-10-17 $7700.00 Window Closed / Lapsed

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