US4873413A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for writing a line on a patterned substrate
Assignee: NEC Corp
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Filing: 1987-11-20
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Granted: 1989-10-10
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Expires: 2007-11-20
Abstract
Abstract Method and apparatus for writing a line on a patterned substrate in which a direct writing of a CVD line is performed on at least two of patterned films on a substrate in accordance with the thermal decomposition of a CVD raw material gas which is resulted from the radiation of a laser beam. The laser beam is controlled in its power dependent on the difference between thermal conductivities of the at least two of patterned films to avoid a disconnection of the CVD line, the occurrence of thinner portion thereof and so on.
Inventors
- 👤 Fumihiko Uesugi
- 👤 Yukio Morishige
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 18:00
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/067; H10W20/068; H10P; H10P14/00; H10P14/40; H10P14/412; H10P34/00; H10P34/40; H10P34/42; H10W20/056; H10W20/057
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
203 words
An apparatus for writing a line on a patterned substrate comprising, a laser beam source for radiating a laser beam, a CVD cell in which a substrate is positioned, said CVD cell having a window for passing said laser beam, said substrate having at least two kinds of patterned films thereon, each being of a thermal conductivity different from others, an optical focusing means for focusing said laser beam to form a beam spot on the surface of said substrate, a gas supply means for supplying a CVD raw material gas into said CVD cell, an optical power control means selected from a pulse modulator, and intensity modulator, a wavelength converter, a beam shape converter, and a scanning speed controller, said optical power control means controlling optical power consumed in a laser beam spot-radiating area of said substrate dependent on the thermal conductivity of said laser beam spot-radiating area, thereby increasing the temperature of said laser beam spot-radiating area to a predetermined temperature regardless of the difference of said thermal conductivity, and a stage means on which said CVD cell is provided to be moved in the scanning direction so that said substrate in said CVD cell is scanned by said beam spot.
Claim 2
Independent Claim
203 words
An apparatus for writing a line on a patterned substrate comprising, a laser beam source for radiating a laser beam, a CVD cell in which a substrate is positioned, said CVD cell having a window for passing said laser beam, said substrate having at least two kinds of patterned films thereon, each being of a thermal conductivity different from others, an optical focusing means for focusing said laser beam to form a beam spot on the surface of said substrate, a gas supply means for supplying a CVD raw material gas into said CVD cell, an optical power control means selected from a pulse modulator, and intensity modulator, a wavelength converter, a beam shape converter, and a scanning speed controller, said optical power control means controlling optical power consumed in a laser beam spot-radiating area of said substrate dependent on the thermal conductivity of said laser beam spot-radiating area, thereby increasing the temperature of said laser beam spot-radiating area to a predetermined temperature regardless of the difference of said thermal conductivity, and a stage means on which said CVD cell is provided to be moved in the scanning direction so that said substrate in said CVD cell is scanned by said beam spot.
Claim 3
Dependent Claim
69 words
An apparatus for writing a line on a patterned substrate according to claim 1, wherein said laser beam source includes a pulse laser beam source and a continuous wave laser beam source, said pulse laser beam source being selected to write a line on a via hole of said substrate, said continuous wave laser beam source being selected to write a line on a insulation film of said substrate
Claim 4
Dependent Claim
30 words
An apparatus for writing a line on a patterned substrate according to claim 1, wherein said stage means is provided on a rotary stage whereby said stage means is rotated.
Claim 5
Dependent Claim
44 words
An apparatus for writing a line on patterned substrate according to claim 2, wherein said beam shape converter is provided above a rotary stage whereby said beam shape converter is rotated, said rotary stage being able to be separated from said beam shape converter.
Claim 6
Dependent Claim
34 words
An apparatus for writing a line on a patterned substrate according to claim 1, wherein said beam shape converter is rotated, said rotary stage being able to be separated from sid beam shape converter.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-10-09 | 1993-04-10 | 1993-10-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-10-09 | 1997-04-10 | 1997-10-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-10-09 | 2001-04-10 | 2001-10-10 | $7700.00 | Window Closed / Lapsed |