US4872356A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Resistivity probe fixture
Assignee: Micron Technology Inc
•
Filing: 1988-12-27
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Granted: 1989-10-10
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Expires: 2008-12-27
Abstract
Abstract Apparatus to enclose a resistivity probe, to be used with a semiconductor wafer washer. Said apparatus is detachable and easy to maintain; is made of readily available and inexpensive plumbing parts; substantially encloses said probe, reducing contamination; allows nitrogen purge of said probe, keeping it clean; fully submerges said probe in discharge fluid, improving measurement accuracy; and is compact enough to allow washers to be triple stacked.
Inventors
- 👤 Jay D. Barnett
- 👤 Bryan J. Ludwig
- 👤 Ernest E. Marks
- 👤 Scott E. Moore
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 16:05
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/06; H10P72/0604; G; G01; G01R; G01R1/00; G01R1/02; G01R1/04; H10P72/04; H10P72/0402; H10P72/0406; H10P72/0411; H10P72/0414; Y; Y10; Y10S; Y10S134/00; Y10S134/902
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
109 words
Resistivity probe mounting apparatus for use with a wafer washing machine having fluid discharge means, said apparatus comprising: (a) a fitting, having a probe submersion chamber, having an inlet in fluid communication with the fluid discharge means, and having a primary outlet, the chamber lower than said inlet and outlet so that it will retain discharge fluid; (b) means for positioning a probe within said chamber so that the chamber when full will submerge said probe; and (c) said chamber having a secondary outlet at its bottom, said secondary outlet being restricted so that during a typical discharge the chamber will be filled, yet will drain empty after discharge.
Claim 2
Dependent Claim
109 words
Resistivity probe mounting apparatus for use with a wafer washing machine having fluid discharge means, said apparatus comprising: (a) a fitting, having a probe submersion chamber, having an inlet in fluid communication with the fluid discharge means, and having a primary outlet, the chamber lower than said inlet and outlet so that it will retain discharge fluid; (b) means for positioning a probe within said chamber so that the chamber when full will submerge said probe; and (c) said chamber having a secondary outlet at its bottom, said secondary outlet being restricted so that during a typical discharge the chamber will be filled, yet will drain empty after discharge.
Claim 3
Dependent Claim
21 words
Apparatus of claim 1, wherein the fitting is easily detachable from the fluid discharge means, and the chamber is substantially enclosed.
Claim 4
Dependent Claim
41 words
Apparatus of claim 2, wherein the apparatus is a junction fitting, having a first stub as the inlet, a second stub as the primary outlet, and a third stub defining the chamber, the third stub being lower than the other stubs.
Claim 5
Dependent Claim
9 words
Apparatus of claim 3, wherein the fitting is nonreactive.
Claim 6
Dependent Claim
15 words
Apparatus of claim 2, further comprising: a breather opening at the chamber top, for venting.
Claim 7
Dependent Claim
48 words
Apparatus of claim 5, wherein the apparatus is a junction fitting, having a first stub as the inlet, a second stub as the primary outlet, a third stub defining the chamber, and a fourth stub as the breather opening, the third stub being lower than the other stubs.
Claim 8
Dependent Claim
10 words
Apparatus of claim 6, wherein the fitting is a X-fitting.
Claim 9
Dependent Claim
9 words
Apparatus of claim 7, wherein the fitting is nonreactive.
Claim 10
Dependent Claim
9 words
Apparatus of claim 1, wherein the fitting is nonreactive.
References Cited (Backward Citations)
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US4778532A
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US4795497A
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US4806912A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-10-09 | 1993-04-10 | 1993-10-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-10-09 | 1997-04-10 | 1997-10-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-10-09 | 2001-04-10 | 2001-10-10 | $7700.00 | Window Closed / Lapsed |