US4870032A
Expired / Lapsed
US
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Method of fabricating single crystal films of cubic group II fluorides on semiconductor componds by molecular beam epitaxy
Assignee: Nokia Bell Labs
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Filing: 1987-03-24
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Granted: 1989-09-26
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Expires: 2007-03-24
Abstract
Abstract Certain semiconductor device structures are described in which single crystal layers of cubic Group II fluorides cover at least part of the surface of III-V semiconductor compound. The Fluoride crystal has a cubic structure and may be lattice matched or lattice mismatched to the compound semiconductor substrate depending on fluoride composition. These fluoride single crystal layers are put down by a molecular beam epitaxy procedure using certain critical substrate temperature ranges and a particular cleaning procedure.
Inventors
- 👤 Wilbur D. Johnston, Jr.
- 👤 Charles W. Tu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 20:50
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6938; H10P14/6939; H10P14/69397; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6332; H10P14/65; H10P14/6502; H10P14/6504; Y; Y10; Y10S; Y10S148/00; Y10S148/043; Y10S148/081; Y10S148/169
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
234 words
A process for fabricating a semiconductor device comprising Group III-V semiconductor with at least part of the surface of the Group III-V semiconductor being covered with cubic Group II fluoride selected from the group consisting of Ca x Sr 1-x F 2 where x and y vary from 0 to 1 comprising the steps of: (a) introducing the Group III-V semiconductor into a vacuum chamber and reducing the background pressure to a subatmospheric pressure, (b) exposing the Group III-V semiconductor surface to a molecular beam cleaning procedure, (c) directing at least one molecular beam of the cubic Group II fluoride upon the semiconductor surface at a certain rate while maintaining the semiconductor surface at a certain growth temperature range characterized in that (d) the molecular beam cleaning procedure is carried out in the temperature range from 400 to 700 degrees C. and a molecular beam of the Group V element is maintained on the surface of the semiconductor material so as to maintain the stoichiometry of the surface while removing any impurity layers on the semiconductor material surface, and (e) the growth temperature range is the temperature range 150 degrees C below the decomposition temperature of the III-V semiconductor and the growth rate is at least 250 Angstroms per hour so as to grow a substantially single crystal, twin-free layer of cubic Group II Fluoride on part of the surface of the III-V semiconductor.
Claim 2
Dependent Claim
234 words
A process for fabricating a semiconductor device comprising Group III-V semiconductor with at least part of the surface of the Group III-V semiconductor being covered with cubic Group II fluoride selected from the group consisting of Ca x Sr 1-x F 2 where x and y vary from 0 to 1 comprising the steps of: (a) introducing the Group III-V semiconductor into a vacuum chamber and reducing the background pressure to a subatmospheric pressure, (b) exposing the Group III-V semiconductor surface to a molecular beam cleaning procedure, (c) directing at least one molecular beam of the cubic Group II fluoride upon the semiconductor surface at a certain rate while maintaining the semiconductor surface at a certain growth temperature range characterized in that (d) the molecular beam cleaning procedure is carried out in the temperature range from 400 to 700 degrees C. and a molecular beam of the Group V element is maintained on the surface of the semiconductor material so as to maintain the stoichiometry of the surface while removing any impurity layers on the semiconductor material surface, and (e) the growth temperature range is the temperature range 150 degrees C below the decomposition temperature of the III-V semiconductor and the growth rate is at least 250 Angstroms per hour so as to grow a substantially single crystal, twin-free layer of cubic Group II Fluoride on part of the surface of the III-V semiconductor.
Claim 3
Dependent Claim
27 words
The process of claim 1 in which immediately before step (a), the Group III-V semiconductor surface is cleaned by polishing said surface with a chemical polishing solution.
Claim 4
Dependent Claim
16 words
The process of claim 2 in which the chemical polishing solution is bromine dissolved in methanol.
Claim 5
Dependent Claim
22 words
The process of claim 1 in which the Group III-V semiconductor is InP or a Group III-V semiconductor lattice matched to InP.
Claim 6
Dependent Claim
13 words
The process of claim 4 in which the Group III-V semiconductor is InP.
Claim 7
Dependent Claim
30 words
The process of claim 4 in which the molecular beam cleaning procedure is carried out with a semiconductor surface temperature of approximately 500±50 degrees C. under a phosphorus molecular beam.
Claim 8
Dependent Claim
13 words
The process of claim 6 in which the phosphorus beam originates from InP.
Claim 9
Dependent Claim
17 words
The process of claim 6 in which the pressure is between 10 -5 and 10 -6 Torr.
Claim 10
Dependent Claim
18 words
The process of claim 4 in which the growth temperature range is between 250 and 350 degrees C.
Claim 11
Dependent Claim
17 words
The process of claim 9 in which the growth temperature is between 300 and 350 degrees C.
Claim 12
Dependent Claim
33 words
The process of claim 4 in which the cubic Group II fluoride is calcium fluoride and the growth temperature is 350±10 degrees C. and the growth rate is approximately 600 Angstrom per hour.
Claim 13
Dependent Claim
37 words
The process of claim 4 in which the cubic Group II fluoride is Ba x Sr 1-x F 2 and x is adjusted so that the Ba x Sr 1-x F 2 is lattice matched to InP.
Claim 14
Dependent Claim
19 words
The process of claim 12 in which the semiconductor is rotated to remove variations in composition and lattice parameter.
Claim 15
Dependent Claim
22 words
The process of claim 1 in which the Group III-V semiconductor is GaAs or a Group III-V semiconductor lattice matched to GaAs.
Claim 16
Dependent Claim
14 words
The process of claim 14 in which the Group III-V semiconductor is n-type GaAs.
Claim 17
Dependent Claim
30 words
The process of claim 14 in which the molecular beam cleaning procedure is carried out with a semiconductor surface temperature of approximately 600±50 degrees C. under an arsenic molecular beam.
Claim 18
Dependent Claim
15 words
The process of claim 16 in which the arsenic beam originates from the element arsenic.
Claim 19
Dependent Claim
17 words
The process of claim 16 in which the pressure is between 10 -5 and 10 -6 Torr.
Claim 20
Dependent Claim
18 words
The process of claim 14 in which the growth temperature range is between 300 and 650 degrees C.
Claim 21
Dependent Claim
37 words
The process of claim 14 in which the cubic Group II fluoride is Ca x Sr 1-x F 2 and x is adjusted so that the Ba x Sr 1-x F 2 is lattice matched to GaAs.
References Cited (Backward Citations)
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1992-09-25 | 1993-03-27 | 1993-09-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-09-25 | 1997-03-27 | 1997-09-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-09-25 | 2001-03-27 | 2001-09-26 | $7700.00 | Window Closed / Lapsed |