US4867757A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Lapping slurry compositions with improved lap rate
Assignee: DuPont Electronic Materials Holding Inc
•
Filing: 1988-09-09
•
Granted: 1989-09-19
•
Expires: 2008-09-09
Abstract
Abstract A concentrated lapping composition having the following makeup: -Ingredient % by Weight -Finely divided inorganic 5-70 -abrasive -Carboxylic acid dispersant 0.1-1 -polymer having a molecular -weight of from 500-50,000 -Lubricant 0.5-29 - said lapping composition having its pH adjusted to greater than 8.5 in order to afford an improved lapping rate.
Inventors
- 👤 Charles C. Payne
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 13:45
CPC Classifications
H; H10; H10P; H10P90/00; H10P90/12; H10P90/123; B; B24; B24D; B24D3/00; B24D3/34; B24D3/346; C; C09; C09K; C09K3/00; C09K3/14; C09K3/1454; C09K3/1463
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
55 words
A concentrated lapping composition having the following makeup: ______________________________________
Ingredient % by Weight
______________________________________
Finely divided inorganic
5-70
abrasive
Carboxylic acid dispersant
0.1-1
polymer having a molecular
weight of from 500-50,000
Lubricant 0.5-29
______________________________________
said lapping composition having its pH adjusted to a pH greater than 8.5
in order to afford a greater lapping rate.
Claim 2
Dependent Claim
55 words
A concentrated lapping composition having the following makeup: ______________________________________
Ingredient % by Weight
______________________________________
Finely divided inorganic
5-70
abrasive
Carboxylic acid dispersant
0.1-1
polymer having a molecular
weight of from 500-50,000
Lubricant 0.5-29
______________________________________
said lapping composition having its pH adjusted to a pH greater than 8.5
in order to afford a greater lapping rate.
Claim 3
Dependent Claim
50 words
A concentrated lapping composition having the following makeup: ______________________________________
Ingredient % by Weight
______________________________________
Finely divided inorganic
5-70
abrasive
Carboxylic acid dispersant
0.1-1
polymer having a molecular
weight of from 500-50,000
Lubricant-Cross-linked carboxylic
0.5-5
acid gel polymer thickener
______________________________________ said lapping composition having its pH adjusted to at least 9.5.
Claim 4
Dependent Claim
50 words
A concentrated lapping composition having the following makeup: ______________________________________
Ingredient % by Weight
______________________________________
Finely divided inorganic
5-70
abrasive
Carboxylic acid dispersant
0.1-1
polymer having a molecular
weight of from 500-50,000
Lubricant-Cross-linked carboxylic
0.5-5
acid gel polymer thickener
______________________________________ said lapping composition having its pH adjusted to at least 9.5.
Claim 5
Dependent Claim
24 words
A method of lapping a silicon surface with the composition of claim 1 which has been diluted with water to about 10% abrasive solids.
Claim 6
Dependent Claim
15 words
The method of claim 3 where the surface is silicon and the abrasive is alumina.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-09-18 | 1993-03-20 | 1993-09-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-09-18 | 1997-03-20 | 1997-09-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-09-18 | 2001-03-20 | 2001-09-19 | $7700.00 | Window Closed / Lapsed |