Abstract A lap cutting abrasive for use with lap cutting blades, comprising one party weight of a low viscosity carrier liquid, and one to three parts by weight of cutting particles having an average size of from 10 to 50 μm suspended in the carrier liquid. The carrier liquid has a viscosity of from 1 to 10 cP, and preferably is aqueous glycerin. The cutting particles preferably have an average particle size of from 15 to 30 μm. In a further embodiment, the average particle size of the cutting particles is matched to the thickness of the lap cutting blade used during sawing. Preferably, the cutting particles have an average particle size corresponding to 0.15 to 0.1 times the thickness of the lap cutting blade used during sawing.
A lap cutting abrasive for use with lap cutting blades to saw semiconductor workpieces, consisting essentially of: one part by weight of a low viscosity carrier liquid having a viscosity of approximately 1 to 10 cP; and one to three parts by weight of cutting particles having an average size of from 10 to 50 μm suspended in said carrier liquid.
Claim 2
Dependent Claim
61 words
A lap cutting abrasive for use with lap cutting blades to saw semiconductor workpieces, consisting essentially of: one part by weight of a low viscosity carrier liquid having a viscosity of approximately 1 to 10 cP; and one to three parts by weight of cutting particles having an average size of from 10 to 50 μm suspended in said carrier liquid.
Claim 3
Dependent Claim
21 words
The lap cutting abrasive according to claim 1, wherein said carrier liquid has a viscosity of from 1 to 5 cP.
Claim 4
Dependent Claim
15 words
The lap cutting abrasive according to claim 2, wherein said carrier liquid comprises aqueous glycerin.
Claim 5
Dependent Claim
23 words
The lap cutting abrasive according to claim 1, wherein said cutting particles have an average particle size of from 15 to 30 μm.
Claim 6
Dependent Claim
29 words
The lap cutting abrasive according to claim 1, wherein the average particle size of the cutting particles correspond to the thickness of the lap cutting blade used during sawing.
Claim 7
Dependent Claim
33 words
The lap cutting abrasive according to claim 5, wherein the cutting particles have an average particle size corresponding to 0.15 to 0.1 times the thickness of the lap cutting blade used during sawing.