US4865686A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Laser scribing method
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1988-05-03
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Granted: 1989-09-12
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Expires: 2008-05-03
Abstract
Abstract A laser scribing system and method is described. In the system, a film formed on a substrate is irradiated with laser beam which is focused on a limited portion of the film in order to remove the portion and produce a groove. Laser beam used for eliminating the portion of film formed on a substrate is deprived of its border portion in advance of the focusing. Sperical aberration is suppressed due to this elimination.
Inventors
- 👤 Hisato Sinohara
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 03:58
CPC Classifications
H; H01; H01S; H01S3/00; H01S3/10; B; B23; B23K; B23K26/00; B23K26/36; B23K26/362; B23K26/364; B23K26/02; B23K26/06; B23K26/064; B23K26/066; B23K26/073; B23K26/0738; B23K26/40; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0661; H10N60/0688; H10P; H10P34/00; H10P34/40; H10P34/42; B23K2103/00; B23K2103/16; B23K2103/166; B23K2103/172; H05; H05K; H05K1/00; H05K1/02; H05K1/03; H05K1/0306; H05K3/00; H05K3/02; H05K3/027; H05K3/38
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
47 words
A method for scribing a film formed on a substrate comprising: expanding a laser beam from an eximer laser; eliminating a border portion from the expanded laser beam; focusing the laser beam shaped by the elimination on said substrate and removing the irradiated portion of said film.
Claim 2
Independent Claim
47 words
A method for scribing a film formed on a substrate comprising: expanding a laser beam from an eximer laser; eliminating a border portion from the expanded laser beam; focusing the laser beam shaped by the elimination on said substrate and removing the irradiated portion of said film.
Claim 3
Dependent Claim
22 words
The method of claim 1 wherein said exmer laser emitted from said eximer laser has less than 400 namo meters in wavelength.
Claim 4
Dependent Claim
28 words
The method of claim 2 wherein said film is severed into a plurality of separeted parts by grooves which are formed by removing corresponding portions of said film.
Claim 5
Dependent Claim
16 words
The method of claim 2 wherein the expanding step is carried out only in one direction.
Claim 6
Dependent Claim
22 words
The method of claim 4 wherein the expanded laser beam is focused with respect to the direction perpendicular to the expanding direction.
Claim 7
Dependent Claim
36 words
The method of claim 5 wherein the focusing step is carried out repeatedly on said substrate while said substrate is shifted to the focusing direction, so that a plurality of grooves are formed on said substrate.
Claim 8
Dependent Claim
11 words
The method of claim 1 wherein said laser beam is pulsed.
Claim 9
Dependent Claim
20 words
The method of claim 7 wherein the pulse width of the pulsed laser beam is less than 50 namo seconds.
Claim 10
Dependent Claim
36 words
The method of claim 1 where said expanding step is mainly implemented with respect to one direction and the laser beam deprived of the border portion becomes a flat beam having a line in cross section.
Claim 11
Dependent Claim
24 words
The method of claim 1 further compricing a step of eliminating the edge portions of said laser beam having a line in cross section.
References Cited (Backward Citations)
JPS5794482A
Cited
US4786358A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-09-11 | 1993-03-13 | 1993-09-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-09-11 | 1997-03-13 | 1997-09-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-09-11 | 2001-03-13 | 2001-09-12 | $7700.00 | Window Closed / Lapsed |