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US4865682A
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US
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Growth method of an organic compound single crystal and a boat used therefor
Assignee: Mitsubishi Chemical Corp
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Filing: 1988-02-26
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Granted: 1989-09-12
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Expires: 2008-02-26
Abstract
Abstract In the boat growth method of the IIIb-Vb group compound, the quartz boat is tridymitized on at least the surface thereof so as to prevent wetting of the boat due to the melt of the compound and hence to enhance the yield of a single crystal.
Inventors
- 👤 Takeshi Okano
- 👤 Hisanori Fujita
- 👤 Eiichiro Nishihara
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 06:28
CPC Classifications
C; C30; C30B; C30B11/00; C30B11/003; C30B11/002; Y; Y10; Y10S; Y10S117/00; Y10S117/90
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
129 words
In a method for forming a single crystal of GaAs which comprises crystallizing a melt of GaAs under controlled conditions in a quartz boat wherein said crystal is grown within said boat and in which at least a surface of the boat in contact with the melt has been sufficiently roughened to reduce wetting by the melt, the improvement which comprises: providing a quartz boat with at least a roughened surface is to contact the melt, tridymitizing said surface by heating the boat at a temperature of from about 830° C. to 1450° C. for from about 1 to 10 hours, to further reduce wetting by the melt and to thereby increase the yield of said single GaAs crystal, and thereafter growing said single GaAs crystal employing said boat.
Claim 2
Dependent Claim
129 words
In a method for forming a single crystal of GaAs which comprises crystallizing a melt of GaAs under controlled conditions in a quartz boat wherein said crystal is grown within said boat and in which at least a surface of the boat in contact with the melt has been sufficiently roughened to reduce wetting by the melt, the improvement which comprises: providing a quartz boat with at least a roughened surface is to contact the melt, tridymitizing said surface by heating the boat at a temperature of from about 830° C. to 1450° C. for from about 1 to 10 hours, to further reduce wetting by the melt and to thereby increase the yield of said single GaAs crystal, and thereafter growing said single GaAs crystal employing said boat.
Claim 3
Dependent Claim
23 words
A method according to claim 1, wherein said boat is heated to a temperature of from 830° C. to 1200° C. for tridymitizing.
Claim 4
Dependent Claim
19 words
The method of claim 1 wherein the roughened surface is roughened by contact with Al 2 O 3 .
Claim 5
Dependent Claim
15 words
The method of claim 1 wherein the roughened surface is roughened by contact with SiC.
Claim 6
Dependent Claim
31 words
The method of claim 1 wherein said tridymitizing is effected by heating said boat at a temperature of from about 900° C. to 1200° C. for from 2 to 10 hours.
Claim 7
Dependent Claim
130 words
In a method for growing a single crystal of GaAs utilizing the boat growth method wherein said crystal is grown within said boat, the improvement which comprises (a) preparing a quartz boat by: (i) contacting the inner surface of said boat with an inorganic powder under conditions whereby said surface is roughened to reduce wetting; (ii) cleaning said inner roughened surface with acid; (iii) washing and drying said inner roughened surface; and (iv) tridymitizing said surface by heating said boat at a temperature of from about 830° C. to 1450° C. for from about 1 to 10 hours, and then cooling to further reduce wetting by the melt and to thereby increase the yield of said single GaAs crystal and (b) growing said single GaAs crystal in said quartz boat.
Claim 8
Dependent Claim
130 words
In a method for growing a single crystal of GaAs utilizing the boat growth method wherein said crystal is grown within said boat, the improvement which comprises (a) preparing a quartz boat by: (i) contacting the inner surface of said boat with an inorganic powder under conditions whereby said surface is roughened to reduce wetting; (ii) cleaning said inner roughened surface with acid; (iii) washing and drying said inner roughened surface; and (iv) tridymitizing said surface by heating said boat at a temperature of from about 830° C. to 1450° C. for from about 1 to 10 hours, and then cooling to further reduce wetting by the melt and to thereby increase the yield of said single GaAs crystal and (b) growing said single GaAs crystal in said quartz boat.
Claim 9
Dependent Claim
15 words
The method of claim 6 wherein said inorganic powder is Al 2 O 3 .
Claim 10
Dependent Claim
11 words
The method of claim 6 wherein said inorganic powder is SiC.
Claim 11
Dependent Claim
32 words
The method of claim 6 wherein said tridymitizing is effected by heating said boat at a temperature of from about 900° C. to 1200° C. for from about 2 to 10 hours.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-09-11 | 1993-03-13 | 1993-09-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-09-11 | 1997-03-13 | 1997-09-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-09-11 | 2001-03-13 | 2001-09-12 | $7700.00 | Window Closed / Lapsed |