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US4863760A
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High speed chemical vapor deposition process utilizing a reactor having a fiber coating liquid seal and a gas sea;
Assignee: HP Inc
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Filing: 1988-10-26
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Granted: 1989-09-05
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Expires: 2008-10-26
Abstract
Abstract A CVD furnace, having a gas seal and a liquid seal, for chemical vapor deposition of a coating on a fiber. A CVD process utilizing the CVD furnace allows fibers to be pulled through the furnace without drawing gases entrained by the moving fiber into the reaction chamber of the furnace. The process is a hot fiber process, preferably deriving its heat from the meltdown point in an optical fiber pulling process. A coat containing carbon is applied by supplying a reactant containing a carbon having a triple bond. A small amount of silane is also supplied to the reaction chamber to act as an oxygen getter and to prevent tar-like reaction products from clogging the furnace.
Inventors
- 👤 Christopher A. Schantz
- 👤 Ronald Hiskes
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 11:09
CPC Classifications
C; C03; C03C; C03C25/00; C03C25/10; C03C25/12; C03C25/22; C03C25/223; C03C25/104; C03C25/106; C03C25/1061; C03C25/1062; C23; C23C; C23C16/00; C23C16/22; C23C16/26; C23C16/44; C23C16/54; C23C16/545
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
171 words
A chemical vapor deposition (CVD) process for coating a fiber, said process comprising the steps of: pulling said fiber through a first seal and second seal of a CVD furnace comprising a reaction chamber wall enclosing a reaction chamber in which chemical vapor deposition is to take place, said reaction chamber wall having a plurality of openings including a reactant inlet for entry of reactants to provide reactant gases within said reaction chamber, and exhaust port for removal of gases from said reaction chamber, and a pair of fiber apertures through which said fiber can be pulled said first seal being located at a first of these two apertures to allow entry to the fiber into the reaction chamber and said second seal being located at a second of these two apertures to allow exit of the fiber from the reaction chamber, wherein a first of these seals is a gas seal and a second of these is a liquid seal; injecting at least one reactant gas through said reactant inlet.
Claim 2
Dependent Claim
171 words
A chemical vapor deposition (CVD) process for coating a fiber, said process comprising the steps of: pulling said fiber through a first seal and second seal of a CVD furnace comprising a reaction chamber wall enclosing a reaction chamber in which chemical vapor deposition is to take place, said reaction chamber wall having a plurality of openings including a reactant inlet for entry of reactants to provide reactant gases within said reaction chamber, and exhaust port for removal of gases from said reaction chamber, and a pair of fiber apertures through which said fiber can be pulled said first seal being located at a first of these two apertures to allow entry to the fiber into the reaction chamber and said second seal being located at a second of these two apertures to allow exit of the fiber from the reaction chamber, wherein a first of these seals is a gas seal and a second of these is a liquid seal; injecting at least one reactant gas through said reactant inlet.
Claim 3
Dependent Claim
57 words
A CVD process as in claim 1 wherein the gas seal has a fiber inlet through which the fiber is pulled into the reaction chamber; wherein the rate of flow of gases across all openings in the chamber other than the fiber inlet are controlled so that the flow of gas across the fiber inlet is determined.
Claim 4
Dependent Claim
38 words
A CVD process as in claim 1 wherein the liquid seal contains a liquid that is to be applied on top of the coat deposited in the CVD reaction chamber to form an additional coat on the fiber.
Claim 5
Dependent Claim
17 words
A CVD process as in claim 1 wherein the process is a cold wall, hot fiber process.
Claim 6
Dependent Claim
59 words
A CVD process as in claim 4 wherein the fiber is an optical fiber that is pulled from a preform that is heated at a meltdown point located at a distance from the reaction chamber such that, while the optical fiber passes through the reaction chamber the fiber has a temperature suitable for CVD reaction in the reaction chamber.
Claim 7
Dependent Claim
23 words
A CVD process as in claim 4 in which the reactants include a carbon source having a triple bond at a carbon atom.
Claim 8
Dependent Claim
22 words
A CVD process as in claim 6 wherein the carbon source is selected from the set consisting of acetylene and methyl acetylene.
Claim 9
Dependent Claim
19 words
A CVD process as in claim 1 wherein the reactant gases include a carbon source and an oxygen getter.
Claim 10
Dependent Claim
13 words
A CVD process as in claim 8 wherein the oxygen getter is silane.
Claim 11
Dependent Claim
33 words
A CVD process as in claim 6 wherein the reactants further include a silicon source in sufficient quantity to prevent a tar-like coating of reaction products from depositing on the reaction chamber wall.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-09-04 | 1993-03-06 | 1993-09-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-09-04 | 1997-03-06 | 1997-09-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-09-04 | 2001-03-06 | 2001-09-05 | $7700.00 | Window Closed / Lapsed |