US4862032A
Expired / Lapsed
US
⏱️ 0.0 years remaining
End-Hall ion source
Assignee: Kaufman and Robinson Inc
•
Filing: 1986-10-20
•
Granted: 1989-08-29
•
Expires: 2006-10-20
Abstract
Abstract A gas, ionizable to produce a plasma, is introduced into a region defined within an ion source. An anode is disposed near one end of that region, and a cathode is located near the other. A potential is impressed between the anode and the cathode to produce electrons which flow generally in a direction from the cathode toward the anode and bombard the gas to create a plasma. A magnetic field is established within the region in a manner such that the field strength decreases in the direction from the anode to the cathode. The direction of the field is generally between the anode and the cathode. The electrons are produced independently of any ion bombardment of the cathode, the magnet is located outside the region on the other side of the anode and the gas is introduced uniformly across the region.
Inventors
- 👤 Harold R. Kaufman
- 👤 Raymond S. Robinson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 08:44
CPC Classifications
H; H01; H01J; H01J27/00; H01J27/02; H01J27/08; H01J27/14; H01J27/146
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
178 words
An ion source comprising: means for introducing and distributing a gas, ionizable to produce a plasma, uniformly in a transverse direction across a region within said source; an anode disposed within said source near one longitudinal end of said region; a cathode disposed near the other longitudinal end of said region and spaced from said anode; means for impressing a potential difference between said anode and said cathode to produce electrons flowing generally in a longitudinal direction from said cathode toward said anode in bombardment of said gas to create said plasma, the production of said electrons being independent of any substantial bombardment of said cathode by ions in said plasma; and means included within said source for establishing within said region a magnetic field the strength of which decreases in the direction from said anode to said cathode and the direction of which field is generally between said anode and said cathode, said establishing means including a magnet located entirely outside of and on the side of said anode away from said region in said longitudinal direction.
Claim 2
Dependent Claim
178 words
An ion source comprising: means for introducing and distributing a gas, ionizable to produce a plasma, uniformly in a transverse direction across a region within said source; an anode disposed within said source near one longitudinal end of said region; a cathode disposed near the other longitudinal end of said region and spaced from said anode; means for impressing a potential difference between said anode and said cathode to produce electrons flowing generally in a longitudinal direction from said cathode toward said anode in bombardment of said gas to create said plasma, the production of said electrons being independent of any substantial bombardment of said cathode by ions in said plasma; and means included within said source for establishing within said region a magnetic field the strength of which decreases in the direction from said anode to said cathode and the direction of which field is generally between said anode and said cathode, said establishing means including a magnet located entirely outside of and on the side of said anode away from said region in said longitudinal direction.
Claim 3
Dependent Claim
144 words
An ion source comprising: means for introducing a gas, ionizable to produce a plasma, into a region within said source; an anode disposed within said source near one end of said region; a cathode disposed near the other end of said region and spaced from said anode; means for impressing a potential difference between said anode and said cathode to produce electrons flowing generally in a direction from said cathode toward said anode in bombardment of said gas to create said plasma, the production of said electrons being substantially independent of any bombardment of said cathode by ions in said plasma; and means included within said source for establishing within said region a magnetic field the strength of which continually decreases in the direction from said anode to said cathode and the direction of which field is generally between said anode and said cathode.
Claim 4
Dependent Claim
144 words
An ion source comprising: means for introducing a gas, ionizable to produce a plasma, into a region within said source; an anode disposed within said source near one end of said region; a cathode disposed near the other end of said region and spaced from said anode; means for impressing a potential difference between said anode and said cathode to produce electrons flowing generally in a direction from said cathode toward said anode in bombardment of said gas to create said plasma, the production of said electrons being substantially independent of any bombardment of said cathode by ions in said plasma; and means included within said source for establishing within said region a magnetic field the strength of which continually decreases in the direction from said anode to said cathode and the direction of which field is generally between said anode and said cathode.
Claim 5
Dependent Claim
149 words
An ion source comprising: means for introducing a gas, ionizable to produce a plasma, into a region within said source; an anode disposed within said source near one end of said region; a cathode disposed near the other end of said region and spaced from said anode; means for impressing a potential between said anode and said cathode to produce electrons flowing generally in a longitudinal direction from said cathode toward said anode in bombardment of said gas to create said plasma; and means included within said source for establishing within said region a magnetic field the strength of which decreases in the direction from said anode to said cathode and the direction of which field is generally between said anode and said cathode, said establishing means including a magnet located entirely outside of and on the side of said anode away from said region in said longitudinal direction.
Claim 6
Dependent Claim
149 words
An ion source comprising: means for introducing a gas, ionizable to produce a plasma, into a region within said source; an anode disposed within said source near one end of said region; a cathode disposed near the other end of said region and spaced from said anode; means for impressing a potential between said anode and said cathode to produce electrons flowing generally in a longitudinal direction from said cathode toward said anode in bombardment of said gas to create said plasma; and means included within said source for establishing within said region a magnetic field the strength of which decreases in the direction from said anode to said cathode and the direction of which field is generally between said anode and said cathode, said establishing means including a magnet located entirely outside of and on the side of said anode away from said region in said longitudinal direction.
Claim 7
Dependent Claim
133 words
An ion source comprising: means for introducing and distributing a gas, ionizable to produce a plasma, uniformly in a transverse direction across a region within said source; an anode disposed within said source near one longitudinal end of said region; a cathode disposed near the other longitudinal end of said region and spaced from said anode; means for impressing a potential between said anode and said cathode to produce electrons flowing generally in a longitudinal direction from said cathode toward said anode in bombardment of said gas to create said plasma; and means included within said source for establishing within said region a magnetic field the strength of which decreases in the direction from said anode to said cathode and the direction of which field is generally between said anode and said cathode.
Claim 8
Dependent Claim
133 words
An ion source comprising: means for introducing and distributing a gas, ionizable to produce a plasma, uniformly in a transverse direction across a region within said source; an anode disposed within said source near one longitudinal end of said region; a cathode disposed near the other longitudinal end of said region and spaced from said anode; means for impressing a potential between said anode and said cathode to produce electrons flowing generally in a longitudinal direction from said cathode toward said anode in bombardment of said gas to create said plasma; and means included within said source for establishing within said region a magnetic field the strength of which decreases in the direction from said anode to said cathode and the direction of which field is generally between said anode and said cathode.
Claim 9
Dependent Claim
70 words
An ion source as defined in claims 2, 3 or 4 in which said establishing means includes a ferromagnetic material, having a permeability substantially greater than unity, to shape and control the distribution of strength within said magnetic field, and in which said ferromagnetic material, completing the magnetic flux return path outside of said region, exhibits a relative permeability of at least approximately two orders of magnitude greater than unity.
Claim 10
Dependent Claim
30 words
An ion source as defined in claims 2, 3 or 4 wherein said establishing means includes at least one element which is electrically isolated from said anode and said cathode.
Claim 11
Dependent Claim
72 words
An ion source as defined in claims 2, 3 or 4 in which said establishing means establishes a plasma potential that varies laterally of the path between said anode and said cathode but a fraction of and substantially less than the plasma potential difference between the vicinity of said cathode and the vicinity of said anode, said lateral variation of plasma potential serving to control focusing or defocusing of the ion beam.
Claim 12
Dependent Claim
33 words
An ion source as defined in claims 2, 3 or 4 in which said anode is generally cylindrical in shape with an interior wall which tapers outwardly in a direction toward said cathode.
Claim 13
Dependent Claim
63 words
An ion source as defined in claims 2, 3 or 4 in which said establishing means includes a first annular pole piece disposed on the side of said anode away from said region and adjacent to and axially aligned with said anode and a second annular pole piece spaced from said first pole piece toward said cathode and axially aligned with said anode.
Claim 14
Dependent Claim
44 words
An ion source as defined in claim 9 in which said anode is generally cylindrical in shape, and in which the interior of said second pole piece is disposed to be outside a projection of the interior wall of said anode toward said cathode.
Claim 15
Dependent Claim
26 words
An ion source as defined in claim 2, 3 or 4 in which said establishing means further includes means for distributing said field through said region.
Claim 16
Dependent Claim
35 words
An ion source as defined in claims 2 or 4 in which said establishing means includes means for developing said field and which is located on the side of said anode remote from said cathode.
Claim 17
Dependent Claim
57 words
An ion source as defined in claim 2 in which said cathode is electrically heated by an external power source and is located downstream in the flow of ions created within said plasma and at a location wherein the strength of said magnetic field is low relative to the strength of said field elsewhere within said region.
Claim 18
Dependent Claim
48 words
An ion source as defined in claim 4 in which said introducing means includes means for controlling the distribution of said gas in order to control the density of said plasma downstream from said anode in the direction of ion flow and thereby control the anode-cathode potential difference.
Claim 19
Dependent Claim
38 words
An ion source as defined in claim 4 in which said introducing and distributing means includes means for distributing said gas substantially uniformly in passage through the portion of said region significantly and directly influenced by said anode.
Claim 20
Dependent Claim
28 words
An ion source as defined in claim 4 which further includes means for introducing a portion of said gas into said region between said cathode and said anode.
Claim 21
Dependent Claim
22 words
An ion source as defined in claim 4 in which said introducing means is electrically isolated from said anode and said cathode.
Claim 22
Dependent Claim
37 words
An ion source as defined in claim 4 in which said anode is cylindrical in shape and said gas is introduced into said region through said anode from the end of said anode remote from said cathode.
Claim 23
Dependent Claim
60 words
An ion source as defined in claim 18 in which said establishing means includes a first annular pole piece disposed on the side of said anode away from said region and adjacent to and axially aligned with said anode and a second annular pole piece spaced from said first pole piece toward said cathode and axially aligned with said anode.
Claim 24
Dependent Claim
28 words
An ion source as defined in claim 4 in which said anode is of cylindrical shape to produce an ion beam of circular cross-sectional shape across its diameter.
Claim 25
Dependent Claim
77 words
An ion source as defined in claim 2, 3, or 4 in which the potential difference V p along the direction between said anode and said cathode is expressed substantially in accordance with the relationship ΔV.sub.p =(kT.sub.e /e) ln (B/B.sub.o), where K is the Boltzman constant, T e is the electron temperature in K, e is the electron charge and B and B o are the magnetic field strengths in two locations spaced apart along said direction.
References Cited (Backward Citations)
US3309873A
Cited
US3388291A
Cited
US3360682A
Cited
US3735591A
Cited
US3956666A
Cited
US4104875A
Cited
GB1543530A
Cited
DE2904049A1
Cited
US4277304A
Cited
DE2913464A1
Cited
US4361472A
Cited
EP0095879A2
Cited
US4548033A
Cited
US4684848A
Cited
EP0174058A2
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-08-28 | 1993-02-27 | 1993-08-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-08-28 | 1997-02-27 | 1997-08-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-08-28 | 2001-02-27 | 2001-08-29 | $7700.00 | Window Closed / Lapsed |