EP0095879A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Apparatus and method for working surfaces with a low energy high intensity ion beam
Assignee: International Business Machines Corp
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Filing: 1983-05-23
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Granted: —
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Expires: 2003-05-23
Abstract
Abstract Apparatus and method for generating low energy high intensity ion beams. A Hall current ion source is provided to conduct many integrated circuit fabrication processes which require low energy ion bombardment such as surface cleaning. Ion sources are provided which have tapered magnetic pole pieces for controlling the dispersion pattern of the ion beam.
Inventors
- 👤 Harold Richard Kaufman
- 👤 Jerome John Cuomo
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-26 07:50
CPC Classifications
H; H01; H01J; H01J27/00; H01J27/02; H01J27/08; H01J27/14; H01J27/143; H01J37/00; H01J37/02; H01J37/04; H01J37/08
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
139 words
An apparatus for producing a beam of ions comprising: an elongate plasma chamber; an inlet (14) for introducing a plasma- forming gas into the plasma chamber; a first magnetic pole piece (4b) of circular cross-section extending axially within the plasma chamber; a second magnetic pole piece (4a) of annular cross-section surrounding the first pole piece (4b) for establishing a radial magnetic field (18) between the pole pieces (4a, 4b); an electron source (10 or 20); and an anode (16) located adjacent one end of the magnetic pole pieces (4a, 4b) for receiving a voltage potential such that electrons from the source (10,20) are drawn towards the anode (16) through the plasma in between the magnetic pole pieces (4a, 4b), characterised in that: the radial separation between the first and second pole pieces (4a, 4b) decreases along the length thereof.
Claim 2
Independent Claim
139 words
An apparatus for producing a beam of ions comprising: an elongate plasma chamber; an inlet (14) for introducing a plasma- forming gas into the plasma chamber; a first magnetic pole piece (4b) of circular cross-section extending axially within the plasma chamber; a second magnetic pole piece (4a) of annular cross-section surrounding the first pole piece (4b) for establishing a radial magnetic field (18) between the pole pieces (4a, 4b); an electron source (10 or 20); and an anode (16) located adjacent one end of the magnetic pole pieces (4a, 4b) for receiving a voltage potential such that electrons from the source (10,20) are drawn towards the anode (16) through the plasma in between the magnetic pole pieces (4a, 4b), characterised in that: the radial separation between the first and second pole pieces (4a, 4b) decreases along the length thereof.
Claim 3
Dependent Claim
22 words
An apparatus according to claim 1, wherein the electron source is a cathode (20) located outside the magnetic pole pieces (4a, 4b).
Claim 4
Dependent Claim
20 words
An apparatus according to claim 2, and including a further cathode (10) located inside the magnetic pole pieces (4a, 4b).
Claim 5
Dependent Claim
20 words
An apparatus according to claim 4, and including a third cathode (26) located inside the magnetic pole pieces (4a, 4b).
Claim 6
Dependent Claim
22 words
An apparatus according to claim 2, wherein the electron source is a cathode (10) located inside the magnetic pole pieces (4a, 4b).
Claim 7
Independent Claim
21 words
An apparatus according to any one of claims 2 to 5, wherein each cathode (10, 20 or 26) comprises a filament.
Claim 8
Independent Claim
21 words
An apparatus according to any one of claims 1 to 6, wherein the inlet (14) is located adjacent the anode (16).
Claim 9
Independent Claim
31 words
An apparatus according to any one of claims 1 to 7, wherein the anode (16) circumferentially surrounds a part of the first magnetic pole piece 4b adjacent the one end thereof.
Claim 10
Independent Claim
25 words
An apparatus according to any one of claims 1 to 8, and including sputtering reducing . electrodes (9b) within the magnetic pole pieces (4a, 4b).
Claim 11
Independent Claim
24 words
An apparatus according to any one of claims 1 to 9, wherein the radial separation increases in the direction away from the anode (16).
Claim 12
Independent Claim
24 words
An apparatus according to any one of claims 1 to 9, wherein the radial separation decreases in the direction away from the anode (16).
Claim 13
Independent Claim
25 words
An apparatus according to any one of claims 1 to 11, wherein each magnetic pole piece (4a or 4b) has a truncated conical cross section.
Claim 14
Dependent Claim
60 words
A process for cleaning, etching, or depositing material on, a substrate, comprising: generating a high density, low energy beam of appropriate ions in an apparatus according to any one of claims 1 to 12; and directing the beam of ions onto the substrate to cause removal of contaminants from, removal of particles from or deposition of ions on, said substrate.
References Cited (Backward Citations)
No citation records indexed.
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